公开(公告)号：US06962419B2

公开(公告)日：2005-11-08

申请号：US10343307

申请日：2001-03-08

申请人： Andrew G. Huibers

发明人： Andrew G. Huibers

IPC分类号： G03B21/14 ,  G03B21/28 ,  H04N5/74

CPC分类号： H04N5/7458 ,  G03B21/28 ,  H01L2224/48091 ,  H01L2224/48472 ,  H01L2924/16195 ,  H01L2924/00014

摘要： In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

摘要翻译： 为了最小化沿着切换方向的光衍射，并且更特别地，将光衍射最小化到收集光学器件的接收锥体中，在本发明中，提供了不是矩形的微镜。 此外，为了最小化本发明的照明光学器件的成本和显示单元的尺寸，将光源与阵列的行（或列）正交放置，和/或将光源正交 到帧的定义阵列的有效区域的一侧。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，并且即使微镜处于“关闭”状态，也导致光“泄漏”进入“打开”状态。 该光衍射降低了微镜的对比度。 本发明的微反射镜导致对比度提高，并且在本发明中光源到微镜阵列的布置导致更紧凑的系统。 本发明的另一个特征是微镜能够相对于打开和关闭位置（将光引导到收集光学器件）的相对方向枢转，其中到打开位置的移动大于移动到关闭位置。 本发明的另一个特征是用于微镜阵列的封装，该封装具有不与形成微反射镜的基板平行的窗口。 本发明的一个实例包括所有上述特征。

公开(公告)号：US06960305B2

公开(公告)日：2005-11-01

申请号：US10402777

申请日：2003-03-28

申请人： Jonathan C. Doan ,  Satyadev R. Patel ,  Andrew G. Huibers ,  Jason S. Reid

发明人： Jonathan C. Doan ,  Satyadev R. Patel ,  Andrew G. Huibers ,  Jason S. Reid

IPC分类号： B81C1/00 ,  C23F1/00

CPC分类号： C23F4/00 ,  B81B2201/045 ,  B81C1/00476 ,  C03C17/36 ,  C03C17/3663 ,  G02B26/0841 ,  H01L21/32135

摘要： A method for making a spatial light modulator is disclosed, that comprises forming an array of micromirrors each having a hinge and a micromirror plate held via the hinge on a substrate, the micromirror plate being disposed in a plane separate from the hinge and having a hinge made of a transition metal nitride, followed by releasing the micromirrors in a spontaneous gas phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

摘要翻译： 公开了一种用于制造空间光调制器的方法，其包括形成各自具有铰链的微镜阵列和通过所述铰链保持在基板上的微镜板，所述微镜板设置在与所述铰链分离的平面中并且具有铰链 由过渡金属氮化物制成，然后在自发气相化学蚀刻剂中释放微反射镜。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。

公开(公告)号：US06950223B2

公开(公告)日：2005-09-27

申请号：US10346506

申请日：2003-01-15

申请人： Andrew G. Huibers ,  Satyadev R. Patel

发明人： Andrew G. Huibers ,  Satyadev R. Patel

IPC分类号： G02B26/08 ,  G02B26/00 ,  G02B5/08 ,  H01L29/84

CPC分类号： G02B26/0841

摘要： A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.

摘要翻译： 公开了一种MEMS器件，包括：衬底; 可移动微机械元件，其相对于所述基板移动; 用于允许微机械元件移动的连接器和铰链，其中连接器由不同于铰链的材料制成。 在本发明的另一个实施例中，连接器的导电率大于铰链。 在本发明的另一实施例中，铰链提供至少90％的恢复力到MEMS装置，并且连接器提供10％或更小的恢复力。 在本发明的另一实施例中，连接器和铰链具有不同的弹簧常数。 在本发明的另一个实施例中，连接器在微型机械元件的最大偏转方面比铰链经历较低的应变。

公开(公告)号：US06690502B2

公开(公告)日：2004-02-10

申请号：US10153138

申请日：2002-05-20

申请人： Andrew G. Huibers

发明人： Andrew G. Huibers

IPC分类号： G02B2608

CPC分类号： G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

摘要： A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

摘要翻译： 空间光调制器包括保持在包含寻址电路的下基板上的上透光基板。 一个或多个静电可偏转元件通过铰链从上基板悬挂。 在操作中，单独的反射镜被选择性地偏转并且用于空间调制入射到上基板上并随后被上反射回的光。 运动止挡件可以附接到反射偏转元件，使得反射镜不卡扣到底部基板。 相反，运动停止件靠在上基板上，从而限制反射可偏转元件的偏转角。

公开(公告)号：US06529310B1

公开(公告)日：2003-03-04

申请号：US09631536

申请日：2000-08-03

申请人： Andrew G. Huibers ,  Peter J. Heureux

发明人： Andrew G. Huibers ,  Peter J. Heureux

IPC分类号： G02B2600

CPC分类号： G02B26/0841

摘要： A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.

摘要翻译： 一种空间光调制器，具有保持可偏转（例如反射镜）元件阵列的基板。 可偏转元件通过相应的铰链可偏转地联接到基板，每个铰链设置在可偏转元件的与设置基板的一侧相对的一侧上。 通过以这种方式放置铰链，阵列的填充因子得到改善。 铰链可以设置成与可偏转元件齐平，或者可以在可偏转元件和铰链之间设置间隙。 铰链可以通过连接到基底的一个或多个柱或壁，以及当通过基底（例如玻璃基底）观察时基本上或完全隐藏的视图的柔性或可变形部分附接。 在一个实施例中，铰链连接到基板和可偏转元件的下侧，并且连接到可偏转元件的中心部分。 以这种方式，提供更长的铰链，从而减小铰链的任何一个部分的应变。 本发明的优点包括：（1）当扭转铰链隐藏在反射板后面时，增加的填充因数; （2）由于较少的散射光学表面暴露，并且由于更大的控制其角度和几何形状的能力，增加了对比度; 和（3）提高几何柔性，以优化机电性能和制造方面的鲁棒性。

公开(公告)号：US07215458B2

公开(公告)日：2007-05-08

申请号：US10982259

申请日：2004-11-05

申请人： Peter Richards ,  Satyadev Patel ,  Andrew G. Huibers ,  Michel Combes

发明人： Peter Richards ,  Satyadev Patel ,  Andrew G. Huibers ,  Michel Combes

IPC分类号： G02B26/00

CPC分类号： G09G3/346 ,  G09G2320/04

摘要： A method and apparatus for operating spatial light modulator have been disclosed herein. The spatial light modulator comprises an array of micromirror devices, each of which further comprises a reflective deflectable mirror plate attached to a deformable hinge, and an addressing electrode for addressing and deflecting the mirror plate.

摘要翻译： 本文已经公开了用于操作空间光调制器的方法和装置。 空间光调制器包括微镜器件的阵列，每个微镜器件还包括连接到可变形铰链的反射偏转镜板，以及用于寻址和偏转镜板的寻址电极。

公开(公告)号：US07172296B2

公开(公告)日：2007-02-06

申请号：US10857519

申请日：2004-05-28

申请人： Andrew G. Huibers

发明人： Andrew G. Huibers

IPC分类号： G03B21/14 ,  G03B21/28

CPC分类号： G03B21/28 ,  G02B26/0841 ,  Y10S359/904

摘要： In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

摘要翻译： 为了最小化沿着切换方向的光衍射，并且更特别地，将光衍射最小化到收集光学器件的接收锥体中，在本发明中，提供了不是矩形的微镜。 此外，为了最小化本发明的照明光学器件的成本和显示单元的尺寸，将光源与阵列的行（或列）正交放置，和/或将光源正交 到帧的定义阵列的有效区域的一侧。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，并且即使微镜处于“关闭”状态，也导致光“泄漏”进入“打开”状态。 该光衍射降低了微镜的对比度。 本发明的微反射镜导致对比度提高，并且在本发明中光源到微镜阵列的布置导致更紧凑的系统。 本发明的另一个特征是微镜能够相对于打开和关闭位置（将光引导到收集光学器件）的相对方向枢转，其中到打开位置的移动大于移动到关闭位置。 本发明的另一个特征是用于微镜阵列的封装，该封装具有不与形成微反射镜的基板平行的窗口。 本发明的一个实例包括所有上述特征。

公开(公告)号：US07027200B2

公开(公告)日：2006-04-11

申请号：US10666002

申请日：2003-09-17

申请人： Hongqin Shi ,  Gregory P. Schaadt ,  Andrew G. Huibers ,  Satyadev R. Patel

发明人： Hongqin Shi ,  Gregory P. Schaadt ,  Andrew G. Huibers ,  Satyadev R. Patel

IPC分类号： G02B26/00

CPC分类号： H01L21/67069 ,  B81C1/00595 ,  B81C2201/0132 ,  G02B26/0841

摘要： The present invention discloses a method and apparatus for removing the sacrificial materials in fabrications of microstructures using a vapor phase etchant recipe having a spontaneous vapor phase chemical etchant. The vapor phase etchant recipe has a mean-free-path corresponding to the minimum thickness of the sacrificial layers between the structural layers of the microstructure. This method is of particular importance in removing the sacrificial layers underneath the structural layers of the microstructure.

摘要翻译： 本发明公开了一种使用具有自发气相化学蚀刻剂的气相蚀刻剂配方去除微结构制造中的牺牲材料的方法和装置。 气相蚀刻剂配方具有对应于微结构的结构层之间的牺牲层的最小厚度的平均自由程。 该方法在去除微结构结构层下面的牺牲层时尤其重要。

公开(公告)号：US07009754B2

公开(公告)日：2006-03-07

申请号：US11090800

申请日：2005-03-24

申请人： Andrew G. Huibers

发明人： Andrew G. Huibers

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

摘要： A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

公开(公告)号：US06995034B2

公开(公告)日：2006-02-07

申请号：US10930342

申请日：2004-08-30

申请人： Satyadev R. Patel ,  Andrew G. Huibers ,  Steve S. Chiang

发明人： Satyadev R. Patel ,  Andrew G. Huibers ,  Steve S. Chiang

IPC分类号： H01L21/00

CPC分类号： B81C1/00333 ,  B81B2201/042 ,  B81C2203/0118 ,  B82Y30/00 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12044 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

摘要： A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.