Substrate polishing apparatus
    11.
    发明授权

    公开(公告)号:US12269140B2

    公开(公告)日:2025-04-08

    申请号:US16411141

    申请日:2019-05-14

    Abstract: A substrate polishing apparatus including a stage configured to load a substrate, the stage having a flat surface, which is parallel to a first direction and a second direction, and on which the substrate is loaded, a pressing unit configured to exert a pressure on the substrate in a third direction, a rotary unit configured to revolve the pressing unit around a central axis parallel to the third direction, when viewed in a plan view, a plurality of polishing pads provided between the pressing unit and the substrate to be in contact with the substrate, and a nozzle part configured to supply a slurry onto the substrate. The polishing pads may be spaced apart from each other in a direction and may have a rectangular shape in the plan view.

    LASER OPTICAL SYSTEM AND LASER ANNEALING DEVICE INCLUDING THE SAME
    15.
    发明申请
    LASER OPTICAL SYSTEM AND LASER ANNEALING DEVICE INCLUDING THE SAME 有权
    激光光学系统和包括其的激光退火装置

    公开(公告)号:US20160252732A1

    公开(公告)日:2016-09-01

    申请号:US14800547

    申请日:2015-07-15

    Abstract: A laser optical system including: a beam splitter configured to split a laser beam into a first light and a second light by reflecting a portion of the laser beam and transmitting another portion of the laser beam; a first reflective member located in a path of the first light and reflecting the first light; and a second reflective member located in a path of the first light and reflecting the first light toward the beam splitter after the first light is reflected by the first reflective member, wherein a portion of the first light reflected toward the beam splitter is incident on and passes through the beam splitter and at least partially overlaps the second light.

    Abstract translation: 一种激光光学系统,包括:分束器,其被配置为通过反射所述激光束的一部分并且传输所述激光束的另一部分来将激光束分裂成第一光和第二光; 位于所述第一光的路径中并反射所述第一光的第一反射构件; 以及第二反射构件,位于所述第一光的路径中,并且在所述第一光被所述第一反射构件反射之后,将所述第一光反射到所述分束器,其中朝向所述分束器反射的所述第一光的一部分入射, 通过分束器并且至少部分地与第二光重叠。

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