公开(公告)号：US09829712B2

公开(公告)日：2017-11-28

申请号：US14800547

申请日：2015-07-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joowoan Cho ,  Sanghoon Ahn ,  Byoungho Cheong ,  Byoungkwon Choo

IPC: H01L21/02 ,  G02B27/09 ,  H01S3/00 ,  G02B27/14 ,  G02B26/08 ,  B23K26/08 ,  B23K26/00 ,  B23K26/06 ,  B23K26/067 ,  B23K26/352 ,  B23K101/40

CPC classification number: G02B27/0927 ,  B23K26/0006 ,  B23K26/0608 ,  B23K26/0643 ,  B23K26/067 ,  B23K26/352 ,  B23K2101/40 ,  G02B26/0816 ,  G02B27/0905 ,  G02B27/0977 ,  G02B27/144 ,  H01S3/005 ,  H01S3/0071

Abstract: A laser optical system including: a beam splitter configured to split a laser beam into a first light and a second light by reflecting a portion of the laser beam and transmitting another portion of the laser beam; a first reflective member located in a path of the first light and reflecting the first light; and a second reflective member located in a path of the first light and reflecting the first light toward the beam splitter after the first light is reflected by the first reflective member, wherein a portion of the first light reflected toward the beam splitter is incident on and passes through the beam splitter and at least partially overlaps the second light.

公开(公告)号：US20220209208A1

公开(公告)日：2022-06-30

申请号：US17506163

申请日：2021-10-20

Applicant: Samsung Display Co., Ltd.

Inventor： Seungbae Kang ,  Heesung Yang ,  Byoungkwon Choo ,  Woojin Cho

IPC: H01L51/56 ,  H01L27/32

Abstract: The method of manufacturing a display device includes preparing a substrate having a first and second area surrounding a portion of the first area, forming a semiconductor layer in the first area, forming a first insulating layer covering the semiconductor layer, forming a gate electrode layer that at least partially overlaps the semiconductor layer, forming a pad electrode layer in the second area, forming a second insulating layer covering the gate electrode layer, forming contact holes that at least partially expose the semiconductor layer and the gate electrode layer, and forming a conductive layer positioned in the contact holes and including a first and second layer. The forming of the conductive layer includes forming a first layer material and a second layer material, and removing a portion of the first layer material and a portion of the second layer material to expose the second insulating layer.

公开(公告)号：US11311979B2

公开(公告)日：2022-04-26

申请号：US17158657

申请日：2021-01-26

Applicant: Samsung Display Co., Ltd. ,  KCTECH CO.,LTD.

Inventor： Junggun Nam ,  Seungik Kang ,  Seungbae Kang ,  Pungseok Kim ,  Heesung Yang ,  Keunwoo Lee ,  Woojin Cho ,  Byoungkwon Choo

IPC: B24B37/07 ,  B32B38/00 ,  B24B37/20

Abstract: An apparatus for manufacturing a display device includes a moving part including a belt that circulates, a roller that circulates the belt, and at least one meandering prevention portion that moves in a first direction parallel to a direction of a rotation shaft of the roller and prevents meandering of the belt, and a polishing head disposed corresponding to the moving part, the polishing head polishing a surface of a base material disposed on a first surface of the belt. A part of the at least one meandering prevention portion faces a second surface of the belt, the second surface being a side surface of the belt.

公开(公告)号：US12207531B2

公开(公告)日：2025-01-21

申请号：US17506163

申请日：2021-10-20

Applicant: Samsung Display Co., Ltd.

Inventor： Seungbae Kang ,  Heesung Yang ,  Byoungkwon Choo ,  Woojin Cho

IPC: H10K71/00 ,  H10K59/12 ,  H10K59/131

Abstract: The method of manufacturing a display device includes preparing a substrate having a first and second area surrounding a portion of the first area, forming a semiconductor layer in the first area, forming a first insulating layer covering the semiconductor layer, forming a gate electrode layer that at least partially overlaps the semiconductor layer, forming a pad electrode layer in the second area, forming a second insulating layer covering the gate electrode layer, forming contact holes that at least partially expose the semiconductor layer and the gate electrode layer, and forming a conductive layer positioned in the contact holes and including a first and second layer. The forming of the conductive layer includes forming a first layer material and a second layer material, and removing a portion of the first layer material and a portion of the second layer material to expose the second insulating layer.

公开(公告)号：US12090601B2

公开(公告)日：2024-09-17

申请号：US17711239

申请日：2022-04-01

Applicant: Samsung Display Co., Ltd.

Inventor： Junggun Nam ,  Seungik Kang ,  Seungbae Kang ,  Pungseok Kim ,  Heesung Yang ,  Keunwoo Lee ,  Woojin Cho ,  Byoungkwon Choo

IPC: B24B37/07 ,  B24B37/20 ,  B32B38/00

CPC classification number: B24B37/07 ,  B32B38/0012 ,  B24B37/20 ,  B32B2038/0064 ,  B32B2457/20

Abstract: An apparatus for manufacturing a display device includes a moving part including a belt that circulates, a roller that circulates the belt, and at least one meandering prevention portion that moves in a first direction parallel to a direction of a rotation shaft of the roller and prevents meandering of the belt, and a polishing head disposed corresponding to the moving part, the polishing head polishing a surface of a base material disposed on a first surface of the belt. A part of the at least one meandering prevention portion faces a second surface of the belt, the second surface being a side surface of the belt.

公开(公告)号：US11203703B2

公开(公告)日：2021-12-21

申请号：US16247730

申请日：2019-01-15

Applicant: SAMSUNG DISPLAY CO., LTD. ,  UBmaterials Inc.

Inventor： Hyunjin Cho ,  Joonhwa Bae ,  Byoungkwon Choo ,  Woojin Cho ,  Jinhyung Park

IPC: H01L21/321 ,  H01L21/3105 ,  H01L21/306 ,  H01L21/302 ,  C09K3/14 ,  C09G1/04 ,  C09G1/02 ,  C09G1/00 ,  B24B37/04

Abstract: A polishing slurry includes an abrasive material, a first oxide polishing promoter, a first nitride polishing inhibitor, and a second nitride polishing inhibitor. The first oxide polishing promoter includes a polymer-based oxide polishing promoter. The first nitride polishing inhibitor includes an anionic nitride polishing inhibitor. The second nitride polishing inhibitor includes at least one selected from a cationic nitride polishing inhibitor and a non-ionic nitride polishing inhibitor.

公开(公告)号：US20220130934A1

公开(公告)日：2022-04-28

申请号：US17239150

申请日：2021-04-23

Applicant: Samsung Display Co., Ltd.

Inventor： Seungbae Kang ,  Heesung Yang ,  Woojin Cho ,  Byoungkwon Choo

IPC: H01L27/32 ,  H01L51/56

Abstract: Provided are a display device and a method of manufacturing the display device. The display device includes a substrate including a display area and a peripheral area outside the display area, a plurality of data lines disposed in the display area, a plurality of lines disposed in the display area, respectively connected to the plurality of data lines, and configured to respectively transmit a data signal from a driving circuit disposed in the peripheral area to the plurality of data lines, an insulating layer covering the plurality of lines; and a light-emitting element disposed on the insulating layer, wherein each of the plurality of lines comprises a plurality of branches branched in a direction crossing an extending direction of the line, and a black layer is disposed on an insulating layer at a position corresponding to an interval between a plurality of adjacent branches in a vertical direction.

公开(公告)号：US09969047B2

公开(公告)日：2018-05-15

申请号：US15138630

申请日：2016-04-26

Applicant: Samsung Display Co., Ltd.

Inventor： Joowoan Cho ,  Hyunjin Cho ,  Byoungkwon Choo ,  Oleg Prudnikov ,  Jeongkyun Na ,  Sanghoon Ahn ,  Seunghwan Lee ,  Byoungho Cheong

IPC: B24B37/20

CPC classification number: B24B37/20 ,  B24B27/0015 ,  B24B27/0076 ,  B24B37/10

Abstract: A substrate polishing apparatus includes a support part on which at least one substrate is disposed, a plurality of first moving parts disposed at both opposite sides of the support part in a second direction crossing a first direction, and configured to upwardly extend and reciprocate in the first direction, a second moving part disposed between the plurality of first moving parts in the second direction and connected to an upper side of the first moving parts, a plurality of polishing units disposed at a lower portion of the second moving part and configured to contact an upper surface of the substrate, and a plurality of nozzles disposed at the lower portion of the second moving part and configured to spray slurry to the substrate where the polishing units rotate and revolve along a predetermined trajectory.

公开(公告)号：US09460922B1

公开(公告)日：2016-10-04

申请号：US14937068

申请日：2015-11-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sanghoon Ahn ,  Byoungkwon Choo ,  Byoungho Cheong ,  Jeongkyun Na ,  Seung Hwan Lee ,  Joowoan Cho ,  Hyunjin Cho ,  Oleg Prudnikov

IPC: H01L21/331 ,  H01L21/02 ,  G02B27/28

CPC classification number: H01L21/02675 ,  B23K26/0604 ,  B23K26/0676 ,  B23K26/352 ,  B23K2103/56 ,  G02B27/283 ,  G02B27/286 ,  H01L21/268

Abstract: A method of manufacturing a display apparatus includes forming an amorphous silicon layer on a substrate, splitting a first laser beam emitted from a first laser source into a first master beam in a first polarization state and a second master beam in a second polarization state, changing the first polarization state of the first master beam to the second polarization state to output a third master beam having the second polarization state and corresponding to the first master beam having the second polarization state, combining the second master beam with the third master beam to output a merged laser beam, and irradiating the amorphous silicon layer with the merged laser beam to form a polysilicon layer.

Abstract translation: 制造显示装置的方法包括在基板上形成非晶硅层，将从第一激光源发射的第一激光束分成第一偏振态的第一主光束和第二偏振状态的第二主光束， 将第一主光束的第一偏振状态转换到第二偏振状态，以输出具有第二偏振状态并对应于具有第二偏振状态的第一主光束的第三主光束，将第二主光束与第三主光束组合以输出 合并的激光束，并且用合并的激光束照射非晶硅层以形成多晶硅层。

公开(公告)号：US20160284546A1

公开(公告)日：2016-09-29

申请号：US14857302

申请日：2015-09-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joowoan Cho ,  Byoungho Cheong ,  Byoungkwon Choo ,  Jeongkyun Na ,  Sanghoon Ahn ,  Hyunjin Cho

IPC: H01L21/02 ,  H01L29/16 ,  H01L29/66 ,  H01L29/04

CPC classification number: H01L21/02675 ,  B23K26/00 ,  B23K26/0608 ,  B23K26/0643 ,  B23K26/352 ,  H01L21/02532 ,  H01L21/02691 ,  H01L27/1285 ,  H01L29/04 ,  H01L29/16 ,  H01L29/1604 ,  H01L29/6675 ,  H01L29/66757 ,  Y02P70/605

Abstract: A method of manufacturing a substrate includes: irradiating, along a first path, a laser beam emitted from a source onto a substrate, wherein the substrate includes a target layer of the laser beam, and wherein the substrate is disposed on a stage; and irradiating, along a second path, a portion the laser beam, which was emitted from the source and reached the target layer, by reflecting the laser beam back onto the target layer using a reflection mirror. An area of a second region of the target layer is greater than an area of a first region of the target layer, wherein the laser beam is irradiated along the second path in the second region, and the laser beam is irradiated along the first path in the first region.

Abstract translation: 一种制造衬底的方法包括：沿着第一路径照射从源发射到衬底上的激光束，其中衬底包括激光束的目标层，并且其中衬底设置在平台上; 并且通过使用反射镜将激光束反射回目标层，沿着第二路径照射从源发射并到达目标层的激光束的一部分。 目标层的第二区域的面积大于目标层的第一区域的面积，其中沿第二区域的第二路径照射激光束，沿着第一路径照射激光束 第一个地区。