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    Method for manufacturing semiconductor device
    14.
    发明授权
    Method for manufacturing semiconductor device 有权

    公开(公告)号：US12094979B2

    公开(公告)日：2024-09-17

    申请号：US17285401

    申请日：2019-10-17

    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

    Inventor： Shunpei Yamazaki ,  Yasuhiro Jinbo ,  Jun Ishikawa ,  Sachiaki Tezuka ,  Tetsuya Kakehata

    IPC: H01L29/00 ,  H01L21/02 ,  H01L21/768 ,  H01L29/66 ,  H01L29/786

    CPC classification number: H01L29/7869 ,  H01L21/02164 ,  H01L21/02274 ,  H01L21/76826 ,  H01L29/66742

    Abstract: A semiconductor device having favorable electrical characteristics is provided. The semiconductor device includes a first oxide; a first conductor and a second conductor over the first oxide; a first insulator over the first conductor; a second insulator over the second conductor; a third insulator over the first insulator and the second insulator; a second oxide positioned over the first oxide and between the first conductor and the second conductor; a fourth insulator over the second oxide; a third conductor over the fourth insulator; a fifth insulator in contact with a top surface of the third insulator, a top surface of the second oxide, a top surface of the fourth insulator, and a top surface of the third conductor; a fourth conductor embedded in an opening formed in the first insulator, the third insulator, and the fifth insulator and in contact with the first conductor; and a fifth conductor embedded in an opening formed in the second insulator, the third insulator, and the fifth insulator and in contact with the second conductor. The third insulator includes, in the vicinity of an interface with the fourth conductor and in the vicinity of an interface with the fifth conductor, a region having a higher nitrogen concentration than a different region of the third insulator.

    Ionic liquid, nonaqueous electrolyte, and power storage device
    19.
    发明授权
    Ionic liquid, nonaqueous electrolyte, and power storage device 有权
    离子液体，非水电解质和蓄电装置

    公开(公告)号：US09252459B2

    公开(公告)日：2016-02-02

    申请号：US13719542

    申请日：2012-12-19

    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

    Inventor： Toru Itakura ,  Kyosuke Ito ,  Rie Yokoi ,  Jun Ishikawa

    IPC: H01M10/0569 ,  H01M10/052 ,  H01M10/0568

    CPC classification number: H01M10/0569 ,  H01M10/052 ,  H01M10/0568 ,  H01M2300/0045 ,  Y02E60/122

    Abstract: A nonaqueous electrolyte of the present invention includes an ionic liquid including a first alicyclic quaternary ammonium cation having one or more substituents, a second alicyclic quaternary ammonium cation having an alicyclic skeleton that is the same as an alicyclic skeleton of the first alicyclic quaternary ammonium cation, and a counter anion to the first alicyclic quaternary ammonium cation and the second alicyclic quaternary ammonium cation and an alkali metal salt. In the second alicyclic quaternary ammonium cation, one of substituents bonded to a nitrogen atom in the alicyclic skeleton is a substituent including a halogen element. In the ionic liquid, the amount of a salt including the second alicyclic quaternary ammonium cation is less than or equal to 1 wt % per unit weight of the ionic liquid, or is less than or equal to 0.8 wt % per unit weight of the nonaqueous electrolyte.

    Abstract translation: 本发明的非水电解质包括具有一个以上取代基的第一脂环季铵阳离子的离子液体，具有与第一脂环族季铵阳离子的脂环族骨架相同的脂环族骨架的第二脂环族季铵阳离子， 和第一脂环季铵阳离子和第二脂环族季铵阳离子的抗衡阴离子和碱金属盐。 在第二脂环季铵阳离子中，与脂环族骨架中的氮原子结合的取代基之一是包含卤素元素的取代基。 在离子液体中，包含第二脂环族季铵阳离子的盐的量为每单位离子液体重量的1重量％以下，或小于等于0.8重量％，每单位重量的非水性 电解液

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