公开(公告)号：US20220367716A1

公开(公告)日：2022-11-17

申请号：US17762929

申请日：2021-01-20

Applicant: SOUTHEAST UNIVERSITY

Inventor： Siyang LIU ,  Weifeng SUN ,  Chi ZHANG ,  Shuxuan XIN ,  Shen LI ,  Le QIAN ,  Chen GE ,  Longxing SHI

IPC: H01L29/78 ,  H01L29/10 ,  H01L29/812 ,  H01L29/778

Abstract: The present invention discloses a high-threshold power semiconductor device and a manufacturing method thereof. The high-threshold power semiconductor device includes, in sequence from bottom to top: a metal drain electrode, a substrate, a buffer layer, and a drift region; further including: a composite column body which is jointly formed by a drift region protrusion, a columnar p-region and a columnar n-region on the drift region, a channel layer, a passivation layer, a dielectric layer, a heavily doped semiconductor layer, a metal gate electrode and a source metal electrode. The composite column body is formed by sequentially depositing a p-type semiconductor layer and an n-type semiconductor layer on the drift region and then etching same. The channel layer and the passivation layer are formed in sequence by deposition. Thus, the above devices are divided into a cell region and a terminal region. The dielectric layer, the heavily doped semiconductor layer, the metal gate electrode and the source metal electrode only exist in the cell region, and the passivation layer of the terminal region extends upwards and is wrapped outside the channel layer. This structure can increase a threshold voltage of the device, improve the blocking characteristics of the device and reduce the size of a gate capacitance.

公开(公告)号：US20180174942A1

公开(公告)日：2018-06-21

申请号：US15576850

申请日：2016-01-29

Applicant: SOUTHEAST UNIVERSITY

Inventor： Siyang LIU ,  Ning WANG ,  Jiaxing WEI ,  Chao LIU ,  Weifeng SUN ,  Shengli LU ,  Longxing SHI

IPC: H01L23/367 ,  H01L25/18 ,  H01L23/31 ,  H01L23/495 ,  H01L25/16

CPC classification number: H01L23/3675 ,  H01L23/3107 ,  H01L23/3121 ,  H01L23/367 ,  H01L23/4334 ,  H01L23/49503 ,  H01L23/49537 ,  H01L23/49541 ,  H01L23/49562 ,  H01L23/49568 ,  H01L23/49575 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L25/16 ,  H01L25/18 ,  H01L2224/29139 ,  H01L2224/32245 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48106 ,  H01L2224/48175 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L2924/01079 ,  H01L2924/1306 ,  H01L2924/1426 ,  H01L2924/17738 ,  H01L2924/17747 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/00012 ,  H01L2924/00

Abstract: A power module of a square flat pin-free packaging structure for suppressing the power module from being excessively high in local temperature. The power module includes an insulating resin, a driving chip, a plurality of power chips, and a plurality of metal electrode contacts. The driving chip, the power chips, and the metal electrode contacts are electrically connected through a metal lead according to a predetermined circuit. A plurality of metal heat dissipating disks used for heat dissipation of the power chips and a driving chip lead frame are disposed at the bottom of the insulating resin. A plurality of metal power chip lead frames are disposed on the metal heat dissipating disks, the power chips are disposed on the power chip lead frames, and the drain electrodes of the power chips are electrically connected to the metal heat dissipating disks.