Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same

    公开(公告)号:US10225530B2

    公开(公告)日:2019-03-05

    申请号:US15805705

    申请日:2017-11-07

    Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.

    INTEGRATED PRESSURE SENSOR WITH DOUBLE MEASURING SCALE, PRESSURE MEASURING DEVICE INCLUDING THE INTEGRATED PRESSURE SENSOR, BRAKING SYSTEM, AND METHOD OF MEASURING A PRESSURE USING THE INTEGRATED PRESSURE SENSOR
    14.
    发明申请
    INTEGRATED PRESSURE SENSOR WITH DOUBLE MEASURING SCALE, PRESSURE MEASURING DEVICE INCLUDING THE INTEGRATED PRESSURE SENSOR, BRAKING SYSTEM, AND METHOD OF MEASURING A PRESSURE USING THE INTEGRATED PRESSURE SENSOR 有权
    具有双重测量尺寸的集成压力传感器,包括集成压力传感器,制动系统的压力测量装置和使用集成压力传感器测量压力的方法

    公开(公告)号:US20160349129A1

    公开(公告)日:2016-12-01

    申请号:US14989709

    申请日:2016-01-06

    CPC classification number: G01L9/0052 G01L9/0054 G01L15/00

    Abstract: A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.

    Abstract translation: 具有双重测量刻度的压力传感器包括:柔性体,设计成作为压力的函数进行偏转; 用于检测偏转的压阻传感器; 第一聚焦区域,设计成在第一操作条件期间将柔性体的第一部分中的压力的​​第一值集中以产生柔性体的第一部分的偏转; 以及设计成在第二操作条件期间将所述压力的第二值集中在柔性体的第二部分中以便产生柔性体的第二部分的偏转的第二聚焦区域。 压阻传感器将柔性体的第一部分的偏转与第一压力值和柔性体的第二部分的偏转相关联到第二压力值。

    Mems actuator and manufacturing process thereof

    公开(公告)号:US12187600B2

    公开(公告)日:2025-01-07

    申请号:US17903473

    申请日:2022-09-06

    Abstract: A MEMS actuator includes a semiconductor body with a first surface defining a housing cavity facing the first surface and having a bottom surface, the semiconductor body further defining a fluidic channel in the semiconductor body with a first end across the bottom surface. A strainable structure extends into the housing cavity, is coupled to the semiconductor body at the bottom surface, and defines an internal space facing the first end of the fluidic channel and includes at least a first and a second internal subspace connected to each other and to the fluidic channel. When a fluid is pumped through the fluidic channel into the internal space, the first and second internal subspaces expand, thereby straining the strainable structure along the first axis and generating an actuation force exerted by the strainable structure along the first axis, in an opposite direction with respect to the housing cavity.

    Microfluidic MEMS printing device with piezoelectric actuation

    公开(公告)号:US10857792B2

    公开(公告)日:2020-12-08

    申请号:US16262789

    申请日:2019-01-30

    Abstract: A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body.

    Piezoelectric micro-electro-mechanical actuator device, movable in the plane

    公开(公告)号:US10770643B2

    公开(公告)日:2020-09-08

    申请号:US15638195

    申请日:2017-06-29

    Abstract: A MEMS actuator device of a piezoelectric type formed on a substrate, with a base unit including a base beam element having a main extension in a extension plane and a thickness in a thickness direction perpendicular to the extension plane, smaller than the main extension. A piezoelectric region extends over the beam element. An anchor region is rigid to the base beam element and to the substrate. A base constraint structure is connected to one end of the base beam element and is configured to allow a deformation of the base beam element in the extension plane and substantially reduce a deformation of the base beam element in the thickness direction.

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