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11.发明申请公开(公告)号：US20190068934A1
公开(公告)日：2019-02-28
申请号：US16174801
申请日：2018-10-30
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Roberto CARMINATI , Nicolo' BONI
Abstract: Disclosed herein is a MEMS device including a fixed structure, a mobile structure, and deformable structures extending therebetween. The deformable structures have first ends anchored along X and Y axes of the fixed structure, and have second ends anchored offset from the X and Y axes of the fixed structure. The deformable structures are shaped so as to curve from their anchoring points along the mobile structure back toward the mobile structure, to extend along the perimeter of the mobile structure, and to then curve away from the mobile structure and toward their anchoring points along the fixed structure. Each deformable structure has two piezoelectric elements that extend along the length of that deformable structure, with one piezoelectric element having a greater length than the other piezoelectric element.
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公开(公告)号：US20240019688A1
公开(公告)日：2024-01-18
申请号：US18220554
申请日：2023-07-11
Applicant: STMicroelectronics S.r.l.
Inventor： Massimiliano MERLI , Roberto CARMINATI , Nicolo' BONI , Sonia COSTANTINI , Carlo Luigi PRELINI
CPC classification number: G02B26/0858 , B81B3/007 , B81C1/00658 , B81B2201/042
Abstract: Disclosed herein is a micro-electro-mechanical mirror device having a fixed structure defining an external frame delimiting a cavity, a tiltable structure extending into the cavity, a reflecting surface carried by the tiltable structure and having a main extension in a horizontal plane, and an actuation structure coupled between the tiltable structure and the fixed structure. The actuation structure is formed by a first pair of actuation arms causing rotation of the tiltable structure around a first axis parallel to the horizontal plane. The actuation arms are elastically coupled to the tiltable structure through elastic coupling elements and are each formed by a bearing structure and a piezoelectric structure. The bearing structure of each actuation arm is formed by a soft region of a first material and the elastic coupling elements are formed by a bearing layer of a second material, the second material having greater stiffness than the first material.
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13.发明公开公开(公告)号：US20230324674A1
公开(公告)日：2023-10-12
申请号：US18131085
申请日：2023-04-05
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI , Carlo Luigi PRELINI , Tarek AFIFI AFIFI
CPC classification number: G02B26/0858 , B81B3/007 , B81C1/00658 , B81B2201/042
Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region, elastically suspended above the cavity and having a main extension in a horizontal plane; at least one first pair of driving arms, carrying respective piezoelectric structures which can be biased to generate a driving force that causes rotation of the tiltable structure about a rotation axis parallel to a first horizontal axis of the horizontal plane; elastic suspension elements, which elastically couple the tiltable structure to the fixed structure at the rotation axis and are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis. In particular, the driving arms of the first pair are magnetically coupled to the tiltable structure to cause its rotation about the rotation axis by magnetic interaction, following biasing of the respective piezoelectric structures.
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公开(公告)号：US20220187591A1
公开(公告)日：2022-06-16
申请号：US17533890
申请日：2021-11-23
Inventor： Christopher TOWNSEND , Roberto CARMINATI
Abstract: Disclosed herein is an optical module including a substrate, with an optical detector, laser emitter, and support structure being carried by the substrate. An optical layer includes a fixed portion carried by the support structure, a movable portion affixed between opposite sides of the fixed portion by a spring structure, and a lens system carried by the movable portion. The movable portion has at least one opening defined therein across which the lens system extends, with at least one supporting portion extending across the at least one opening to support the lens system. The optical layer further includes a MEMS actuator for in-plane movement of the movable portion with respect to the fixed portion.
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公开(公告)号：US20220099959A1
公开(公告)日：2022-03-31
申请号：US17465329
申请日：2021-09-02
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A microelectromechanical mirror device includes a supporting frame of semiconductor material and a plate of semiconductor material. The plate is connected to the supporting frame so as to be orientable around at least one rotation axis. A reflective layer is arranged on a first region of the plate. A piezoelectric actuation structure extends on a second region of the plate adjacent to the reflective layer. The piezoelectric actuation structure is configured to apply forces such as to modify a curvature of the plate.
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Patent Agency Ranking
公开(公告)号：US20210351338A1
公开(公告)日：2021-11-11
申请号：US17137220
申请日：2020-12-29
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Carlo Luigi PRELINI , Marco FERRERA , Carla Maria LAZZARI , Luca SEGHIZZI , Nicolo' BONI , Roberto CARMINATI , Fabio QUAGLIA
Abstract: The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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公开(公告)号：US20210188620A1
公开(公告)日：2021-06-24
申请号：US17126903
申请日：2020-12-18
Applicant: STMicroelectronics S.r.l.
Inventor： Luca SEGHIZZI , Nicolo' BONI , Laura OGGIONI , Roberto CARMINATI , Marta CARMINATI
Abstract: For manufacturing an optical microelectromechanical device, a first wafer of semiconductor material having a first surface and a second surface is machined to form a suspended mirror structure, a fixed structure surrounding the suspended mirror structure, elastic supporting elements which extend between the fixed structure and the suspended mirror structure, and an actuation structure coupled to the suspended mirror structure. A second wafer is machined separately to form a chamber delimited by a bottom wall having a through opening. The second wafer is bonded to the first surface of the first wafer in such a way that the chamber overlies the actuation structure and the through opening is aligned to the suspended mirror structure. Furthermore, a third wafer is bonded to the second surface of the first wafer to form a composite wafer device. The composite wafer device is then diced to form an optical microelectromechanical device.
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18.发明申请公开(公告)号：US20200301130A1
公开(公告)日：2020-09-24
申请号：US16827282
申请日：2020-03-23
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.
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19.发明申请公开(公告)号：US20200057298A1
公开(公告)日：2020-02-20
申请号：US16539109
申请日：2019-08-13
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A micromechanical device includes a fixed structure, a mobile portion rotatable about a first rotation axis, and a first actuation structure arranged between the fixed structure and the mobile portion to enable rotation of the mobile portion about the first rotation axis. The mobile portion includes a supporting structure, a tiltable platform rotatable about a second rotation axis, transverse to the first rotation axis, and a second actuation structure coupled between the tiltable platform and the supporting structure. Stiffening elements are arranged between the supporting structure and the fixed structure. The micromechanical device may be used within a picoprojector.
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公开(公告)号：US20240425359A1
公开(公告)日：2024-12-26
申请号：US18828564
申请日：2024-09-09
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Lorenzo VINCIGUERRA , Roberto CARMINATI , Massimiliano MERLI
Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure and communicates laterally with the pass-through cavity.
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