公开(公告)号：US20220342203A1

公开(公告)日：2022-10-27

申请号：US17727117

申请日：2022-04-22

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' BONI ,  Roberto CARMINATI ,  Massimiliano MERLI

IPC: G02B26/08 ,  G01L1/18

Abstract: A microelectromechanical mirror device includes a fixed structure defining a cavity, a tiltable structure elastically suspended above the cavity and carrying a reflecting surface, and having a main extension in a horizontal plane. A first pair of driving arms carry respective piezoelectric material regions that are biased to cause a rotation of the tiltable structure around a first rotation axis parallel to a first horizontal axis of the horizontal plane, and elastically coupled to the tiltable structure. Elastic suspension elements that couple the tiltable structure to the fixed structure at the first rotation axis are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion around the first rotation axis, and further extend between the tiltable structure and the fixed structure. The elastic suspension elements have an asymmetrical arrangement on opposite sides of the tiltable structure along the first rotation axis.

公开(公告)号：US20220119245A1

公开(公告)日：2022-04-21

申请号：US17499297

申请日：2021-10-12

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' BONI ,  Lorenzo VINCIGUERRA ,  Roberto CARMINATI ,  Massimiliano MERLI

IPC: B81B3/00 ,  B81C1/00

Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.

公开(公告)号：US20180307038A1

公开(公告)日：2018-10-25

申请号：US15955107

申请日：2018-04-17

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto CARMINATI ,  Sonia COSTANTINI ,  Marta CARMINATI

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0833 ,  G02B26/08 ,  G02B26/0816 ,  G02B26/10 ,  G02B26/105

Abstract: An oscillating structure includes first and second torsional elastic elements that define an axis of rotation and a moving element that is interposed between the first and second torsional elastic elements. The moving element, the first torsional elastic element and the second torsional elastic element lie in a first plane and are not in direct contact with one another. A coupling structure mechanically couples the moving element, the first torsional elastic element and the second torsional elastic element together. The moving element, the first torsional elastic element and the second torsional elastic element lie in a second plane different from the first plane. Oscillation of the moving element occurs as a result of a twisting of the first and second torsional elastic elements.

公开(公告)号：US20180292645A1

公开(公告)日：2018-10-11

申请号：US16007951

申请日：2018-06-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Guido CHIARETTI ,  Fabio Luigi GRILLI ,  Roberto CARMINATI ,  Bruno MURARI ,  Lorenzo SARCHI

IPC: G02B26/10 ,  H04N9/31 ,  G03B21/28

Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.

公开(公告)号：US20180282152A1

公开(公告)日：2018-10-04

申请号：US15870429

申请日：2018-01-12

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Enri DUQI ,  Lorenzo BALDO ,  Roberto CARMINATI

IPC: B81C1/00

CPC classification number: B81C1/00222 ,  B81B3/0021 ,  B81B7/02 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2207/097 ,  B81C1/00261 ,  B81C1/00349 ,  B81C2201/01

Abstract: MEMS device, in which a body made of semiconductor material contains a chamber, and a first column inside the chamber. A cap of semiconductor material is attached to the body and forms a first membrane, a first cavity and a first channel. The chamber is closed on the side of the cap. The first membrane, the first cavity, the first channel and the first column form a capacitive pressure sensor structure. The first membrane is arranged between the first cavity and the second face, the first channel extends between the first cavity and the first face or between the first cavity and the second face and the first column extends towards the first membrane and forms, along with the first membrane, plates of a first capacitor element.

公开(公告)号：US20230035607A1

公开(公告)日：2023-02-02

申请号：US17964672

申请日：2022-10-12

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' BONI ,  Roberto CARMINATI ,  Massimiliano MERLI

IPC: G02B26/08 ,  G02B26/10 ,  G03B21/00 ,  H02N2/02

Abstract: A microelectromechanical (MEMS) structure includes a fixed frame internally defining a cavity, and a mobile mass suspended in the cavity and movable with a first resonant rotational mode about a first rotation axis and with a second resonant rotational mode about a second rotation axis orthogonal to the first. A pair of supporting elements extends in the cavity, is rigidly coupled to the fixed frame, and is elastically deformable to cause rotation of the mobile mass about the first rotation axis. A pair of elastic-coupling elements is elastically coupled between the mobile mass and the first pair of supporting elements. Each of the elastic-coupling elements includes a first and second elastic portions, the first elastic portion being compliant to torsion about the second rotation axis. The second elastic portion is compliant to bending outside of a horizontal plane of main extension of the MEMS structure.

公开(公告)号：US20220334378A1

公开(公告)日：2022-10-20

申请号：US17720506

申请日：2022-04-14

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto CARMINATI ,  Nicolo' BONI ,  Andrea BARBIERI ,  Marco ZAMPROGNO ,  Luca MOLINARI

IPC: G02B26/08 ,  H02N2/02 ,  H02N2/06

Abstract: A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.

公开(公告)号：US20220277536A1

公开(公告)日：2022-09-01

申请号：US17750010

申请日：2022-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto CARMINATI ,  Fabio BOTTINELLI

IPC: G06V10/145 ,  G01S17/894 ,  G06V20/64 ,  G06V40/16

Abstract: A method of manufacturing an electronic module includes providing a base substrate having a first surface, providing a first supporting element having a first portion with an inclined top surface, and affixing the first supporting element to the first surface such that the inclined top surface is inclined with respect to the base substrate. A first reflector is coupled to the inclined top surface such that a rear surface of the first reflector is in physical contact with the inclined top surface of the first portion of the first supporting element, and a spacer structure is configured to form an interface for mounting lateral walls to the base substrate. A cap is positioned over and supported by the lateral walls to thereby define a chamber. The emitter, as well as a detector, are coupled to the first surface of the base substrate.

公开(公告)号：US20220229287A1

公开(公告)日：2022-07-21

申请号：US17715639

申请日：2022-04-07

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto CARMINATI ,  Nicolo' BONI ,  Massimiliano MERLI

IPC: G02B26/08

Abstract: Disclosed herein is a method of making a microelectromechanical (MEMS) device. The method includes, in a single structural layer, affixing a tiltable structure to an anchorage portion with first and second supporting arms extending between the anchorage portion and opposite sides of the tiltable structure, and forming first and second resonant piezoelectric actuation structures extending between a constraint portion of the first supporting arm and the anchorage portion, on opposite sides of the first supporting arm. The method further includes coupling a handling wafer underneath the structural layer to define a cavity therebetween, and forming a passivation layer over the structural layer, the passivation layer having contact openings defined therein for routing metal regions for electrical coupling to respective electrical contact pads, the electrical contact pads being electrically connected to the first and second resonant piezoelectric actuation structures.

公开(公告)号：US20210191107A1

公开(公告)日：2021-06-24

申请号：US17121961

申请日：2020-12-15

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' BONI ,  Roberto CARMINATI ,  Massimiliano MERLI

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00 ,  G03B21/00 ,  G03B21/28

Abstract: A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.