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公开(公告)号：US20160121612A1
公开(公告)日：2016-05-05
申请号：US14981701
申请日：2015-12-28
Applicant: STMicroelectronics S.r.l.
Inventor： Dino Faralli , Laura Maria Castoldi , Paolo Ferrari , Marta Carminati
IPC: B41J2/16
CPC classification number: B41J2/1433 , B41J2/14129 , B41J2/1603 , B41J2/162 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1643
Abstract: Embodiments disclose herein are directed to a microfluidic delivery device that has a predominantly semiconductor structure, such as silicon. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses silicon based materials to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.
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12.发明申请PROCESS FOR MANUFACTURING A NOZZLE PLATE AND FLUID-EJECTION DEVICE PROVIDED WITH THE NOZZLE PLATE 审中-公开用喷嘴板制造喷嘴板和流体喷射装置的方法公开(公告)号：US20150040397A1
公开(公告)日：2015-02-12
申请号：US14523625
申请日：2014-10-24
Applicant: STMicroelectronics S.r.l. , STMicroelectronics, Inc.
Inventor： Dino Faralli , Michele Palmieri
IPC: B41J2/16
CPC classification number: B41J2/162 , B41J2/1433 , B41J2/1601 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/164 , B41J2/1642 , B41J2002/14475 , Y10T29/49401
Abstract: A nozzle plate for a fluid-ejection device, comprising: a first substrate made of semiconductor material, having a first side and a second side; a structural layer extending on the first side of the first substrate, the structural layer having a first side and a second side, the second side of the structural layer facing the first side of the first substrate; at least one first through hole, having an inner surface, extending through the structural layer, the first through hole having an inlet section corresponding to the first side of the structural layer and an outlet section corresponding to the second side of the structural layer; a narrowing element adjacent to the surface of the first through hole, and including a tapered portion such that the inlet section of the first through hole has an area larger than a respective area of the outlet section of the first through hole.
Abstract translation: 一种用于流体喷射装置的喷嘴板，包括：具有第一侧和第二侧的由半导体材料制成的第一基板; 所述结构层在所述第一基板的所述第一侧上延伸，所述结构层具有第一侧面和第二侧面，所述结构层的第二面朝向所述第一基板的第一侧; 至少一个第一通孔，具有延伸穿过所述结构层的内表面，所述第一通孔具有对应于所述结构层的第一侧的入口部分和与所述结构层的第二侧相对应的出口部分; 与第一通孔的表面相邻的变窄元件，并且包括锥形部分，使得第一通孔的入口部分具有比第一通孔的出口部分的相应面积大的面积。
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公开(公告)号：US11417827B2
公开(公告)日：2022-08-16
申请号：US16215821
申请日：2018-12-11
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H01L41/00 , H01L41/113 , H01L41/047 , H01L41/22 , H02N2/18 , H01L41/053 , H01L41/187 , H01L41/25 , H01L41/29 , H01L41/332
Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.
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公开(公告)号：US20170182778A1
公开(公告)日：2017-06-29
申请号：US15179096
申请日：2016-06-10
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
IPC: B41J2/16
CPC classification number: B41J2/1626 , B41J2/01 , B41J2/135 , B41J2/16 , B41J2/1607 , B41J2/161 , B41J2/162 , B41J2/1621 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
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15.发明授权公开(公告)号：US09321628B2
公开(公告)日：2016-04-26
申请号：US14316583
申请日：2014-06-26
Inventor： Dino Faralli , Benedetto Vigna , Laura Maria Castoldi
CPC classification number: B81B7/0061 , B81B2201/0264 , B81B2203/0127 , B81B2207/012 , B81C1/00269 , B81C2203/0118 , H01L2224/32145 , H01L2224/48091 , H01L2224/73265 , H01L2924/10155 , H01L2924/15151 , H01L2924/181 , H01L2924/00014 , H01L2924/00012
Abstract: A MEMS device wherein a die of semiconductor material has a first face and a second face. A membrane is formed in or on the die and faces the first surface. A cap is fixed to the first face of the first die and is spaced apart from the membrane by a space. The die is fixed, on its second face, to an ASIC, which integrates a circuit for processing the signals generated by the die. The ASIC is in turn fixed on a support. A packaging region coats the die, the cap, and the ASIC and seals them from the outside environment. A fluidic path is formed through the support, the ASIC, and the first die, and connects the membrane and the first face of the die with the outside, without requiring holes in the cap.
Abstract translation: 一种MEMS器件，其中半导体材料的管芯具有第一面和第二面。 在模具中或模具上形成膜并面向第一表面。 盖子固定在第一模具的第一面上并且与隔膜隔开一个空间。 芯片在其第二面被固定到ASIC，其集成了用于处理由芯片产生的信号的电路。 ASIC依次固定在支持上。 包装区域涂覆模具，盖子和ASIC，并将它们与外部环境密封。 通过支撑件，ASIC和第一模具形成流体路径，并且将膜和模具的第一面与外部连接，而不需要在盖中的孔。
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Patent Agency Ranking
公开(公告)号：US11001061B2
公开(公告)日：2021-05-11
申请号：US14981701
申请日：2015-12-28
Applicant: STMicroelectronics S.r.l.
Inventor： Dino Faralli , Laura Maria Castoldi , Paolo Ferrari , Marta Carminati
IPC: B41J2/16 , B41J2/14 , H01L21/02 , H01L21/311 , H01L21/285 , C23C16/34
Abstract: Methods for manufacturing a microfluidic delivery device comprising a semiconductor structure, such as silicon, are provided. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses semiconductor material, such as silicon, to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.
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公开(公告)号：US10245834B2
公开(公告)日：2019-04-02
申请号：US15812960
申请日：2017-11-14
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Mauro Cattaneo , Carlo Luigi Prelini , Lorenzo Colombo , Dino Faralli , Alessandra Sciutti , Lorenzo Tentori
Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.
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公开(公告)号：US10186654B2
公开(公告)日：2019-01-22
申请号：US15163230
申请日：2016-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H01L41/09 , H01L41/053 , H01L41/22 , H01L41/113 , H01L41/047 , H02N2/18 , H01L41/187 , H01L41/25 , H01L41/29 , H01L41/332
Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.
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公开(公告)号：US09707761B2
公开(公告)日：2017-07-18
申请号：US14523625
申请日：2014-10-24
Applicant: STMicroelectronics S.r.l. , STMicroelectronics, Inc.
Inventor： Dino Faralli , Michele Palmieri
CPC classification number: B41J2/162 , B41J2/1433 , B41J2/1601 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/164 , B41J2/1642 , B41J2002/14475 , Y10T29/49401
Abstract: A nozzle plate for a fluid-ejection device, comprising: a first substrate made of semiconductor material, having a first side and a second side; a structural layer extending on the first side of the first substrate, the structural layer having a first side and a second side, the second side of the structural layer facing the first side of the first substrate; at least one first through hole, having an inner surface, extending through the structural layer, the first through hole having an inlet section corresponding to the first side of the structural layer and an outlet section corresponding to the second side of the structural layer; a narrowing element adjacent to the surface of the first through hole, and including a tapered portion such that the inlet section of the first through hole has an area larger than a respective area of the outlet section of the first through hole.
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公开(公告)号：US20170186940A1
公开(公告)日：2017-06-29
申请号：US15163230
申请日：2016-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H01L41/113 , H01L41/053 , H01L41/332 , H01L41/25 , H01L41/29 , H01L41/047 , H01L41/187
CPC classification number: H01L41/1138 , H01L41/047 , H01L41/053 , H01L41/1134 , H01L41/1876 , H01L41/22 , H01L41/25 , H01L41/29 , H01L41/332 , H02N2/186
Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.
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