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公开(公告)号：US20210147222A1
公开(公告)日：2021-05-20
申请号：US17161367
申请日：2021-01-28
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri DUQI , Lorenzo BALDO , Domenico GIUSTI
Abstract: An integrated device includes: a first die; a second die coupled in a stacked way on the first die along a vertical axis; a coupling region arranged between facing surfaces of the first die and of the second die, which face one another along the vertical axis and lie in a horizontal plane orthogonal to the vertical axis, for mechanical coupling of the first and second dies; electrical-contact elements carried by the facing surfaces of the first and second dies, aligned in pairs along the vertical axis; and conductive regions arranged between the pairs of electrical-contact elements carried by the facing surfaces of the first and second dies, for their electrical coupling. Supporting elements are arranged at the facing surface of at least one of the first and second dies and elastically support respective electrical-contact elements.
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12.发明申请公开(公告)号：US20200369023A1
公开(公告)日：2020-11-26
申请号：US16882215
申请日：2020-05-22
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI , Andrea Nicola COLECCHIA , Gaetano SANTORUVO
IPC: B41J2/03 , H01L41/09 , H01L41/314 , H01L27/20
Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.
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13.发明申请公开(公告)号：US20200290355A1
公开(公告)日：2020-09-17
申请号：US16885908
申请日：2020-05-28
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI , Mauro CATTANEO , Carlo Luigi PRELINI
Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.
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公开(公告)号：US20190329551A1
公开(公告)日：2019-10-31
申请号：US16392007
申请日：2019-04-23
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI , Marco FERRERA , Carlo Luigi PRELINI
Abstract: A fluid ejection device, comprising: a chamber; a membrane, with a first side and a second side opposite to one another, where the first side faces the chamber; an actuator, of a piezoelectric type, which extends on the second side of the membrane and is operatively coupled to the membrane for causing, in use, a vibration of the membrane; a passivation layer, which extends only alongside, or partially on, the actuator; and a protection layer, which extends on the actuator at least in surface portions of the latter that are free from the passivation layer, and has a Young's modulus lower than the Young's modulus of the passivation layer.
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公开(公告)号：US20190160816A1
公开(公告)日：2019-05-30
申请号：US16262789
申请日：2019-01-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI , Mauro PASETTI
Abstract: A microfluidic device, having a containment body accommodating a plurality of ejecting elements arranged adjacent to each other. Each ejecting element has a liquid inlet, a containment chamber, a piezoelectric actuator and an ejection nozzle. The piezoelectric actuators of each ejecting element are connected to a control unit configured to generate actuation signals and to be integrated in the containment body.
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Patent Agency Ranking
16.发明申请公开(公告)号：US20190068934A1
公开(公告)日：2019-02-28
申请号：US16174801
申请日：2018-10-30
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Roberto CARMINATI , Nicolo' BONI
Abstract: Disclosed herein is a MEMS device including a fixed structure, a mobile structure, and deformable structures extending therebetween. The deformable structures have first ends anchored along X and Y axes of the fixed structure, and have second ends anchored offset from the X and Y axes of the fixed structure. The deformable structures are shaped so as to curve from their anchoring points along the mobile structure back toward the mobile structure, to extend along the perimeter of the mobile structure, and to then curve away from the mobile structure and toward their anchoring points along the fixed structure. Each deformable structure has two piezoelectric elements that extend along the length of that deformable structure, with one piezoelectric element having a greater length than the other piezoelectric element.
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公开(公告)号：US20180215607A1
公开(公告)日：2018-08-02
申请号：US15867491
申请日：2018-01-10
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Domenico GIUSTI
Abstract: What is described is a MEMS device comprising a piezoelectric actuator, which includes a film of piezoelectric material. The film is penetrated by a plurality of holes.
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18.发明公开公开(公告)号：US20230381816A1
公开(公告)日：2023-11-30
申请号：US18320876
申请日：2023-05-19
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Fabio QUAGLIA , Marco FERRERA
IPC: B06B1/06
CPC classification number: B06B1/0603 , B06B1/0629
Abstract: Micromachined pressure transducer including: a fixed body of semiconductor material, which laterally delimits a main cavity; a transduction structure, which is suspended on the main cavity and includes at least a pair of deformable structures and a movable region, which is formed by semiconductor material and is mechanically coupled to the fixed body through the deformable structures. Each deformable structure includes: a support structure of semiconductor material, which includes a first and a second beam, each of which has ends fixed respectively to the fixed body and to the movable region, the first beam being superimposed, at a distance, on the second beam; and at least one piezoelectric transduction structure, mechanically coupled to the first beam. The piezoelectric transduction structures are electrically controllable so that they cause corresponding deformations of the respective support structures and a consequent translation of the movable region along a translation direction.
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19.发明公开公开(公告)号：US20230273084A1
公开(公告)日：2023-08-31
申请号：US18171163
申请日：2023-02-17
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Enri DUQI
CPC classification number: G01L9/0054 , G01L19/147 , G01L19/148 , G01L27/007
Abstract: A pressure sensor device has: a pressure detection structure provided in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. A piezoelectric transduction structure, of a ultrasonic type, is accommodated in the housing cavity, in order to allow detection of foreign material above the coating material and within the package. In particular, the piezoelectric transduction structure is integrated in the first die, which comprises a first portion, wherein the pressure detection structure is integrated, and a second portion, separate and distinct from the first portion, wherein the piezoelectric transduction structure is integrated.
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公开(公告)号：US20230070307A1
公开(公告)日：2023-03-09
申请号：US17903473
申请日：2022-09-06
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico GIUSTI , Carla Maria LAZZARI
IPC: F04B43/04
Abstract: A MEMS actuator includes a semiconductor body with a first surface defining a housing cavity facing the first surface and having a bottom surface, the semiconductor body further defining a fluidic channel in the semiconductor body with a first end across the bottom surface. A strainable structure extends into the housing cavity, is coupled to the semiconductor body at the bottom surface, and defines an internal space facing the first end of the fluidic channel and includes at least a first and a second internal subspace connected to each other and to the fluidic channel. When a fluid is pumped through the fluidic channel into the internal space, the first and second internal subspaces expand, thereby straining the strainable structure along the first axis and generating an actuation force exerted by the strainable structure along the first axis, in an opposite direction with respect to the housing cavity.
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