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11.发明申请公开(公告)号：US20170160540A1
公开(公告)日：2017-06-08
申请号：US15165547
申请日：2016-05-26
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati , Massimiliano Merli
CPC classification number: G02B26/105 , B81B3/0048 , B81B3/0083 , B81B2201/042 , G02B26/0858 , H04N9/3173
Abstract: A micromechanical device includes a tiltable structure that is rotatable about a first rotation axis. The tiltable structure is coupled to a fixed structure through an actuation structure of a piezoelectric type. The actuation structure is formed by spring elements having a spiral shape. The spring elements each include actuation arms extending transversely to the first rotation axis. Each actuation arm carries a respective piezoelectric band of piezoelectric material. The actuation arms are divided into two sets with the piezoelectric bands thereof biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis.
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公开(公告)号：US12084341B2
公开(公告)日：2024-09-10
申请号：US17499297
申请日：2021-10-12
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Lorenzo Vinciguerra , Roberto Carminati , Massimiliano Merli
CPC classification number: B81B3/0072 , B81C1/00182 , B81C1/00198 , B81B2203/033 , B81C2201/019
Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.
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公开(公告)号：US12043540B2
公开(公告)日：2024-07-23
申请号：US18134381
申请日：2023-04-13
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: B81B3/0072 , B81B3/0021 , G02B26/0858 , G03B21/008 , H04N9/3152 , H10N30/20 , B81B2201/042
Abstract: This disclosure pertains to a microelectromechanical systems (MEMS) device with a tiltable structure, a fixed supporting structure, and an actuation structure with driving arms connected to the tiltable structure by elastic decoupling elements. Described herein, particularly, is a planar stop structure between the driving arms and the tiltable structure, which functions to limit movement in the tiltable plane. This stop structure includes a first projection/abutment surface pair formed by a projection extending from a driving arm and an abutment surface formed by a recess in the tiltable structure. The projection and abutment surface are adjacent and spaced apart in the device's rest condition.
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公开(公告)号：US11953813B2
公开(公告)日：2024-04-09
申请号：US18134671
申请日：2023-04-14
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058
Abstract: Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.
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公开(公告)号：US11656539B2
公开(公告)日：2023-05-23
申请号：US16704484
申请日：2019-12-05
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo′ Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058
Abstract: A microelectromechanical device includes a fixed structure defining a cavity with a tiltable structure that is elastically suspended in the cavity. A piezoelectrically driven actuation structure, interposed between the tiltable structure and the fixed structure, is biased for causing rotation of the tiltable structure about a first rotation axis belonging to a horizontal plane in which the tiltable structure rests. The actuation structure includes a pair of driving arms carry respective regions of piezoelectric material and are elastically coupled to the tiltable structure on opposite sides of the first rotation axis through respective elastic decoupling elements. The elastic decoupling elements exhibit stiffness in regard to movements out of the horizontal plane and compliance to torsion about the first rotation axis.
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Patent Agency Ranking
16.发明授权公开(公告)号：US11353694B2
公开(公告)日：2022-06-07
申请号：US17121961
申请日：2020-12-15
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.
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公开(公告)号：US10365475B2
公开(公告)日：2019-07-30
申请号：US15465742
申请日：2017-03-22
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Massimiliano Merli , Sebastiano Conti
IPC: G02B27/01 , G02B26/08 , G02B27/14 , G03B21/00 , H01L41/053 , H01L41/332
Abstract: An oscillating structure with piezoelectric actuation includes first and second torsional elastic elements constrained to respective portions of a fixed supporting body and defining an axis of rotation. A mobile element is positioned between, and connected to, the first and second torsional elastic elements by first and second rigid regions. A first control region is coupled to the first rigid region and includes a first piezoelectric actuator. A second control region is coupled to the second rigid region and includes a second piezoelectric actuator. The first and second piezoelectric actuators are configured to cause local deformation of the first and second control regions to induce a torsion of the first and second torsional elastic elements.
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18.发明授权公开(公告)号：US12222492B2
公开(公告)日：2025-02-11
申请号：US17487166
申请日：2021-09-28
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.
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公开(公告)号：US12117605B2
公开(公告)日：2024-10-15
申请号：US17355861
申请日：2021-06-23
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Massimiliano Merli
CPC classification number: G02B26/04 , H10N30/057 , H10N30/2047 , H10N30/506 , H10N30/88
Abstract: A MEMS actuator includes a main body having a central portion, couplable to a substrate, and a peripheral portion suspended over the substrate when the central portion is coupled to the substrate. The peripheral portion has a deformable structure extending around the central portion, and forming successively arranged membranes. The MEMS actuator includes bearing structures and corresponding piezoelectric actuators. The bearing structures are fixed at their top to the deformable structure and laterally delimit corresponding cavities, each having a lateral opening facing the central portion of the main body and closed at the top by a membrane. A fixed part of the membrane is fixed to the underlying bearing structure and a suspended part is laterally offset with respect to the underlying bearing structure. The piezoelectric actuators are controllable to cause deformation of the corresponding membrane and rotation of the bearing structures around the central portion of the main body.
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公开(公告)号：US11933966B2
公开(公告)日：2024-03-19
申请号：US17715639
申请日：2022-04-07
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Nicolo' Boni , Massimiliano Merli
CPC classification number: G02B26/0858 , B81B3/0021 , B81B2201/042
Abstract: Disclosed herein is a method of making a microelectromechanical (MEMS) device. The method includes, in a single structural layer, affixing a tiltable structure to an anchorage portion with first and second supporting arms extending between the anchorage portion and opposite sides of the tiltable structure, and forming first and second resonant piezoelectric actuation structures extending between a constraint portion of the first supporting arm and the anchorage portion, on opposite sides of the first supporting arm. The method further includes coupling a handling wafer underneath the structural layer to define a cavity therebetween, and forming a passivation layer over the structural layer, the passivation layer having contact openings defined therein for routing metal regions for electrical coupling to respective electrical contact pads, the electrical contact pads being electrically connected to the first and second resonant piezoelectric actuation structures.
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