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公开(公告)号:US20240102145A1
公开(公告)日:2024-03-28
申请号:US18347104
申请日:2023-07-05
Applicant: Samsung Display Co., Ltd.
Inventor: Heemin Park , Arong Kim , Youngmin Moon , Youngho Park , Areum Lee , Sungsoon Im , Junho Jo
CPC classification number: C23C14/042 , H10K59/1201 , H10K71/166
Abstract: An apparatus for manufacturing a display device includes a mask assembly, and a deposition source that supplies a deposition material toward the mask assembly. The mask assembly includes a mask frame including a first opening, a sheet portion fixed on the mask, overlapping a portion of the first opening in a plan view, and including a plurality of second openings, a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each including a plurality of third openings, and a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and including a plurality of fourth openings.
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公开(公告)号:US11864453B2
公开(公告)日:2024-01-02
申请号:US17452279
申请日:2021-10-26
Applicant: Samsung Display Co., Ltd.
Inventor: Youngmin Moon , Minho Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im , Junho Jo
IPC: H01L51/56 , C23C14/04 , C23C14/24 , B23K26/244 , B23K26/364 , H10K71/00 , B23K26/0622
CPC classification number: H10K71/00 , B23K26/244 , B23K26/364 , C23C14/042 , C23C14/24 , B23K26/0622
Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.
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公开(公告)号:US11807932B2
公开(公告)日:2023-11-07
申请号:US17197300
申请日:2021-03-10
Applicant: Samsung Display Co., Ltd.
Inventor: Junho Jo , Youngho Park , Seungyong Song , Youngchul Lee , Youngsuck Choi
IPC: C23C14/04
CPC classification number: C23C14/042
Abstract: A method for manufacturing a mask includes providing, on a stage, a mask frame in which a plurality of cell openings is defined; providing each of the cell openings with a cell mask material in which a second area and a plurality of first areas are defined, where the second area is disposed around each of the first areas; emitting a laser beam to the second area to harden the second area; and removing the first areas, thereby forming a plurality of cell masks disposed in the cell openings, respectively.
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