TUNING FORK VIBRATOR
    11.
    发明申请
    TUNING FORK VIBRATOR 审中-公开
    调音台振动器

    公开(公告)号:US20160182012A1

    公开(公告)日:2016-06-23

    申请号:US14918273

    申请日:2015-10-20

    CPC classification number: H03H9/21

    Abstract: A tuning fork vibrator includes: a vibration arm including one or more grooves extending depthwise in a first direction; and exciting electrodes configured to provide a level of driving force required for vibrations of the vibration arm, wherein the one or more grooves have a cross-sectional shape in which a depth of the one or more grooves decreases from a first point toward a second point, and the depth of the one or more grooves at the second point is 30% or more of the depth of the groove at the first point.

    Abstract translation: 音叉振动器包括:振动臂,包括在第一方向上沿深度方向延伸的一个或多个凹槽; 以及激励电极,其构造成提供振动臂的振动所需的驱动力水平,其中所述一个或多个凹槽具有其中所述一个或多个凹槽的深度从第一点向第二点减小的横截面形状 并且第二点处的一个或多个凹槽的深度在第一点处为凹槽的深度的30%或更多。

    ACOUSTIC RESONATOR
    12.
    发明申请

    公开(公告)号:US20230022838A1

    公开(公告)日:2023-01-26

    申请号:US17579944

    申请日:2022-01-20

    Abstract: An acoustic resonator includes a substrate and a resonant portion. The resonant portion has a central portion in which a first electrode, a first piezoelectric layer, a second piezoelectric layer, and a second electrode are stacked in order on the substrate, and an extension portion extending outwardly from the central portion and including an insertion layer. A ratio of an average thickness of the first piezoelectric layer to an average thickness of the second piezoelectric layer is 18.4% to 40%.

    BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME
    18.
    发明申请
    BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME 审中-公开
    大容量声波谐波器和滤波器,包括它们

    公开(公告)号:US20160300996A1

    公开(公告)日:2016-10-13

    申请号:US15003045

    申请日:2016-01-21

    CPC classification number: H01L41/0477 H03H9/13 H03H9/173 H03H9/587 H03H9/605

    Abstract: In examples, there is provided a bulk acoustic wave resonator including: a substrate, a first electrode and a second electrode formed on the substrate, and a piezoelectric layer formed between the first electrode and the second electrode, wherein at least one of the first electrode and the second electrode is formed of an alloy including a molybdenum element. Additionally, such a bulk acoustic wave resonator may include an air cavity formed between the substrate and the first electrode.

    Abstract translation: 在实施例中,提供了一种体声波谐振器,包括:基板,形成在基板上的第一电极和第二电极,以及形成在第一电极和第二电极之间的压电层,其中,第一电极 并且第二电极由包括钼元素的合金形成。 另外,这样的体声波谐振器可以包括在基板和第一电极之间形成的空气腔。

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