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公开(公告)号：US20210313958A1
公开(公告)日：2021-10-07
申请号：US16934265
申请日：2020-07-21
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Tae Kyung LEE , Won HAN , Sang Uk SON , Hwa Sun LEE , Moon Chul LEE
Abstract: A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer covering at least a portion of the first electrode, and a second electrode covering at least a portion of the piezoelectric layer. When an active region, in which the first electrode and the second electrode are disposed to overlap each other, is viewed from above, among four sides of a rectangle with which at least three vertices of a polygon formed by the active region are in contact, a longest side is defined as a side B and a side connected to side B is defined as a side A, and an aspect ratio (side B/side A) is 1.3 to 3.
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公开(公告)号：US20160373083A1
公开(公告)日：2016-12-22
申请号：US15184230
申请日：2016-06-16
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Tae Kyung LEE , Sung HAN , Hwa Sun LEE , Seung Joo SHIN , Ran Hee SHIN
CPC classification number: H03H9/13 , H03H9/02149 , H03H9/173 , H03H9/54
Abstract: A bulk acoustic wave resonator includes a substrate, a first electrode and a second electrode disposed on the substrate, and a piezoelectric layer disposed between the first electrode and the second electrode. At least one of the first electrode and the second electrode includes an alloy of molybdenum and tantalum.
Abstract translation: 体声波谐振器包括基板，设置在基板上的第一电极和第二电极以及设置在第一电极和第二电极之间的压电层。 第一电极和第二电极中的至少一个包括钼和钽的合金。
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公开(公告)号：US20160011393A1
公开(公告)日：2016-01-14
申请号：US14722773
申请日：2015-05-27
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Jong Beom KIM , June Kyoo LEE , Hyung Jae PARK , Sang Jin KIM , Jung Won LEE , Hwa Sun LEE , Dong Hyun PARK
CPC classification number: H01L41/0946 , G02B7/08 , G02B7/36 , G02B26/0858 , G02B27/646 , H01L41/0825
Abstract: An actuator unit includes a driving part connecting a fixing part and a support part which are disposed to be substantially coplanar; an actuator which is configured to deform the driving part to drive the support part out of the coplanar relationship with respect to the fixing part; and a sensor which is configured to measure a displacement amount or deformation of the driving part.
Abstract translation: 致动器单元包括连接固定部和支撑部的驱动部，所述固定部和支撑部被设置为基本上共面; 致动器，其构造成使所述驱动部变形，以相对于所述固定部分驱动所述支撑部分脱离所述共面关系; 以及传感器，其构造成测量所述驱动部的位移量或变形。
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公开(公告)号：US20150382091A1
公开(公告)日：2015-12-31
申请号：US14717442
申请日：2015-05-20
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Byung Hun KIM , Hwa Sun LEE
IPC: H04R1/04
CPC classification number: H04R19/04 , H04R19/005
Abstract: There is provided a microphone including: a diaphragm; a support part supporting diaphragm; and a connection part connecting the diaphragm to the support part so that the diaphragm is displaceable, wherein a slit is formed in the connection part, and the slit includes a plurality of slit parts extended in different directions from each other.
Abstract translation: 提供了一种麦克风，包括：隔膜; 支撑隔膜的支撑部分; 以及连接部，其将所述振动板连接到所述支撑部，使得所述振动板可移动，其中，所述连接部中形成狭缝，并且所述狭缝包括彼此不同方向延伸的多个狭缝部。
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公开(公告)号：US20150076629A1
公开(公告)日：2015-03-19
申请号：US14081058
申请日：2013-11-15
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Hwa Sun LEE , Byung Hun Kim , Yoon Sok Park
IPC: B81B3/00
Abstract: There is provided a microphone including: a thin film member including leg members extended in a direction not in parallel with a vibration direction; first supports supporting first points of the leg members, respectively; and a piezoelectric member connected to second points of the leg members and converting vibrations of the thin film member into electrical signals.
Abstract translation: 提供了一种麦克风，包括：薄膜构件，包括沿与振动方向不平行的方向延伸的腿构件; 分别支持支持成员的第一点; 以及压电构件，其连接到所述腿构件的第二点并将所述薄膜构件的振动转换为电信号。
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Patent Agency Ranking
公开(公告)号：US20140320568A1
公开(公告)日：2014-10-30
申请号：US13930480
申请日：2013-06-28
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Tae Kyung LEE , Byung Hun KIM , Hwa Sun LEE
IPC: B41J2/14
CPC classification number: B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2002/14419 , B41J2002/14491 , B41J2202/18
Abstract: There is provided an inkjet print head including a substrate member including an ink channel, a piezoelectric actuator formed on the substrate member, and a coating member formed on the piezoelectric actuator and including a photosensitive material.
Abstract translation: 提供了一种喷墨打印头，其包括具有油墨通道的基板构件，形成在基板构件上的压电致动器以及形成在压电致动器上并包括感光材料的涂覆构件。
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公开(公告)号：US20230318562A1
公开(公告)日：2023-10-05
申请号：US18319603
申请日：2023-05-18
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Tae Kyung LEE , Je Hong KYOUNG , Sung Sun KIM , Jin Suk SON , Ran Hee SHIN , Hwa Sun LEE
CPC classification number: H03H9/02102 , H03H9/176 , H03H9/174 , H03H9/02031
Abstract: A bulk-acoustic wave resonator comprises a substrate, a resonant portion comprising a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on the substrate, and further comprising a center portion and an extension portion that is disposed along a periphery of the center portion, and an insertion layer that is disposed in the extension portion between the first electrode and the piezoelectric layer, and the insertion layer is formed of an aluminum alloy containing scandium (Sc).
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公开(公告)号：US20230216470A1
公开(公告)日：2023-07-06
申请号：US17824145
申请日：2022-05-25
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Won HAN , Hwa Sun LEE , Jeong Hoon RYOU , Moon Chul LEE , Tae Yoon KIM , Sang Kee YOON , Yong Suk KIM , Joung Hun KIM , Sung Jun LEE , Sung Joon PARK
CPC classification number: H03H9/0211 , H03H9/173 , H03H9/02102
Abstract: A bulk acoustic wave resonator includes a substrate; a central portion including a first portion of a first electrode, a first portion of a piezoelectric layer, and a first portion of a second electrode laminated in order on the substrate; and a reflective region disposed laterally of the central portion and including a second portion of the first electrode, an insertion layer, a second portion of the piezoelectric layer, and a second portion of the second electrode. A side surface of the insertion layer adjacent to the central portion has an inclined surface, the first portion of the second electrode and the second portion of the second electrode are coplanar, and an end of the second electrode overlaps the inclined surface of the insertion layer in the reflective region.
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公开(公告)号：US20200252046A1
公开(公告)日：2020-08-06
申请号：US16418107
申请日：2019-05-21
Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Inventor： Ran Hee SHIN , Tae Kyung LEE , Sung Jun LEE , Hwa Sun LEE , Je Hong KYOUNG , Sung Sun KIM , Jin Suk SON
Abstract: A bulk acoustic wave resonator includes a substrate, a seed layer disposed on the substrate, a first electrode disposed on the seed layer and including an aluminum alloy layer containing scandium (Sc), a piezoelectric layer disposed on the first electrode and including a layer having a cation (Al) polarity, and a second electrode disposed on the piezoelectric layer.
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公开(公告)号：US20200036359A1
公开(公告)日：2020-01-30
申请号：US16356333
申请日：2019-03-18
Applicant: Samsung Electro-Mechanics Co., Ltd.
Inventor： Ran Hee SHIN , Tae Kyung LEE , Je Hong KYOUNG , Jin Suk SON , Hwa Sun LEE , Sung Sun KIM
IPC: H03H9/13 , H01L41/047 , H01L41/187 , H03H9/02 , H01L41/316 , H03H3/02 , H03H9/17 , C22C21/00
Abstract: A bulk-acoustic wave resonator includes a substrate, a first electrode disposed on the substrate, a piezoelectric layer, of which at least a portion is disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a passivation layer disposed to cover the first electrode and the second electrode. Either one or both of the first electrode and the second electrode includes an aluminum alloy layer. Either one or both of the piezoelectric layer and the passivation layer has aluminum nitride, or aluminum nitride added with a doping material, having a ratio of an out-of-plane lattice constant “c” to an in-plane lattice constant “a” (c/a) of less than 1.58.
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