Method of fabricating optoelectronic integrated circuit substrate
    15.
    发明授权
    Method of fabricating optoelectronic integrated circuit substrate 有权
    制造光电集成电路基板的方法

    公开(公告)号:US08951882B2

    公开(公告)日:2015-02-10

    申请号:US13868497

    申请日:2013-04-23

    Inventor: Seong-ho Cho

    CPC classification number: H01L21/762 G02B6/13 G02B6/136 H01L21/76229

    Abstract: A method of fabricating an optoelectronic integrated circuit substrate includes defining a photonic device region on a first substrate, the photonic device region having a photonic device formed thereon, forming a trench in the photonic device region on a top surface of the first substrate, the trench having a first depth, filling the trench with a dielectric, bonding a second substrate on the first substrate to cover the trench, and thinning the second substrate to a first thickness.

    Abstract translation: 制造光电子集成电路衬底的方法包括在第一衬底上限定光子器件区域,所述光子器件区域具有形成在其上的光子器件,在第一衬底的顶表面上的光子器件区域中形成沟槽,沟槽 具有第一深度,用电介质填充所述沟槽,将所述第一衬底上的第二衬底接合以覆盖所述沟槽,以及将所述第二衬底减薄到第一厚度。

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