Substrate Processing Fluid Delivery System and Method
    11.
    发明申请
    Substrate Processing Fluid Delivery System and Method 审中-公开
    基板加工流体输送系统和方法

    公开(公告)号:US20130152857A1

    公开(公告)日:2013-06-20

    申请号:US13327597

    申请日:2011-12-15

    CPC classification number: C23C16/4482 Y10T137/0318 Y10T137/5283

    Abstract: Embodiments provided herein describe substrate processing fluid delivery systems and methods. The substrate processing fluid delivery systems include a flow regulator. A fluid conduit assembly is coupled to the flow regulator and a processing chamber of a substrate processing apparatus. A plurality of processing fluid containers is coupled to the fluid conduit assembly. A plurality of valves is coupled to the fluid conduit assembly. The plurality of valves are configurable to selectively place each of the plurality of processing fluid containers in fluid communication with only the flow regulator or the processing chamber of the substrate processing apparatus through the fluid conduit assembly.

    Abstract translation: 本文提供的实施方案描述了基底处理流体递送系统和方法。 基板处理流体输送系统包括流量调节器。 流体导管组件联接到流量调节器和衬底处理装置的处理室。 多个处理流体容器联接到流体导管组件。 多个阀联接到流体导管组件。 多个阀可配置成选择性地将多个处理流体容器中的每一个通过流体导管组件与基板处理装置的流量调节器或处理室流体连通。

    HIGH PRODUCTIVITY VAPOR PROCESSING SYSTEM
    12.
    发明申请
    HIGH PRODUCTIVITY VAPOR PROCESSING SYSTEM 有权
    高生产率蒸汽加工系统

    公开(公告)号:US20130133580A1

    公开(公告)日:2013-05-30

    申请号:US13306508

    申请日:2011-11-29

    Applicant: Jason Wright

    Inventor: Jason Wright

    CPC classification number: C23C16/4412 C23C16/45565

    Abstract: A processing chamber is provided. The processing chamber includes a lid having a plurality of valves affixed thereto, the plurality of valves operable to enable process gases to flow into the chamber. The chamber includes a bottom portion, where the bottom portion includes a base and side walls extending from the base. A surface of the base is configured to support a substrate. A showerhead is affixed to a bottom surface of the lid. A bottom surface of the showerhead is configured to include a central port for providing process gases into the chamber. The central port is surrounded by an annular pump channel. The annular pump channel is surrounded by an annular purge channel, where a first ridge separates the delivery region and the annular pump channel and a second ridge separates the annular pump channel and the annular purge channel.

    Abstract translation: 提供处理室。 处理室包括具有固定到其上的多个阀的盖,多个阀可操作以使处理气体能够流入室中。 该腔室包括底部,底部包括底座和从基座延伸的侧壁。 基底的表面构造成支撑基底。 淋浴头固定在盖的底面上。 喷头的底表面构造成包括用于将工艺气体提供到室中的中心端口。 中央港口环绕着一个环形的泵通道。 环形泵通道被环形吹扫通道包围,其中第一脊分开输送区域和环形泵通道,第二脊分隔环形泵通道和环形清洗通道。

    Systems and Methods for Measuring, Monitoring and Controlling Ozone Concentration
    13.
    发明申请
    Systems and Methods for Measuring, Monitoring and Controlling Ozone Concentration 有权
    测量,监测和控制臭氧浓度的系统和方法

    公开(公告)号:US20130091926A1

    公开(公告)日:2013-04-18

    申请号:US13271471

    申请日:2011-10-12

    CPC classification number: G01F1/74 G01N25/18 G01N33/0039 Y02A50/247

    Abstract: Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of the total gas mixture properties, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to vacuum processing chamber, using either novel ozone sensor or existing mass flow meter or controller.

    Abstract translation: 基于总气体混合物性质的测量,确定臭氧和氧气混合物中的臭氧浓度的系统和方法可以使得能够在低压设置下测量臭氧浓度。 使用新型臭氧传感器或现有的质量流量计或控制器,可以将臭氧浓度测定应用于真空处理室。

    Method and system for providing secure one-way transfer of data
    14.
    发明授权
    Method and system for providing secure one-way transfer of data 有权
    提供数据安全单向传输的方法和系统

    公开(公告)号:US08250235B2

    公开(公告)日:2012-08-21

    申请号:US10848159

    申请日:2004-05-19

    CPC classification number: H04L63/105 H04L63/0281 H04L63/12

    Abstract: A system including a transmitter, a receiver, and a conduit is provided. The transmitter is within a first network, and is in communication with at least one other device within the first network. The receiver is within a second network, and is in communication with at least one other device within the second network. The conduit is formed between the transmitter and the receiver, and is capable of carrying a signal transmitted from the transmitter to the receiver. To maintain the unidirectional nature of the conduit, either the transmitter is incapable of receiving any signal via the conduit or the receiver is incapable of transmitting any signal via the conduit.

    Abstract translation: 提供了包括发射器,接收器和导管的系统。 发射机在第一网络内,并且与第一网络内的至少一个其他设备通信。 接收机在第二网络内,并且与第二网络内的至少一个其他设备通信。 导管形成在发射器和接收器之间,并且能够承载从发射器发送到接收器的信号。 为了保持导管的单向性质,发射器不能通过导管接收任何信号,或者接收器不能通过导管传输任何信号。

    CONTAINER VERIFICATION THROUGH AN ELECTRICAL RECEPTACLE AND PLUG ASSOCIATED WITH A CONTAINER AND A TRANSPORT VEHICLE OF AN INTERMODAL FREIGHT TRANSPORT SYSTEM
    18.
    发明申请
    CONTAINER VERIFICATION THROUGH AN ELECTRICAL RECEPTACLE AND PLUG ASSOCIATED WITH A CONTAINER AND A TRANSPORT VEHICLE OF AN INTERMODAL FREIGHT TRANSPORT SYSTEM 有权
    集装箱验收通过与集装箱相关的电气接头和插头以及交互式货运系统的运输车辆

    公开(公告)号:US20150095255A1

    公开(公告)日:2015-04-02

    申请号:US14564083

    申请日:2014-12-08

    CPC classification number: G06Q10/0833 G01S19/16 G06Q10/08

    Abstract: A method and system related to container identification through an electrical receptacle and plug associated with the container of an intermodal freight transport system is disclosed. According to one embodiment, a method includes coupling an electrical power plug of a container and an electrical power receptacle of a transport vehicle. Also, the method includes activating a tracking device of the container through a switch and actuator coupling. Further, the method includes verifying an identity of the container upon coupling the electrical power plug to the electrical power receptacle through an identification tag of the container and an electronic reader. Furthermore, the method may include conserving battery power through deactivating the tracking device of the container when the electrical power plug is de-coupled to the electrical power receptacle. The method may also include delivering an alert message to a driver when an incorrect container is identified.

    Abstract translation: 公开了一种通过与多式联运货运系统的容器相关联的电插座和插头来进行容器识别的方法和系统。 根据一个实施例,一种方法包括联接容器的电力插头和运输车辆的电力插座。 此外,该方法包括通过开关和致动器联接来启动容器的跟踪装置。 此外,该方法包括通过容器的识别标签和电子阅读器将电力插头连接到电力插座来验证容器的身份。 此外,该方法可以包括当电力插头与电力插座脱耦合时,通过停止容器的跟踪装置来节省电池电力。 该方法还可以包括当识别出不正确的容器时向驾驶员递送警报消息。

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