公开(公告)号：US08290242B2

公开(公告)日：2012-10-16

申请号：US12564842

申请日：2009-09-22

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/00

CPC classification number: G06T7/0004 ,  G06T7/12 ,  G06T2207/20044 ,  G06T2207/30148

Abstract: A defect inspection method includes: acquiring an image of an inspection pattern obtained by an imaging device, detecting an edge of the inspection pattern in the image, dividing the image into an inspection region and a non-inspection region, using the detected edge as a boundary thereof, performing image processing only on the inspection region to determine the intensity value distribution in the image, and detecting a defect in the inspection pattern based on the obtained intensity value distribution.

Abstract translation: 缺陷检查方法包括：获取由成像装置获得的检查图案的图像，检测图像中的检查图案的边缘，将图像划分为检查区域和非检查区域，使用检测到的边缘作为 边界，仅在检查区域进行图像处理，以确定图像中的强度值分布，并且基于获得的强度值分布来检测检查图案中的缺陷。

公开(公告)号：US08160349B2

公开(公告)日：2012-04-17

申请号：US11785781

申请日：2007-04-20

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/00 ,  G06K9/46 ,  G06K9/68

CPC classification number: G06T7/001 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: A pattern shape evaluation method comprising detecting an edge of an evaluation target pattern from an image of the evaluation target pattern to output the edge as a first edge, detecting an edge of a reference pattern from an image of the reference pattern to output the edge as a second edge, performing a relative scan of the first edge and the second edge to superpose the first edge onto the second edge, and outputting a resulting edge as a third edge, calculating a characteristic amount indicating characteristics of the third edge from the third edge, and deriving a characteristic amount function which provides the characteristic amount against relative coordinates in the relative scan and comparing the characteristic amount function with a preset value to judge whether or not the evaluation target pattern is good.

Abstract translation: 一种图案形状评估方法，包括从评估对象图案的图像中检测评估对象图案的边缘，将边缘输出为第一边缘，从参考图案的图像检测参考图案的边缘以将边缘输出为 第二边缘，执行所述第一边缘和所述第二边缘的相对扫描以将所述第一边缘叠加到所述第二边缘上，并且将所得到的边缘作为第三边缘输出，从所述第三边缘计算指示所述第三边缘的特性的特征量 导出相对于相对扫描中的相对坐标提供特征量的特征量函数，并将特征量函数与预设值进行比较，以判断评价对象图案是否良好。

公开(公告)号：US08150177B2

公开(公告)日：2012-04-03

申请号：US13137196

申请日：2011-07-27

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/36 ,  G06K9/00

CPC classification number: H04N19/105 ,  H04N19/14 ,  H04N19/176 ,  H04N19/94

Abstract: An image processing apparatus which compresses an image, the apparatus includes: a storage unit which stores a code book, the code book being prepared by allocating identification codes to code blocks, the code blocks being formed by executing quantization processing regarding a plurality of first image blocks as multidimensional vectors, the plurality of first image blocks being generated by cutting, in preset sizes, first regions out of a code book preparation image containing a first edge, each of the first regions surrounding and including an edge point of the first edge, the first edge being detected from the code book preparation image; an edge detection unit which detects a second edge from a compression target image containing the second edge; an image block generation unit which cuts, in preset sizes, second regions out of the compression target image to generate a plurality of second image blocks, each of the second regions surrounding and including an edge point of the detected second edge; a search unit which searches the code book stored in the storage unit for code blocks similar to the second image blocks; and an output unit which outputs information on the identification codes of the similar code blocks which have been searched for and information on coordinates of the edge points of the second image blocks.

Abstract translation: 一种压缩图像的图像处理装置，所述装置包括：存储单元，存储代码簿，所述代码本通过将识别码分配给代码块而准备，所述代码块是通过执行关于多个第一图像的量化处理而形成的 块作为多维向量，所述多个第一图像块通过以包含第一边缘的码本准备图像中的预定大小切割第一区域而产生，所述第一区域中的每一个围绕并包括所述第一边缘的边缘点， 从码本准备图像中检测第一边缘; 边缘检测单元，其从包含第二边缘的压缩目标图像检测第二边缘; 图像块生成单元，其以预设尺寸切割出压缩目标图像之外的第二区域，以生成多个第二图像块，每个第二区域围绕并包括检测到的第二边缘的边缘点; 搜索单元，其搜索与所述第二图像块相似的代码块存储在所述存储单元中的代码簿; 以及输出单元，其输出关于已经搜索的类似代码块的识别代码的信息和关于第二图像块的边缘点的坐标的信息。

公开(公告)号：US08126257B2

公开(公告)日：2012-02-28

申请号：US11783729

申请日：2007-04-11

Applicant: Yumiko Miyano ,  Tadashi Mitsui

Inventor： Yumiko Miyano ,  Tadashi Mitsui

IPC: G06K9/00

CPC classification number: G06K9/4609

Abstract: A pattern shape evaluation method includes acquiring an image of an evaluation target pattern including a plurality of element patterns; detecting edge of the evaluation target pattern from the image; classifying the detected edge of the evaluation target pattern into a plurality of evaluation target pattern edge groups; acquiring edge of a reference pattern serving as an evaluation standard for the element patterns; classifying the edge of the reference pattern into a plurality of reference pattern edge groups; selecting a reference pattern edge group to be aligned with the edge of the evaluation target pattern from the classified reference pattern edge groups; aligning the edge of the selected reference pattern edge group with the edge of the evaluation target pattern; and evaluating the shape of the evaluation target pattern by use of the result of the alignment.

Abstract translation: 图案形状评估方法包括获取包括多个元素图案的评估对象图案的图像; 从图像中检测评估对象图案的边缘; 将检测出的评价对象图案的边缘分类为多个评价对象图案边缘组; 获取用作元素图案的评估标准的参考图案的边缘; 将参考图案的边缘分类成多个参考图案边缘组; 从分类的参考图案边缘组中选择与评估对象图案的边缘对准的参考图案边缘组; 将所选择的参考图案边缘组的边缘与评估对象图案的边缘对齐; 以及通过使用对准的结果来评价评价对象图案的形状。

公开(公告)号：US07771697B2

公开(公告)日：2010-08-10

申请号：US10495045

申请日：2002-11-12

Applicant: Tadashi Mitsui ,  Takashi Sekiguchi ,  Mika Gamo ,  Yafei Zhang ,  Toshihiro Ando

Inventor： Tadashi Mitsui ,  Takashi Sekiguchi ,  Mika Gamo ,  Yafei Zhang ,  Toshihiro Ando

IPC: D01F9/12

CPC classification number: B82Y30/00 ,  B82Y40/00 ,  C01B21/064 ,  C01B32/152 ,  C01B32/162 ,  C01B32/174 ,  C01B32/956 ,  C01B2202/02 ,  C01B2202/06 ,  C01P2004/03 ,  C01P2004/13 ,  C01P2004/133 ,  Y10S977/736 ,  Y10S977/744 ,  Y10S977/843 ,  Y10S977/846

Abstract: A method is disclosed whereby a functional nanomaterial such as a monolayer carbon nanotube, a monolayer boron nitride nanotube, a monolayer silicon carbide nanotube, a multilayer carbon nanotube with the number of layers controlled, a multilayer boron nitride nanotube with the number of layers controlled, a multilayer silicon carbide nanotube with the number of layers controlled, a metal containing fullerene, and a metal containing fullerene with the number of layers controlled is produced at a high yield. According to the method, when a multilayer carbon nanotube (3) is formed by a chemical vapor deposition or a liquid phase growth process, an endothermic reaction aid (H2S) is introduced in addition to a primary reactant (CH4, H2) in the process to form a monolayer carbon nanotube (4).

Abstract translation: 公开了一种方法，其中功能纳米材料如单层碳纳米管，单层氮化硼纳米管，单层碳化硅纳米管，多层控制的多层碳纳米管，多层氮化硼纳米管的层数控制， 以高产率制造具有控制层数的多层碳化硅纳米管，含有金属的富勒烯和含有控制层数的富勒烯金属。 根据该方法，当通过化学气相沉积或液相生长工艺形成多层碳纳米管（3）时，除了主反应物（CH4，H2）之外还引入吸热反应助剂（H 2 S） 形成单层碳纳米管（4）。

公开(公告)号：US07341681B2

公开(公告)日：2008-03-11

申请号：US10498881

申请日：2003-06-11

Applicant: Tadashi Mitsui ,  Hidetoshi Oikawa

Inventor： Tadashi Mitsui ,  Hidetoshi Oikawa

IPC: B29D11/00

CPC classification number: B82B3/00 ,  G01Q60/22 ,  G01Q80/00 ,  Y10T428/2913 ,  Y10T428/2933

Abstract: In a method for manufacturing an optical fiber probe in which an optical fiber is formed as an optical fiber probe by etching a tip section and sharpening a core region of the optical fiber, the optical fiber is a polarization maintaining optical fiber including the core region, a stress-applying region, and a clad region. The optical fiber probe is formed by mechanical-grinding of the edge of the optical fiber into a sharpened shape so that the core region is located at the tip of a sharpened portion, and by dipping the formed edge of the optical fiber in an etchant for further sharpening the core region. Accordingly, a new optical fiber probe both with a high transmission efficiency and with a large polarization degree is obtained.

Abstract translation: 在通过蚀刻尖端部分并且锐化光纤的芯部区域来形成光纤作为光纤探针的光纤探针的制造方法中，光纤是包括芯部区域的保偏光纤， 应力施加区域和包层区域。 光纤探针通过将光纤的边缘机械研磨成锐化的形状形成，使得芯部区域位于锐化部分的尖端处，并且通过将光纤的形成的边缘浸入蚀刻剂 进一步锐化核心区域。 因此，获得具有高透射效率和大偏振度的新型光纤探头。

公开(公告)号：US20080056558A1

公开(公告)日：2008-03-06

申请号：US11896043

申请日：2007-08-29

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G06K9/00

CPC classification number: G06T7/001 ,  G03F1/84 ,  G03F1/86 ,  G06T7/13 ,  G06T7/181 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: A pattern evaluation method includes: acquiring a plurality of examination images obtained in regard to an evaluation target pattern, at least one of the plurality of examination images being different from the other examination images; detecting all edges of the evaluation target pattern in each of the examination images; executing alignment of the evaluation target pattern in the respective examination images with a sub-pixel accuracy based on the detected edges; superimposing the aligned pattern edges to generate a single combined edge; measuring the combined edge; and evaluating the evaluation target pattern based on a result of the measurement.

Abstract translation: 图案评估方法包括：获取关于评估对象图案获得的多个检查图像，所述多个检查图像中的至少一个与其他检查图像不同; 检测每个检查图像中的评估对象图案的所有边缘; 基于检测到的边缘，以各个检测图像的子像素精度执行评价对象图案的对准; 叠加对齐的图案边缘以产生单个组合边缘; 测量组合边缘; 以及基于测量结果评估评估目标图案。

公开(公告)号：US20050256669A1

公开(公告)日：2005-11-17

申请号：US11117387

申请日：2005-04-29

Applicant: Tadashi Mitsui

Inventor： Tadashi Mitsui

IPC: G01B15/00 ,  G01M99/00 ,  G01N23/225 ,  H01J37/22 ,  H01L21/02 ,  H01L21/66 ,  G01M19/00

CPC classification number: H01J37/222 ,  H01J2237/2813

Abstract: A measurement system includes a measurement apparatus, a client computer, and a server computer. The server computer includes a setting edition unit configured to prepare/edit set contents of a recipe of the measurement apparatus from the client computer, a notification unit configured to notify the measurement apparatus of at least one execution request included in the recipe prepared/edited by the client computer, a data processing unit configured to process data acquired by the recipe whose execution request has been notified by the measurement apparatus based on setting information input from the client computer, and a result display unit configured to display a processing result of the data processing unit in the client computer.

Abstract translation: 测量系统包括测量装置，客户端计算机和服务器计算机。 服务器计算机包括：设置编辑单元，被配置为从客户端计算机准备/编辑测量装置的配方的内容;通知单元，被配置为向测量装置通知包含在由 客户端计算机，数据处理单元，被配置为基于从客户端计算机输入的设置信息，处理由测量装置通知了其执行请求的食谱获取的数据;以及结果显示单元，被配置为显示数据的处理结果 客户端计算机中的处理单元。

公开(公告)号：US20050002849A1

公开(公告)日：2005-01-06

申请号：US10495045

申请日：2002-11-12

Applicant: Tadashi Mitsui ,  Takashi Sekiguchi ,  Mika Gamo ,  Yafei Zhang ,  Toshihiro Ando

Inventor： Tadashi Mitsui ,  Takashi Sekiguchi ,  Mika Gamo ,  Yafei Zhang ,  Toshihiro Ando

IPC: B82B3/00 ,  C01B21/064 ,  C01B31/02 ,  C01B31/36 ,  D01F9/12

CPC classification number: B82Y30/00 ,  B82Y40/00 ,  C01B21/064 ,  C01B32/152 ,  C01B32/162 ,  C01B32/174 ,  C01B32/956 ,  C01B2202/02 ,  C01B2202/06 ,  C01P2004/03 ,  C01P2004/13 ,  C01P2004/133 ,  Y10S977/736 ,  Y10S977/744 ,  Y10S977/843 ,  Y10S977/846

Abstract: A method is disclosed whereby a functional nanomaterial such as a monolayer carbon nanotube, a monolayer boron nitride nanotube, a monolayer silicon carbide nanotube, a multilayer carbon nanotube with the number of layers controlled, a multilayer boron nitride nanotube with the number of layers controlled, a multilayer silicon carbide nanotube with the number of layers controlled, a metal containing fullerene, and a metal containing fullerene with the number of layers controlled is produced at a high yield. According to the method, when a multilayer carbon nanotube (3) is formed by a chemical vapor deposition or a liquid phase growth process, an endothermic reaction aid (H2S) is introduced in addition to a primary reactant (CH4, H2) in the process to form a monolayer carbon nanotube (4).

Abstract translation: 公开了一种方法，其中功能纳米材料如单层碳纳米管，单层氮化硼纳米管，单层碳化硅纳米管，多层控制的多层碳纳米管，多层氮化硼纳米管控制层数， 以高产率制造具有控制层数的多层碳化硅纳米管，含有金属的富勒烯和含有控制层数的富勒烯金属。 根据该方法，当通过化学气相沉积或液相生长工艺形成多层碳纳米管（3）时，除了主反应物（CH4，H2）之外还引入吸热反应助剂（H 2 S） 形成单层碳纳米管（4）。

公开(公告)号：US5691540A

公开(公告)日：1997-11-25

申请号：US643090

申请日：1996-04-30

Applicant: Scott D. Halle ,  Philip Charles Danby Hobbs ,  Tadashi Mitsui ,  Theodore G. van Kessel ,  Hemantha Kumar Wickramasinghe

Inventor： Scott D. Halle ,  Philip Charles Danby Hobbs ,  Tadashi Mitsui ,  Theodore G. van Kessel ,  Hemantha Kumar Wickramasinghe

IPC: G01B11/22

CPC classification number: G01B11/22

Abstract: An assembly for measuring a trench depth parameter of a workpiece is disclosed. The assembly has an ultra-violet radiation source; a split fiber bundle having a first branch for propagating the ultra-violet radiation from the radiation source to a lens, and a second branch; a lens for focusing the UV radiation to the workpiece and refocusing an ultra-violet interference signal to the second branch; and a detector responsive to the ultra-violet interference signal received through the second branch. The detector transforms the ultra-violet interference signal to an electrical signal which is a measure of a trench depth of the workpiece. The ultra-violet interference signal is developed when ultra-violet radiation propagates through the workpiece and reflects from its base region to thereby interfere with ultra-violet radiation that is directly reflected by a workpiece surface which is different from the base region.

Abstract translation: 公开了一种用于测量工件的沟槽深度参数的组件。 该组件具有紫外辐射源; 具有用于将紫外辐射从辐射源传播到透镜的第一分支的分裂光纤束和第二分支; 用于将UV辐射聚焦到工件并将紫外干涉信号重新聚焦到第二分支的透镜; 以及响应于通过第二分支接收的紫外干涉信号的检测器。 检测器将紫外线干涉信号转换成电信号，该电信号是工件的沟槽深度的量度。 当紫外线辐射传播通过工件并从其底部区域反射时，紫外线干涉信号被开发，从而干扰由与基底区域不同的工件表面直接反射的紫外辐射。