Assembly for measuring a trench depth parameter of a workpiece
    1.
    发明授权
    Assembly for measuring a trench depth parameter of a workpiece 失效
    用于测量工件的沟槽深度参数的组件

    公开(公告)号:US5691540A

    公开(公告)日:1997-11-25

    申请号:US643090

    申请日:1996-04-30

    IPC分类号: G01B11/22

    CPC分类号: G01B11/22

    摘要: An assembly for measuring a trench depth parameter of a workpiece is disclosed. The assembly has an ultra-violet radiation source; a split fiber bundle having a first branch for propagating the ultra-violet radiation from the radiation source to a lens, and a second branch; a lens for focusing the UV radiation to the workpiece and refocusing an ultra-violet interference signal to the second branch; and a detector responsive to the ultra-violet interference signal received through the second branch. The detector transforms the ultra-violet interference signal to an electrical signal which is a measure of a trench depth of the workpiece. The ultra-violet interference signal is developed when ultra-violet radiation propagates through the workpiece and reflects from its base region to thereby interfere with ultra-violet radiation that is directly reflected by a workpiece surface which is different from the base region.

    摘要翻译: 公开了一种用于测量工件的沟槽深度参数的组件。 该组件具有紫外辐射源; 具有用于将紫外辐射从辐射源传播到透镜的第一分支的分裂光纤束和第二分支; 用于将UV辐射聚焦到工件并将紫外干涉信号重新聚焦到第二分支的透镜; 以及响应于通过第二分支接收的紫外干涉信号的检测器。 检测器将紫外线干涉信号转换成电信号,该电信号是工件的沟槽深度的量度。 当紫外线辐射传播通过工件并从其底部区域反射时,紫外线干涉信号被开发,从而干扰由与基底区域不同的工件表面直接反射的紫外辐射。

    Assembly suitable for writing high density data on a ferroelectric media
    6.
    发明授权
    Assembly suitable for writing high density data on a ferroelectric media 失效
    适用于在铁电介质上写入高密度数据的组件

    公开(公告)号:US06597639B1

    公开(公告)日:2003-07-22

    申请号:US09559489

    申请日:2000-04-27

    IPC分类号: G11B11105

    摘要: The invention discloses an assembly/methodology for writing/erasing high-density data on a ferroelectric recording media. A preferred embodiment of the invention features a novel thermal near-field heater that may be employed in the assembly, particularly for realizing the methodology in a substantially thermal near-field mode. The invention provides advantages of data storage densities greater than that of diffraction limited systems, for example, data storage densities of approximately greater than 100 Gbit/inch2, and writing speeds approximately greater than 100 MHz.

    摘要翻译: 本发明公开了一种用于在铁电记录介质上写/擦除高密度数据的装配/方法。 本发明的优选实施例的特征在于可用于组件中的新型热近场加热器,特别是用于实现基本上热近场模式的方法。 本发明提供了数据存储密度大于衍射受限系统的优点,例如大约大于100Gbit / inch2的数据存储密度,以及大约大于100MHz的写入速度。

    Electronically scannable multiplexing device
    8.
    发明授权
    Electronically scannable multiplexing device 失效
    电子可扫描多路复用器件

    公开(公告)号:US07795044B2

    公开(公告)日:2010-09-14

    申请号:US12338275

    申请日:2008-12-18

    IPC分类号: H01L21/00

    摘要: An electronically scannable multiplexing device is capable of addressing multiple bits within a volatile or non-volatile memory cell. The multiplexing device generates an electronically scannable conducting channel with two oppositely formed depletion regions. The depletion width of each depletion region is controlled by a voltage applied to a respective control gate at each end of the multiplexing device. The present multi-bit addressing technique allows, for example, 10 to 100 bits of data to be accessed or addressed at a single node. The present invention can also be used to build a programmable nanoscale logic array or for randomly accessing a nanoscale sensor array.

    摘要翻译: 电子扫描复用设备能够寻址易失性或非易失性存储器单元内的多个位。 多路复用装置产生具有两个相对形成的耗尽区的电子扫描导电通道。 每个耗尽区的耗尽宽度由施加到多路复用器件每端的相应控制栅极的电压控制。 目前的多位寻址技术允许例如在单个节点上访问或寻址10到100位的数据。 本发明还可用于构建可编程纳米尺度逻辑阵列或用于随机访问纳米级传感器阵列。