公开(公告)号：US11626328B2

公开(公告)日：2023-04-11

申请号：US17328428

申请日：2021-05-24

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Lin Lee ,  Chih Chieh Yeh ,  Feng Yuan ,  Hung-Li Chiang ,  Wei-Jen Lai

IPC: H01L21/8238 ,  H01L27/092 ,  H01L29/78 ,  H01L21/762 ,  H01L21/306 ,  H01L21/02

Abstract: An integrated circuit device includes a substrate having a first portion in a first device region and a second portion in a second device region. A first semiconductor strip is in the first device region. A dielectric liner has an edge contacting a sidewall of the first semiconductor strip, wherein the dielectric liner is configured to apply a compressive stress or a tensile stress to the first semiconductor strip. A Shallow Trench Isolation (STI) region is over the dielectric liner, wherein a sidewall and a bottom surface of the STI region is in contact with a sidewall and a top surface of the dielectric liner.

公开(公告)号：US20200273997A1

公开(公告)日：2020-08-27

申请号：US16874539

申请日：2020-05-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Feng Yuan ,  Ming-Shiang Lin ,  Chia-Cheng Ho ,  Jin Cai ,  Tzu-Chung Wang ,  Tung Ying Lee

IPC: H01L29/78 ,  H01L29/66 ,  H01L29/51 ,  H01L21/8234

Abstract: The various described embodiments provide a transistor with a negative capacitance, and a method of creating the same. The transistor includes a gate structure having a ferroelectric layer. The ferroelectric layer is formed by forming a thick ferroelectric film, annealing the ferroelectric film to have a desired phase, and thinning the ferroelectric film to a desired thickness of the ferroelectric layer. This process ensures that the ferroelectric layer will have ferroelectric properties regardless of its thickness.

公开(公告)号：US20250159969A1

公开(公告)日：2025-05-15

申请号：US19019957

申请日：2025-01-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Kai-Qiang Wen ,  Shih-Fen Huang ,  Shih-Chun Fu ,  Chi-Yuan Shih ,  Feng Yuan

IPC: H10D84/03 ,  H10D1/47 ,  H10D30/62 ,  H10D84/01 ,  H10D84/80

Abstract: A device includes a fin on a substrate; a first transistor, including: a drain region and a first source region in the fin; and a first gate structure on the fin between the first source region and the drain region; a second transistor, including: the drain region and a second source region in the fin; and a second gate structure on the fin between the second source region and the drain region; a first resistor, including: the first source region and a first resistor region in the fin; and a third gate structure on the fin between the first source region and the first resistor region; and a second resistor, including: the second source region and a second resistor region in the fin; and a fourth gate structure on the fin between the second source region and the second resistor region.

公开(公告)号：US20230420452A1

公开(公告)日：2023-12-28

申请号：US17848605

申请日：2022-06-24

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Kai-Qiang Wen ,  Shih-Fen Huang ,  Shih-Chun Fu ,  Chi-Yuan Shih ,  Feng Yuan ,  Wan-Lin Tsai ,  Chung-Liang Cheng

IPC: H01L27/06 ,  H01L29/8605 ,  H01L29/78 ,  H01L29/66

CPC classification number: H01L27/0629 ,  H01L29/8605 ,  H01L29/7851 ,  H01L29/66545 ,  H01L29/66795 ,  H01L29/66166

Abstract: Embodiments include a FinFET transistor including an embedded resistor disposed in the fin between the source epitaxial region and the source contact. A control contact may be used to bias the embedded resistor, thereby changing the resistivity of the resistor. Edge gates of the FinFET transistor may be replaced with insulating structures. Multiple ones of the FinFET/embedded resistor combination may be utilized together in a common drain/common source contact design.

公开(公告)号：US20210280471A1

公开(公告)日：2021-09-09

申请号：US17328428

申请日：2021-05-24

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Lin Lee ,  Chih Chieh Yeh ,  Feng Yuan ,  Hung-Li Chiang ,  Wei-Jen Lai

IPC: H01L21/8238 ,  H01L29/78 ,  H01L21/762 ,  H01L27/092 ,  H01L21/306

Abstract: An integrated circuit device includes a substrate having a first portion in a first device region and a second portion in a second device region. A first semiconductor strip is in the first device region. A dielectric liner has an edge contacting a sidewall of the first semiconductor strip, wherein the dielectric liner is configured to apply a compressive stress or a tensile stress to the first semiconductor strip. A Shallow Trench Isolation (STI) region is over the dielectric liner, wherein a sidewall and a bottom surface of the STI region is in contact with a sidewall and a top surface of the dielectric liner.