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11.发明申请METHOD OF MANUFACTURING MOLD AND METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 有权制造模具的方法和制造磁记录介质的方法公开(公告)号：US20130069272A1
公开(公告)日：2013-03-21
申请号：US13423543
申请日：2012-03-19
申请人： Yasuaki OOTERA , Yoshiyuki KAMATA , Naoko KIHARA , Yoshiaki KAWAMONZEN , Takeshi OKINO , Ryosuke YAMAMOTO , Tomoyuki MAEDA , Norikatsu SASAO , Akiko YUZAWA , Takuya SHIMADA , Hiroyuki Hieda
发明人： Yasuaki OOTERA , Yoshiyuki KAMATA , Naoko KIHARA , Yoshiaki KAWAMONZEN , Takeshi OKINO , Ryosuke YAMAMOTO , Tomoyuki MAEDA , Norikatsu SASAO , Akiko YUZAWA , Takuya SHIMADA , Hiroyuki Hieda
CPC分类号： B29C33/3857 , G11B5/855
摘要： In one embodiment, a method of manufacturing a mold includes: forming a first layer having an affinity to a second polymer on a substrate having an affinity to a first polymer; forming first and second openings in the first layer; filling a resist in the second openings and hardening the resist to obtain a hardened resist; and forming a second layer containing a block copolymer and causing it to self-assemble.
摘要翻译： 在一个实施方案中，制造模具的方法包括：在对第一聚合物具有亲和性的基材上形成对第二聚合物具有亲和性的第一层; 在第一层中形成第一和第二开口; 在第二开口中填充抗蚀剂并使抗蚀剂硬化以获得硬化抗蚀剂; 并形成含有嵌段共聚物并使其自组装的第二层。
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12.发明申请SUBSTRATE FOR MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING AND REPRODUCING APPARATUS 审中-公开用于磁记录介质，磁记录介质和磁记录和再现装置的基板公开(公告)号：US20110164337A1
公开(公告)日：2011-07-07
申请号：US13047077
申请日：2011-03-14
申请人： Kaori KIMURA , Masatoshi SAKURAI , Akira KIKITSU , Yoshiyuki KAMATA , Satoshi SHIROTORI , Hiroyuki HIEDA
发明人： Kaori KIMURA , Masatoshi SAKURAI , Akira KIKITSU , Yoshiyuki KAMATA , Satoshi SHIROTORI , Hiroyuki HIEDA
IPC分类号： G11B5/82
摘要： In an example magnetic recording medium substrate, a plurality of recording tracks are formed on a substrate, each recording track being formed of a magnetic material. Non-recording sections are formed on the substrate, each non-recording section separating adjacent recording tracks. Each recording track includes a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section has a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.
摘要翻译： 在一个示例性磁记录介质基板中，在基板上形成多个记录磁道，每个记录磁道由磁性材料形成。 非记录部分形成在基板上，每个非记录部分分隔相邻的记录道。 每个记录轨道包括多个记录部分和连接部分，用于在轨道纵向方向上连接与其相邻的记录部分，并且每个连接部分具有在轨道宽度方向上的横截面积小于横截面积的横截面积 相邻记录部的轨道宽度方向。
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公开(公告)号：US20100006537A1
公开(公告)日：2010-01-14
申请号：US12561151
申请日：2009-09-16
申请人： Yoshiyuki KAMATA , Akira KIKITSU , Yosuke ISOWAKI , Kaori KIMURA , Satoshi SHIROTORI , Masatoshi SAKURAI
发明人： Yoshiyuki KAMATA , Akira KIKITSU , Yosuke ISOWAKI , Kaori KIMURA , Satoshi SHIROTORI , Masatoshi SAKURAI
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer on a substrate, the magnetic recording layer having a multi-layered structure of two or more layers at least one layer of which has a granular structure including CoCrPt alloy and SiO2, TiO2, CrO2, CoO2 or Ta2O5, forming masks on areas corresponding to recording regions of the magnetic recording layer, partially etching the magnetic recording layer in areas not covered with the masks with an etching gas to expose the granular layer of the magnetic recording layer and to form protrusions and recesses on the magnetic recording layer, modifying the granular layer of the magnetic recording layer remaining in the recesses with modifying gas, promoting modification reaction to form non-recording regions, and forming a protective film on an entire surface.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在基片上沉积磁记录层，该磁记录层具有两层或更多层的多层结构，其至少一层具有包括CoCrPt 合金和SiO 2，TiO 2，CrO 2，CoO 2或Ta 2 O 5，在与磁记录层的记录区相对应的区域上形成掩模，用蚀刻气体部分蚀刻未被掩模覆盖的区域中的磁记录层，以暴露出 磁记录层，并在磁记录层上形成凸起和凹槽，用改性气体改性残留在凹槽中的磁记录层的颗粒层，促进改性反应形成非记录区，并在整体上形成保护膜 表面。
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公开(公告)号：US20110242706A1
公开(公告)日：2011-10-06
申请号：US13039158
申请日：2011-03-02
CPC分类号： G11B5/59688 , B82Y10/00 , G11B5/743 , G11B5/855
摘要： According to one embodiment, a servo area of a magnetic recording medium includes magnetic dots arrayed at a period L0. The magnetic dots include a plurality of magnetic dot regions divided in the cross track direction. A width Wm in the down track direction of the mth magnetic dot region from the innermost circumference and a number Nm of dot rows in the down track direction of the mth region meet a relationship represented by L0{Nm√3/2−0.3}≦Wm≦L0{Nm√3/2+0.3} (1)
摘要翻译： 根据一个实施例，磁记录介质的伺服区包括以周期L0排列的磁点。 磁点包括沿交叉磁道方向分割的多个磁点区域。 第m个区域的第m个磁性区域的向下轨道方向的宽度Wm和第m个区域的向下轨道方向的点行数为Nm满足L0 {Nm3 / 2-0.3}＆nlE ; Wm＆nlE; L0 {Nm√3/ 2 + 0.3}（1）
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公开(公告)号：US20110049090A1
公开(公告)日：2011-03-03
申请号：US12872820
申请日：2010-08-31
申请人： Yoshiyuki KAMATA , Hiromi YUASA , Shuichi MURAKAMI , Hideaki FUKUZAWA , Michiko HARA , Yoshihiko FUJI , Masatoshi SAKURAI
发明人： Yoshiyuki KAMATA , Hiromi YUASA , Shuichi MURAKAMI , Hideaki FUKUZAWA , Michiko HARA , Yoshihiko FUJI , Masatoshi SAKURAI
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a magnetic recording layer, an etching protection layer, and an adhesion layer on a substrate, applying a resist on the adhesion layer, transferring patterns of protrusions and recesses on the resist by imprinting to form a resist pattern, patterning the adhesion layer by using the resist pattern as a mask, patterning the etching protection layer by using the resist pattern as a mask, etching the magnetic recording layer by using patterns of the adhesion layer and the etching protection layer as masks to form patterns of protrusions and recesses of the magnetic recording layer and removing the pattern of the adhesion layer, stripping the pattern of the etching protection layer, and exposing the patterns of protrusions and recesses of the magnetic recording layer to a non-ionized reducing gas.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在基板上形成磁记录层，蚀刻保护层和粘合层，在粘合层上涂布抗蚀剂，在抗蚀剂上转印凹凸图案 通过印刷形成抗蚀剂图案，通过使用抗蚀剂图案作为掩模对粘合层进行图案化，通过使用抗蚀剂图案作为掩模对蚀刻保护层进行图案化，通过使用粘合层和蚀刻的图案蚀刻磁记录层 保护层作为掩模以形成磁记录层的突起和凹陷的图案并去除粘附层的图案，剥离蚀刻保护层的图案，以及将磁记录层的突起和凹陷的图案暴露于非磁性层 - 还原气体。
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公开(公告)号：US20110014496A1
公开(公告)日：2011-01-20
申请号：US12838349
申请日：2010-07-16
摘要： According to one embodiment, there is provided a method of manufacturing a magnetic recording medium, including forming a first hard mask including carbon as a main component, a second hard mask including a main component other than carbon and a resist on a magnetic recording layer, contacting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues in the recesses of the patterned resist, etching the second hard mask, etching the first hard mask, patterning the magnetic recording layer, and removing the first hard mask, the method further including, between etching the first hard mask and removing the first hard mask, removing the second hard mask remaining on the protrusions of the first hard mask, and removing a contaminating layer on a surface of the first hard mask by a mixed gas of oxygen-based gas and a fluorine compound.
摘要翻译： 根据一个实施例，提供了一种制造磁记录介质的方法，包括形成包括碳作为主要成分的第一硬掩模，包括除碳以外的主要成分的第二硬掩模和在磁记录层上的抗蚀剂， 将压模接触抗蚀剂以将突起和凹陷的图案转移到抗蚀剂，去除图案化抗蚀剂的凹部中的残留物，蚀刻第二硬掩模，蚀刻第一硬掩模，图案化磁记录层，以及去除第一硬 掩模，所述方法还包括在蚀刻所述第一硬掩模和去除所述第一硬掩模之间，去除残留在所述第一硬掩模的突起上的所述第二硬掩模，以及通过所述第一硬掩模的表面去除所述第一硬掩模的表面上的污染层 氧基气体和氟化合物的混合气体。
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公开(公告)号：US20100260885A1
公开(公告)日：2010-10-14
申请号：US12757794
申请日：2010-04-09
申请人： Ryouichi TAKAHASHI , Satoshi SHIROTORI , Tsuyoshi ONITSUKA , Yoshiyuki KAMATA , Masatoshi SAKURAI
发明人： Ryouichi TAKAHASHI , Satoshi SHIROTORI , Tsuyoshi ONITSUKA , Yoshiyuki KAMATA , Masatoshi SAKURAI
IPC分类号： B29C43/10
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： According to one embodiment, an imprinting apparatus includes a first mold configured to hold a disk-shaped stamper on which patterns of recesses and protrusions are formed, a second mold configured to hold a disk-shaped substrate to which a resist is applied so that the substrate faces the stamper held by the first mold, and a suction ring which is disposed around the first mold and in which an inner groove and an outer groove are formed to correspond to an outer periphery portion of the stamper held by the first mold, the inner groove being opened to atmosphere and the outer groove being vacuum-suctioned.
摘要翻译： 根据一个实施例，压印设备包括：第一模具，其被配置为保持其上形成有凹部和突起的图案的盘形压模;第二模具，其构造成保持施加有抗蚀剂的盘状基板， 基板面对由第一模具保持的压模，以及设置在第一模具周围的吸入环，其中内槽和外槽形成为对应于由第一模具保持的压模的外周部分， 内槽向大气开放，外槽被真空抽吸。
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公开(公告)号：US20100000965A1
公开(公告)日：2010-01-07
申请号：US12558372
申请日：2009-09-11
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer on a substrate, forming masks on areas corresponding to recording regions of the magnetic recording layer, partially etching the magnetic recording layer in areas not covered with the masks with an etching gas to form protrusions and recesses on the magnetic recording layer, modifying the magnetic recording layer remaining in the recesses with a modifying gas to form non-recording regions, and forming a protecting film on an entire surface.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在基片上沉积磁记录层，在与磁记录层的记录区相对应的区域上形成掩模，在未被掩模覆盖的区域中部分蚀刻磁记录层 用蚀刻气体在磁记录层上形成突起和凹陷，用修改气体改变留在凹槽中的磁记录层，形成非记录区，并在整个表面上形成保护膜。
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19.发明申请公开(公告)号：US20100047625A1
公开(公告)日：2010-02-25
申请号：US12544606
申请日：2009-08-20
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层 通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。
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公开(公告)号：US20100000966A1
公开(公告)日：2010-01-07
申请号：US12561168
申请日：2009-09-16
IPC分类号： B44C1/22
CPC分类号： G11B5/855 , H01F10/12 , H01F10/265 , H01F41/34
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes depositing a magnetic recording layer on a substrate, forming masks on areas corresponding to recording regions of the magnetic recording layer, partially etching the magnetic recording layer in areas not covered with the masks with an etching gas to form protrusions and recesses on the magnetic recording layer, modifying the magnetic recording layer remaining in the recesses with Ne gas to form non-recording regions, and forming a protecting film on an entire surface.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在基片上沉积磁记录层，在与磁记录层的记录区对应的区域上形成掩模，在未被掩模覆盖的区域中部分蚀刻磁记录层 用蚀刻气体在磁记录层上形成突起和凹陷，用Ne气体修饰残留在凹槽中的磁记录层，形成非记录区，并在整个表面上形成保护膜。
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