Tri-layer process for forming TFT matrix of LCD with reduced masking steps

    公开(公告)号:US06436740B1

    公开(公告)日:2002-08-20

    申请号:US09615919

    申请日:2000-07-13

    CPC classification number: H01L29/66765

    Abstract: A simplified tri-layer process for forming a thin film transistor matrix for a liquid crystal display is disclosed. By using a backside exposure technique, the masking step for patterning an etch stopper layer can be omitted. After forming an active region including a gate electrode and a scan line on the front side of a substrate, and sequentially applying an etch stopper layer and a photoresist layer over the resulting structure, the backside exposure is performed by exposing from the back side of the substrate. A portion of photoresist is shielded by the active region from exposure so that an etch stopper structure having a shape similar to the shape of the active region is formed without any photo-masking and lithographic procedure. Therefore, the above self-aligned effect allows one masking step to be reduced so as to simplify the process.

    Method of fabricating capacitor plate
    12.
    发明授权
    Method of fabricating capacitor plate 失效
    制造电容器板的方法

    公开(公告)号:US5966610A

    公开(公告)日:1999-10-12

    申请号:US2675

    申请日:1998-01-05

    CPC classification number: H01L28/92 H01L28/91 H01L27/10814 H01L27/10852

    Abstract: A method of fabricating a capacitor plate constitutes first providing a substrate. Then, first insulating layer is formed over the substrate. Sequentially, a buffering layer and a second insulating layer, both of which constitute a stacked structure, are formed over the first insulating layer. Next, the stacked structure is patterned into an opening thereby exposing a portion of the first insulating layer therethrough. Subsequently, conducting spacers are formed on the sidewalls of the opening. The second insulating layer is thereafter removed, and simultaneously a portion of the first insulating layer not covered by the buffering layer and the conducting spacers are removed to form a contact window, thereby exposing a portion of the substrate therethrough. Then, a conducting layer is conformably deposited over the substrate, and thereafter etched away until a portion of the buffering layer is exposed. Finally, the exposed buffering layer is removed. The remaining conducting layer and the conducting spacers constitute the capacitor's bottom electrode plate.

    Abstract translation: 构成电容器板的方法首先构成基板。 然后,在基板上形成第一绝缘层。 顺序地,在第一绝缘层上形成缓冲层和构成堆叠结构的第二绝缘层。 接下来,将堆叠结构图案化成开口,从而使第一绝缘层的一部分暴露于其中。 随后,在开口的侧壁上形成导电间隔物。 此后除去第二绝缘层,同时将不被缓冲层和导电间隔物覆盖的第一绝缘层的一部分移除以形成接触窗,从而使基板的一部分暴露。 然后,将导电层顺应地沉积在衬底上,然后蚀刻掉直到缓冲层的一部分露出。 最后,暴露的缓冲层被去除。 剩余的导电层和导电间隔物构成电容器的底部电极板。

    Method for fabricating a storage plate of a semiconductor capacitor
    13.
    发明授权
    Method for fabricating a storage plate of a semiconductor capacitor 失效
    制造半导体电容器的存储板的方法

    公开(公告)号:US5960295A

    公开(公告)日:1999-09-28

    申请号:US009160

    申请日:1998-01-20

    CPC classification number: H01L28/92

    Abstract: The present invention provides a method for fabricating a storage plate of a semiconductor capacitor. A conductive layer is first formed on a semiconductor substrate. A glue layer is formed on the conductive layer. A plurality of micro masking-balls are then spread onto the surface of the glue layer. Using these micro masking-balls as masks, the glue layer is etched to expose a portion surface of the conductive layer. Using the remaining glue layer as a mask, the conductive layer is etched to form a bristle-shaped conductive layer. After that, the glue layer and micro masking-balls are removed, thereby allowing the remaining bristle-shaped conductive layer to form a storage plate of a semiconductor capacitor.

    Abstract translation: 本发明提供一种制造半导体电容器的存储板的方法。 首先在半导体衬底上形成导电层。 在导电层上形成胶层。 然后将多个微掩模球展开到胶层的表面上。 使用这些微掩模球作为掩模,蚀刻胶层以暴露导电层的部分表面。 使用剩余的胶层作为掩模,蚀刻导电层以形成刷毛状导电层。 之后,去除胶层和微掩模球,由此使残留的刷毛状导电层形成半导体电容器的存储板。

    Method for making touch panel
    14.
    发明授权
    Method for making touch panel 有权
    制作触摸屏的方法

    公开(公告)号:US08889215B2

    公开(公告)日:2014-11-18

    申请号:US13339688

    申请日:2011-12-29

    CPC classification number: G06F3/044 G06F2203/04103 G06F2203/04112

    Abstract: The present disclosure relates to a method for making a plurality of touch panels one time. The method includes following steps. A substrate is provided. The substrate has a surface defining a number of target areas with each including two areas: a touch-view area and a trace area. An adhesive layer is formed on the surface of the substrate. A carbon nanotube film is formed on the adhesive layer. The adhesive layer is solidified. An electrode and a conductive trace are formed on each target area so that part of the carbon nanotube film is exposed from a space between adjacent conductive lines of the conductive trace to form an exposed carbon nanotube film on each trace area. The exposed carbon nanotube film on each trace area is removed to obtain a plurality of transparent conductive layers spaced from each other. A number of touch panels is obtained by cutting the substrate.

    Abstract translation: 本公开涉及一次制作多个触摸面板的方法。 该方法包括以下步骤。 提供基板。 基板具有限定多个目标区域的表面,每个目标区域包括两个区域:触摸视图区域和迹线区域。 在基板的表面上形成粘接层。 在粘合剂层上形成碳纳米管膜。 粘合层固化。 在每个目标区域上形成电极和导电迹线,使得部分碳纳米管膜从导电迹线的相邻导电线之间的空间露出,以在每个迹线区域上形成暴露的碳纳米管膜。 去除每个迹线区域上的暴露的碳纳米管膜以获得彼此间隔开的多个透明导电层。 通过切割基板获得多个触摸面板。

    Touch panel and touch display device using the same
    15.
    发明授权
    Touch panel and touch display device using the same 有权
    触摸面板和触摸显示设备使用相同

    公开(公告)号:US08854334B2

    公开(公告)日:2014-10-07

    申请号:US12907038

    申请日:2010-10-19

    CPC classification number: G06F3/0412 G06F3/0418 G06F3/044

    Abstract: An exemplary embodiment of touch display device includes a touch panel and a signal processing circuit. The touch panel includes a plurality of touch sensing units, and each touch sensing unit includes a touch sensing element and a coupling sensing element. The signal processing circuit is electrically connected to the touch sensing element and the coupling sensing element. The touch sensing element provides a touch signal to the signal processing circuit, the coupling sensing element provides a coupling signal to the signal processing circuit, and the signal processing circuit processes the touch signal according to the coupling signal to filter an interference signal of the touch signal. A touch display device using the touch panel is also described.

    Abstract translation: 触摸显示装置的示例性实施例包括触摸面板和信号处理电路。 触摸面板包括多个触摸感测单元,并且每个触摸感测单元包括触摸感测元件和耦合感测元件。 信号处理电路电连接到触摸感测元件和耦合感测元件。 触摸感测元件向信号处理电路提供触摸信号,耦合感测元件向信号处理电路提供耦合信号,并且信号处理电路根据耦合信号处理触摸信号以滤除触摸的干扰信号 信号。 还描述了使用触摸面板的触摸显示装置。

    Method for making liquid crystal display screen
    18.
    发明授权
    Method for making liquid crystal display screen 有权
    制作液晶显示屏的方法

    公开(公告)号:US08199123B2

    公开(公告)日:2012-06-12

    申请号:US12584410

    申请日:2009-09-03

    Abstract: A method for making a liquid crystal display screen is provided. The method includes the following steps. A touch panel and a thin film transistor panel are provided, and the touch panel includes at least one TP carbon nanotube layer. The thin film transistor panel includes a plurality of thin film transistors; each of the thin film transistors comprises a TFT carbon nanotube layer. A first polarizer is applied on a surface of the touch panel. Additionally, a liquid crystal layer is provided to be placed between the first polarizer and the thin film transistor panel.

    Abstract translation: 提供了一种制造液晶显示屏的方法。 该方法包括以下步骤。 提供触摸面板和薄膜晶体管面板,并且触摸面板包括至少一个TP碳纳米管层。 薄膜晶体管面板包括多个薄膜晶体管; 每个薄膜晶体管包括TFT碳纳米管层。 第一偏振器被施加在触摸面板的表面上。 此外,提供液晶层以放置在第一偏振器和薄膜晶体管面板之间。

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