公开(公告)号：US20120307605A1

公开(公告)日：2012-12-06

申请号：US13482065

申请日：2012-05-29

申请人： Kaifeng Zhang ,  Takenori Hirose ,  Masahiro Watanabe ,  Shinji Homma ,  Tsuneo Nakagomi ,  Teruaki Tokutomi ,  Toshihiko Nakata ,  Takehiro Tachizaki

发明人： Kaifeng Zhang ,  Takenori Hirose ,  Masahiro Watanabe ,  Shinji Homma ,  Tsuneo Nakagomi ,  Teruaki Tokutomi ,  Toshihiko Nakata ,  Takehiro Tachizaki

IPC分类号： G11B13/04

CPC分类号： G11B5/455 ,  G11B2005/0021

摘要： In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.

摘要翻译： 在用于检查热辅助磁记录头元件的方法和装置中，将样本安装在可在扫描探针显微镜装置的平面中移动的台上，从所述样本的渐逝光的发光部分产生ev逝光 通过在平面中移动台来检测ev逝光的散射光，同时具有探针的扫描探针显微镜的悬臂在试样的表面附近垂直振动，并且从from射光发射的ev逝光的强度分布 使用基于检测到的散射光的ev逝光的产生的位置信息来检查ev逝光的发光部分或试样的ev逝光的发光部分的表面轮廓。

公开(公告)号：US08483035B2

公开(公告)日：2013-07-09

申请号：US13482065

申请日：2012-05-29

申请人： Kaifeng Zhang ,  Takenori Hirose ,  Masahiro Watanabe ,  Shinji Homma ,  Tsuneo Nakagomi ,  Teruaki Tokutomi ,  Toshihiko Nakata ,  Takehiro Tachizaki

发明人： Kaifeng Zhang ,  Takenori Hirose ,  Masahiro Watanabe ,  Shinji Homma ,  Tsuneo Nakagomi ,  Teruaki Tokutomi ,  Toshihiko Nakata ,  Takehiro Tachizaki

IPC分类号： G11B7/00 ,  G11B5/09

CPC分类号： G11B5/455 ,  G11B2005/0021

摘要： In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.

摘要翻译： 在用于检查热辅助磁记录头元件的方法和装置中，将样本安装在可在扫描探针显微镜装置的平面中移动的台上，从所述样本的渐逝光的发光部分产生ev逝光 通过在平面中移动台来检测ev逝光的散射光，同时具有探针的扫描探针显微镜的悬臂在试样的表面附近垂直振动，并且从from射光发射的ev逝光的强度分布 使用基于检测到的散射光的ev逝光的产生的位置信息来检查ev逝光的发光部分或试样的ev逝光的发光部分的表面轮廓。

公开(公告)号：US20120291161A1

公开(公告)日：2012-11-15

申请号：US13462845

申请日：2012-05-03

申请人： Kaifeng ZHANG ,  Takenori Hirose ,  Masahiro Watanabe ,  Tetsuya Matsui ,  Tsuneo Nakagomi ,  Teruaki Tokutomi

发明人： Kaifeng ZHANG ,  Takenori Hirose ,  Masahiro Watanabe ,  Tetsuya Matsui ,  Tsuneo Nakagomi ,  Teruaki Tokutomi

IPC分类号： G01Q70/08 ,  G01Q70/16

CPC分类号： G01Q60/36 ,  G01Q60/42 ,  G01Q60/54 ,  G01Q60/56 ,  G01Q70/12 ,  G01Q70/14 ,  G01Q70/16

摘要： In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).

摘要翻译： 在用于磁力显微镜的这种悬臂的制造方法中，在用于磁力显微镜的悬臂的尖端处的探针上形成磁性膜。 当在探针周围形成非磁性刚性保护膜时，该膜从磁力显微镜的悬臂的探针的前部以15°至45°的角度和从探头背面形成 用于磁力显微镜的悬臂在两个方向上各自以（15°至30°）的范围内的角度。

公开(公告)号：US08278917B2

公开(公告)日：2012-10-02

申请号：US12394041

申请日：2009-02-27

申请人： Tsuneo Nakagomi ,  Teruaki Tokutomi

发明人： Tsuneo Nakagomi ,  Teruaki Tokutomi

IPC分类号： G01R33/12

CPC分类号： G11B5/455 ,  G11B5/3173 ,  Y10T29/49032

摘要： A magnetic head inspection device inspects the write track width of a thin film magnetic head in a phase as early as possible during the manufacturing process. A recording signal (excitation signal) is input from bonding pads to the thin film magnetic head in a rowbar, and the magnetic field generated by the write pole (element) included in the thin film magnetic head is observed directly by using a magnetic force microscope (MFM), a scanning Hall probe microscope (SHPM), or a scanning magneto resistance effect microscope (SMRM) that performs a scanning motion at a position equivalent to the flying height of the magnetic head. In this manner, a shape of the generated magnetic field instead of the physical shape of the write pole (element) is measured; thus, a non-destructive inspection can be performed on the effective magnetic track width.

摘要翻译： 磁头检查装置在制造过程中尽可能早地检查薄膜磁头的写入轨道宽度。 记录信号（激励信号）从接合焊盘输入到行列中的薄膜磁头，并且通过使用磁力显微镜直接观察由包括在薄膜磁头中的写入极（元件）产生的磁场 （MFM），扫描霍尔探针显微镜（SHPM）或扫描磁阻效应显微镜（SMRM），其在与磁头的飞行高度相当的位置执行扫描运动。 以这种方式，测量产生的磁场的形状而不是写入极（元件）的物理形状; 因此，可以对有效磁道宽度进行非破坏性检查。

公开(公告)号：US20070013369A1

公开(公告)日：2007-01-18

申请号：US11485983

申请日：2006-07-14

申请人： Teruaki Tokutomi ,  Kyoichi Mori

发明人： Teruaki Tokutomi ,  Kyoichi Mori

IPC分类号： G01R33/12

CPC分类号： G11B5/455 ,  G11B5/012 ,  G11B5/10 ,  G11B5/102 ,  G11B5/105 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/3189 ,  G11B5/4555 ,  G11B2005/0016 ,  G11B2005/3996

摘要： In the present invention, a coil generating DC magnetic field applied to a magnetic head is divided into two in that a first coil and a second coil, which are provided on a frame shape core. An distance of an air gap is shortened, a slider head is held on a table having a top end portion of thin thickness, while advancing and retreating the table in the direction perpendicular to the core, the head slider is inserted into the air gap from the lateral direction. Thereby, the distance of the air gap is reduced to about half of the conventional one and a reduction of inductance of the first coil and the second coil is realized.

摘要翻译： 在本发明中，施加到磁头的产生直流磁场的线圈被分成两个，即设置在框架形芯上的第一线圈和第二线圈。 气隙的距离缩短，滑块头保持在具有薄的顶端部分的台面上，同时在垂直于芯的方向上前进和后退桌子，头部滑动件插入气隙中 横向。 因此，气隙的距离减小到常规距离的大约一半，并且实现了第一线圈和第二线圈的电感的减小。

公开(公告)号：US5757492A

公开(公告)日：1998-05-26

申请号：US636804

申请日：1996-04-23

申请人： Teruaki Tokutomi ,  Kyoichi Mori ,  Toshinori Sugiyama

发明人： Teruaki Tokutomi ,  Kyoichi Mori ,  Toshinori Sugiyama

IPC分类号： G01B11/14 ,  G01B9/02

CPC分类号： G01B11/14

摘要： The improved for measuring the flying height of a magnetic head comprises a clear disk made of single-crystal sapphire, a spindle on which said disk is mounted for rotation, a mechanism for loading the magnetic head above one surface of said disk, measuring optics having a photoelectric converter that receives the light produced by interference of reflected light from said one surface of said disk with reflected light from the surface of said magnetic head as a result of application of light to said one surface through the other surface of said disk, and which converts the received interference light to an electric signal by means of said photoelectric converter, and a processing unit for calculating the flying height of said magnetic head in response to said electric signal from said measuring optics.

摘要翻译： 用于测量磁头的飞行高度的改进包括由单晶蓝宝石制成的透明盘，其上安装所述盘旋转的主轴，用于将磁头装载在所述盘的一个表面上的机构，测量具有 光电转换器，其通过从所述磁盘的表面向所述一个表面施加光而通过来自所述磁盘的表面的反射光接收来自所述磁盘的所述一个表面的反射光的干扰产生的光;以及 其通过所述光电转换器将接收到的干涉光转换成电信号;以及处理单元，用于响应于来自所述测量光学器件的所述电信号计算所述磁头的飞行高度。