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    Method and device for determining in-process characteristics of fabricated magnetic heads
    11.
    发明授权
    Method and device for determining in-process characteristics of fabricated magnetic heads 失效
    用于确定制造磁头的工艺特性的方法和装置

    公开(公告)号：US06779249B2

    公开(公告)日：2004-08-24

    申请号：US09815906

    申请日：2001-03-23

    申请人： Hugo Alberto Emilio Santini

    发明人： Hugo Alberto Emilio Santini

    IPC分类号： G11B5127

    CPC分类号： G11B5/3173 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/455 ,  Y10T29/49032 ,  Y10T29/49036 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046

    摘要： A method for determining a characteristic of a magnetic head during its fabrication process on the surface of a wafer substrate. The method involves the fabrication of a test magnetic pole artifact in a field area of the substrate surface adjacent to the actual magnetic pole that is being fabricated. A test pole structure is fabricated simultaneously with, and utilizing the same fabrication conditions and parameters as, the actual pole such that the test pole is nearly identical to the actual pole. During a field etch step undertaken in the fabrication of the actual pole, portions of the test pole structure are removed, leaving a test pole artifact on the wafer surface. The test pole artifact can thus be easily measured as an accurate indication of characteristics of the actual magnetic pole that are difficult to measure directly, thereby saving time and expense in the magnetic head fabrication process. This method is particularly suited to determining the width of the base of the P2 pole tip of a magnetic head, where measurement of the base of the actual magnetic head pole tip is made difficult by the presence of the pole tip, and where the test artifact is easily measured because the test pole tip structure has been etched away, leaving only the artifact for measurement.

    摘要翻译： 一种用于在其制造工艺中在晶片衬底的表面上确定磁头的特性的方法。 该方法涉及在正在制造的实际磁极附近的衬底表面的场区域中制造测试磁极伪影。 测试极结构与实际极同时制造并利用与实际极相同的制造条件和参数，使得测试极几乎与实际极相同。 在实际极的制造中进行的场蚀刻步骤期间，测试极结构的部分被去除，在晶片表面上留下测试极伪影。 因此，测试极赝像可以容易地测量为难以直接测量的实际磁极的特性的精确指示，从而节省了磁头制造过程中的时间和费用。 该方法特别适用于确定磁头的P2极尖的基部的宽度，其中通过极尖的存在使实际磁头极尖的基极测量变得困难，并且其中测试伪影 容易测量，因为测试极端部结构已被蚀刻掉，仅留下测量的伪影。

    Method of making a write head with self-aligned pedestal shaped pole tips that are separated by a zero throat height defining layer
    12.
    发明授权
    Method of making a write head with self-aligned pedestal shaped pole tips that are separated by a zero throat height defining layer 失效
    制作具有自动对准基座形极头的写头的方法，其由零喉部高度限定层分开

    公开(公告)号：US06557242B1

    公开(公告)日：2003-05-06

    申请号：US09472409

    申请日：1999-12-27

    申请人： Hugo Alberto Emilio Santini

    发明人： Hugo Alberto Emilio Santini

    IPC分类号： G11B5127

    CPC分类号： G11B5/3116 ,  G11B5/012 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49067

    摘要： A merged magnetic head has a top first pole tip layer and a bottom second pole tip layer which are located entirely between an air bearing surface and a coil layer. A write gap layer separates the pole tip layers from one another at the ABS. A zero throat height (ZTH) defining layer is located adjacent the top gap layer between the pole tip layers and is recessed from the ABS so as to further separate the pole tip layers from one another at a location recessed from the ABS so as to define the zero throat height of the write head where the first and second pole pieces first commence to separate from one another after the ABS. A method of construction, which may be substantially a dry process or substantially a wet process, employs ion milling to form the shapes of the pole tip layers while protecting a bottom first pole piece layer from thinning except for notching of the bottom first pole piece layer adjacent side walls of the top first pole tip layer, the protection being provided by the ZTH defining layer in field regions of the head.

    摘要翻译： 合并磁头具有顶部的第一极尖端层和底部第二极尖端层，其完全位于空气轴承表面和线圈层之间。 写入间隙层在ABS处将极尖层彼此分离。 零喉部高度（ZTH）限定层位于极尖顶层之间的顶部间隙层附近并且从ABS凹入，以便在与ABS凹陷的位置处将极尖层彼此分离，以便限定 写入头的零喉部高度，其中第一和第二极片首先在ABS之后开始彼此分离。 基本上是干法或基本上湿法的构造方法采用离子铣削以形成极尖层的形状，同时保护底部第一极片层免于变薄，除了底部第一极片层的切口 顶部第一极尖端层的相邻侧壁，保护由头部的场区域中的ZTH限定层提供。

    Method of making a write head before read head constructed merged magnetic head with track width and zero throat height defined by first pole tip
    13.
    发明授权
    Method of making a write head before read head constructed merged magnetic head with track width and zero throat height defined by first pole tip 失效
    在读取头之前制作写入头的方法构成了由第一极端限定的轨道宽度和零喉部高度的合并磁头

    公开(公告)号：US06553649B1

    公开(公告)日：2003-04-29

    申请号：US09544006

    申请日：2000-04-06

    申请人： Hugo Alberto Emilio Santini

    发明人： Hugo Alberto Emilio Santini

    IPC分类号： G11B5127

    CPC分类号： G11B5/3967 ,  G11B5/012 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/4886 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052

    摘要： A method makes a merged magnetic head that has an air bearing surface and read and write head portions wherein the write head portion has a pole tip, yoke and back gap regions. A method of making the write head comprises steps of forming first and second pole pieces wherein the first pole piece has a first pole tip and the second pole piece has a second pole tip, forming a gap layer which separates the pole tips in the pole tip region and connecting the first and second pole pieces in the back gap region, forming an insulation stack with a write coil embedded therein between the first and second pole pieces in the yoke region and forming the first pole tip with a width at the air bearing surface that defines a track width of the write head portion. The read head portion is formed on the write head portion with a first shield layer which is a common layer with the second pole piece.

    摘要翻译： 一种方法使得具有空气轴承表面和读写头部的合并磁头，其中写入头部具有极尖，磁轭和后间隙区域。 一种制造写头的方法包括以下步骤：形成第一和第二极片，其中第一极片具有第一极尖，并且第二极片具有第二极尖，形成间隔层，其将极尖中的极尖分开 并且将第一和第二极片连接在后部间隙区域中，在磁轭区域中的第一和第二极靴之间形成具有嵌入其中的写入线圈的绝缘叠层，并且在空气支承表面处形成具有宽度的第一极尖端 其限定写入头部的轨道宽度。 读头部分形成在写头部分上，第一屏蔽层是与第二极片共同的层。

    Scaled write head with high recording density and high data rate
    14.
    发明授权
    Scaled write head with high recording density and high data rate 有权
    具有高记录密度和高数据速率的缩放写头

    公开(公告)号：US06181514B2

    公开(公告)日：2001-01-30

    申请号：US09205476

    申请日：1998-12-04

    申请人： Hugo Alberto Emilio Santini ,  Mason L. Williams, III

    发明人： Hugo Alberto Emilio Santini ,  Mason L. Williams, III

    IPC分类号： G11B5147

    CPC分类号： G11B5/012 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163

    摘要： The present invention provides a scaled down write head which has a high recording density and a high data rate. A significant dimension not scaled down proportionally is the thickness of the write coil layer so as to prevent heating of the head. The thickness of the write coil layer is equal to or greater than the thickness of the second pole piece layer. The insulation stack of the write head employs a nonorganic first insulation layer and only one baked photoresist layer which is a second insulation layer. A third insulation layer of the insulation stack may be provided by an extension of the write gap layer. With a lower stack height and with first and second pole pieces that are thinner, a well-defined second pole tip is constructed without reflective notching. The write gap layer is constructed after the other insulation layers of the insulation stack so as to prevent a reduction of its thickness during construction of the write coil layer. The data rate is increased by decreasing the thicknesses of the first and second pole piece layers which reduced thicknesses are enabled by decreasing the pitch of the write coil layer and moving the write coil layer closer to the ABS.

    摘要翻译： 本发明提供了具有高记录密度和高数据速率的缩小写入头。 成比例缩小的重要尺寸是写入线圈层的厚度，以防止头部的加热。 写入线圈层的厚度等于或大于第二极片层的厚度。 写头的绝缘堆叠采用非有机第一绝缘层，并且只有一个烘烤的光致抗蚀剂层是第二绝缘层。 绝缘堆叠的第三绝缘层可以由写间隙层的延伸部提供。 具有较低的堆叠高度，并且第一和第二极片较薄，明确限定的第二极尖端构造为没有反射性切口。 写间隙层构造在绝缘堆叠的其它绝缘层之后，以防止在写入线圈层的构造期间其厚度的减小。 通过减小第一和第二极片层的厚度来增加数据速率，通过减小写入线圈层的间距并使写入线圈层更靠近ABS来实现减小的厚度。

    Combined read head and write head with non-magnetic electrically conductive layer on upper pole tip thereof
    15.
    发明授权
    Combined read head and write head with non-magnetic electrically conductive layer on upper pole tip thereof 失效
    组合读头和写磁头与上磁极上的非磁性导电层

    公开(公告)号：US6031695A

    公开(公告)日：2000-02-29

    申请号：US924395

    申请日：1997-09-05

    申请人： Richard Hsiao ,  Cherngye Hwang ,  Hugo Alberto Emilio Santini

    发明人： Richard Hsiao ,  Cherngye Hwang ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5/012 ,  G11B5/31 ,  G11B5/39 ,  G11B5/187 ,  G11B5/265

    CPC分类号： G11B5/3967 ,  G11B5/012 ,  G11B5/3133 ,  G11B5/3163

    摘要： A combined read head and write head includes at least one write coil layer embedded in an insulation stack. The insulation stack is sandwiched between first and second pole piece layers that are connected at a back gap. The pole piece layers have first and second pole tips that have edges that form a portion of an air bearing surface. A write gap layer that forms a portion of the air bearing surface is sandwiched between a top surface of the first pole tip and a bottom surface of the second pole tip. A non-magnetic electrically conductive layer on top of the second pole tip forms a portion of the air bearing surface. A magnetoresistive sensor is sandwiched between first and second gap layers, which are sandwiched between first and second shield layers. The second shield layer is a common layer with the first pole piece layer.

    摘要翻译： 组合读头和写头包括嵌入绝缘堆叠中的至少一个写入线圈层。 绝缘堆叠被夹在第一和第二极靴层之间，后端间隔连接。 极片层具有第一和第二极尖，其具有形成空气轴承表面的一部分的边缘。 形成空气轴承表面的一部分的写入间隙层被夹在第一极尖的顶表面和第二极尖的底表面之间。 在第二极尖顶部的非磁性导电层形成空气轴承表面的一部分。 磁阻传感器夹在第一和第二间隙层之间，夹在第一和第二屏蔽层之间。 第二屏蔽层是具有第一极片层的公共层。

    Method of making stabilized MR sensor and flux guide joined by contiguous junction
    16.
    发明授权
    Method of making stabilized MR sensor and flux guide joined by contiguous junction 失效
    制造稳定的MR传感器和通过连接接头连接的助焊剂的方法

    公开(公告)号：US5893981A

    公开(公告)日：1999-04-13

    申请号：US44358

    申请日：1998-03-19

    申请人： Moris Musa Dovek ,  Robert E. Fontana ,  Richard Hsiao ,  Mohamad Towfik Krounbi ,  Hugo Alberto Emilio Santini ,  Virgil Simon Speriosu

    发明人： Moris Musa Dovek ,  Robert E. Fontana ,  Richard Hsiao ,  Mohamad Towfik Krounbi ,  Hugo Alberto Emilio Santini ,  Virgil Simon Speriosu

    IPC分类号： G01R33/09 ,  G03F7/00 ,  G11B5/31 ,  G11B5/39 ,  B44C1/22

    CPC分类号： G11B5/3916 ,  G01R33/09 ,  G03F7/00 ,  G11B5/3903 ,  G11B5/3919 ,  G11B5/3932 ,  G11B5/3163

    摘要： The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous self-aligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.

    摘要翻译： MR传感器和磁通引导件的后端通过连续的自对准结连接，从而可以实现MR传感器后端的磁通引导件的可预测重叠，以优化MR传感器中的信号通量密度。 用于MR传感器的引线/纵向偏置层也通过连接的自对准结连接到通量引导件，用于稳定通量引导件。 通过使用单个剥离抗蚀剂掩模，MR传感器和引导/纵向偏置层可以被图案化，然后沉积助焊剂引导件。 助焊剂是绝缘材料层和助焊剂引导材料层的双层。 绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。 导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

    Method of making a planarized thin film magnetic write head with submicron trackwidth
    17.
    发明授权
    Method of making a planarized thin film magnetic write head with submicron trackwidth 失效
    制造具有亚微米轨道宽度的平面化薄膜磁写头的方法

    公开(公告)号：US5802700A

    公开(公告)日：1998-09-08

    申请号：US469728

    申请日：1995-06-06

    申请人： Mao-Min Chen ,  Kochan Ju ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini

    发明人： Mao-Min Chen ,  Kochan Ju ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5/187 ,  G11B5/23 ,  G11B5/235 ,  G11B5/31 ,  G11B5/147

    CPC分类号： G11B5/3103 ,  G11B5/3116 ,  G11B5/3133 ,  G11B5/3146 ,  G11B5/1872 ,  G11B5/232 ,  G11B5/235 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052

    摘要： A method is provided for making a thin film magnetic write head with a notch structure located on top of one of two pole layers. The notch structure is a generally U-shaped thin film layer which forms a trench inside the U for the containment of one or more pole tip layers in the pole tip region of the head. The notch structure has front surfaces at the tips of the legs of the U which lie in a plane that forms a part of the air bearing surface. The thickness of the notch layer is substantially equal to the thickness or thicknesses of the one or more pole tip layers located in the trench. A method of manufacturing the write head includes forming a very thin photoresist layer for defining the notch structure. The notch structure is well-defined which in turn allows the one or more pole tip layers to be well-defined with a very narrow trackwidth in the trench.

    摘要翻译： 提供了一种用于制造具有位于两个极层之一的顶部上的凹口结构的薄膜磁性写入头的方法。 凹口结构是大致U形的薄膜层，其在U形内部形成沟槽，用于容纳头部的磁极尖端区域中的一个或多个极尖端层。 凹口结构在位于形成空气轴承表面的一部分的平面中的U形腿的顶端具有前表面。 切口层的厚度基本上等于位于沟槽中的一个或多个极尖端层的厚度或厚度。 一种制造写入头的方法包括形成非常薄的光致抗蚀剂层以限定凹口结构。 凹口结构是明确的，这又允许一个或多个极尖端层在沟槽中具有很窄的轨道宽度。

    Thin film induction recording head having an inset first insulation layer that defines zero throat height and pole tip apex angle
    18.
    发明授权
    Thin film induction recording head having an inset first insulation layer that defines zero throat height and pole tip apex angle 失效
    薄膜感应记录头具有插入的第一绝缘层，其限定零喉部高度和极尖顶角

    公开(公告)号：US5793578A

    公开(公告)日：1998-08-11

    申请号：US752012

    申请日：1996-11-15

    申请人： David Eugene Heim ,  Hugo Alberto Emilio Santini

    发明人： David Eugene Heim ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5/23 ,  G11B5/31 ,  G11B5/33 ,  G11B5/39 ,  G11B5/47

    CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/232

    摘要： The present invention uncouples the dependence between the zero throat height and the flare point of a write head by recessing the first insulation layer within the first pole piece layer. The first pole piece layer and the first insulation layer have planar surfaces which preferably lie in a common plane, the zero throat height being defined at the point where the planar surface of the first pole piece layer first meets the planar surface of the first insulation layer within the head. It is also at this point that the first and second pole piece layers separate from one another. Accordingly, the zero throat height can be accurately placed relative to the stripe height of a magneto-resistive (MR) sensor. Further, when a photoresist layer is spun onto the partially completed head for the construction of the pole tip of the second pole piece light directed into the photoresist layer for photo-imaging the pole tip does not reflect into the photoresist layer adjacent the pole tip. Accordingly, there is substantially no reflective notching of the photoresist layer because of the flatness of the surfaces of the first pole piece layer and the first insulation layer thereby permitting construction of a well defined second pole tip.

    摘要翻译： 本发明通过在第一极片层内凹陷第一绝缘层来解耦零喉部高度与写入头的扩张点之间的依赖关系。 第一极片层和第一绝缘层具有优选位于公共平面中的平坦表面，零喉部高度限定在第一极片层的平坦表面首先接触第一绝缘层的平坦表面的点处 在头内。 在这一点上，第一和第二极片层彼此分离。 因此，可以相对于磁阻（MR）传感器的条带高度准确地放置零喉部高度。 此外，当光致抗蚀剂层被旋转到部分完成的头部上用于构造第二极靴的极尖的光引导到用于光成像的光致抗蚀剂层中时，极尖不会反射到邻近极尖的光致抗蚀剂层中。 因此，由于第一极片层和第一绝缘层的表面的平坦度，因此允许构造良好限定的第二极端，因此基本上不存在光致抗蚀剂层的反射性凹陷。