公开(公告)号：US11302560B2

公开(公告)日：2022-04-12

申请号：US17009432

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the third surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US11302559B2

公开(公告)日：2022-04-12

申请号：US17009365

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the fourth surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US11018039B2

公开(公告)日：2021-05-25

申请号：US16352899

申请日：2019-03-14

Applicant: TOTO LTD.

Inventor： Kosuke Yamaguchi ,  Jun Shiraishi ,  Ikuo Itakura ,  Yutaka Momiyama ,  Shuichiro Saigan

IPC: H01L21/683 ,  H01L21/67 ,  H01L21/687

Abstract: According to the embodiment, the electrostatic chuck includes a ceramic dielectric substrate having a first major surface and a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface and being opposite to the gas introduction path. The ceramic dielectric substrate includes a first hole part positioned between the first major surface and the first porous part. At least one of the ceramic dielectric substrate or the first porous part includes a second hole part positioned between the first hole part and the first porous part, and a dimension of the second hole part is smaller than a dimension of the first porous part and larger than a dimension of the first hole part.

公开(公告)号：US20160344041A1

公开(公告)日：2016-11-24

申请号：US15225138

申请日：2016-08-01

Applicant: Toto Ltd.

Inventor： Shigeru Ando ,  Akira Ishiguro ,  Akira Kawakami ,  Megumi Shimazu ,  Yutaka Momiyama ,  Yasuo Kakinuma

IPC: H01M8/0217 ,  H01M4/90

CPC classification number: H01M8/0217 ,  C01F17/0043 ,  C01P2002/52 ,  C01P2002/72 ,  C01P2002/82 ,  C01P2004/82 ,  C01P2006/12 ,  C04B35/50 ,  C04B35/6263 ,  C04B2235/3224 ,  C04B2235/3227 ,  C04B2235/3229 ,  C04B2235/3286 ,  C04B2235/443 ,  C04B2235/5409 ,  H01M4/905 ,  H01M4/9066 ,  H01M8/0202 ,  H01M2008/1293 ,  H01M2300/0071

Abstract: On the other hand, the possibility of estimating the dopant ratio of a metal element to each ceria crystalline particle using integral-width or half-width obtained by XRD was considered as follows: an XRD peak is shifted depending on the dopant ratio of La to ceria; when La increases, an XRD peak is shifted to a lower angle; in XRD performed on a raw material obtained by mixing ceria crystalline particles having different dopant ratio, peaks corresponding to the respective dopant ratio exist close to each other; as a result, a peak width is widened; accordingly, the dopant ratio of a metal element to each ceria crystalline particles are supposed to vary when integral-width and half-width obtained by XRD are large. Thus, it was revealed for the first time that integral-width and half-width obtained by XRD indicate variations in dopant ratio. It should be noted that from the direct proportional relationship between the dopant ratio x and the integral-width for dopant ratio ranging from 0.35 to 0.45, integral-widths obtained by XRD are derived to be 0.10 to 0.30 for dopant ratio ranging from 0.35 to 0.45, and half-widths are derived to be 0.10 to 0.30 similarly.

Abstract translation: 另一方面，使用通过XRD得到的整体宽度或半宽度来估计金属元素与每个二氧化铈晶粒的掺杂比率的可能性被认为如下：XRD峰值根据La的掺杂剂比率而偏移 二氧化铈 当La增加时，XRD峰移动到较低的角度; 在通过混合具有不同掺杂剂比率的二氧化铈晶粒获得的原料进行的XRD中，与各自的掺杂剂比例相对应的峰彼此接近; 结果，峰宽变宽; 因此，当通过XRD获得的整体宽度和半值宽度时，假定金属元素与每种二氧化铈晶体颗粒的掺杂比变化。 因此，首次揭示了通过XRD获得的积分宽度和半值宽度表示掺杂剂比例的变化。 应当注意，从0.35至0.45的掺杂剂比率的掺杂剂比x和积分宽度之间的直接比例关系，通过XRD获得的积分宽度导出为0.35至0.45的掺杂剂比为0.10至0.30 ，并且半宽度类似地导出为0.10至0.30。

公开(公告)号：US08765325B2

公开(公告)日：2014-07-01

申请号：US14026430

申请日：2013-09-13

Applicant: Toto Ltd.

Inventor： Shigeru Ando ,  Seiki Furuya ,  Yutaka Momiyama ,  Kiyoshi Hayama ,  Osamu Okamoto ,  Naoki Watanabe ,  Nobuo Isaka ,  Masaki Sato

IPC: H01M8/10 ,  H01M8/02 ,  H01M8/00 ,  H01M8/12

CPC classification number: H01M8/023 ,  H01M8/004 ,  H01M8/0236 ,  H01M8/1226 ,  H01M8/1253 ,  H01M8/1286 ,  H01M2008/1293 ,  Y02E60/525 ,  Y02P70/56

Abstract: An object of the present invention is to provide a fuel cell preventing formation of a diffusion layer containing Ca and other elements, and having an excellent power generation performance at low temperature by preventing breakdown of a crystal structure of an electrolyte by firing. Disclosed is a solid oxide fuel cell which includes an inner electrode, a solid electrolyte, and an outer electrode, each sequentially laminated on the surface of a porous support. The porous support contains forsterite, and has a Ca element content of 0.2 mass % or less in terms of CaO in a surface region at the inner electrode side.

Abstract translation: 本发明的目的在于提供一种防止含有Ca等元素的扩散层的形成的燃料电池，并且通过烧结来防止电解液的晶体结构的破坏，在低温下具有优异的发电性能。 公开了一种固体氧化物燃料电池，其包括内电极，固体电解质和外电极，各自依次层压在多孔载体的表面上。 多孔质载体含有镁橄榄石，并且在内电极侧的表面区域中，Ca元素含量以CaO计为0.2质量％以下。

公开(公告)号：US10943809B2

公开(公告)日：2021-03-09

申请号：US16825318

申请日：2020-03-20

Applicant: TOTO LTD.

Inventor： Hitoshi Sasaki ,  Yutaka Momiyama

IPC: H01L21/683 ,  B23Q3/15 ,  H01J37/32 ,  C23C16/458 ,  H01L21/3065 ,  H01L21/67 ,  H01L21/687

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first electrode layer. The ceramic dielectric substrate has first and second major surfaces. The first electrode layer is provided inside the ceramic dielectric substrate. The first electrode layer is connected to a high frequency power supply. The first electrode layer has a first surface at the first major surface side and a second surface at a side opposite to the first surface. The first electrode layer includes a first portion including the first surface. The first electrode layer includes a ceramic component and a metal component. A concentration of the metal component in the first portion is higher than an average concentration of the metal component in the first electrode layer.

公开(公告)号：US10923383B2

公开(公告)日：2021-02-16

申请号：US16352904

申请日：2019-03-14

Applicant: TOTO LTD.

Inventor： Takara Katayama ,  Kosuke Yamaguchi ,  Ikuo Itakura ,  Yutaka Momiyama ,  Jun Shiraishi ,  Shuichiro Saigan

IPC: H01L21/683 ,  H01L21/687 ,  H01L21/67 ,  H02N13/00

Abstract: According to the embodiment, an electrostatic chuck includes a ceramic dielectric substrate having a first major surface placing a suction object, a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface of the ceramic dielectric substrate and being opposite to the gas introduction path. The first porous part includes a first region positioned on the ceramic dielectric substrate side. The ceramic dielectric substrate includes a first substrate region positioned on the first region side. The first region and the first substrate region are provided in contact with each other, and an average particle diameter in the first region is different from an average particle diameter in the first substrate region.

公开(公告)号：US10003088B2

公开(公告)日：2018-06-19

申请号：US14869652

申请日：2015-09-29

Applicant: TOTO LTD.

Inventor： Yasuo Kakinuma ,  Osamu Okamoto ,  Shigeru Ando ,  Hironobu Murakami ,  Seiki Furuya ,  Yutaka Momiyama ,  Kiyoshi Hayama ,  Naoki Watanabe ,  Shuhei Tanaka ,  Nobuo Isaka ,  Takuya Hoshiko ,  Masaki Sato

IPC: H01M8/02 ,  H01M8/24 ,  H01M8/12 ,  H01M8/10 ,  H01M8/00 ,  H01M8/0202 ,  H01M8/1246 ,  H01M8/243 ,  H01M8/2465 ,  H01M4/90 ,  H01M8/0217 ,  H01M8/124

CPC classification number: H01M8/0202 ,  H01M4/9033 ,  H01M8/0217 ,  H01M8/1246 ,  H01M8/24 ,  H01M8/243 ,  H01M8/2465 ,  H01M2008/1293 ,  H01M2300/0071

Abstract: A solid oxide fuel cell stack includes a support, a plurality of power generation elements provided on a surface of the support, the plurality of power generation elements connected in series, each including at least a fuel electrode, a solid electrolyte, and an air electrode stacked in that order, and an interconnector that electrically connects an air electrode in one of adjacent power generation elements to a fuel electrode in the other power generation element. A solid electrolyte in adjacent one power generation element is provided between a fuel electrode in the adjacent one power generation element and the fuel electrode in the adjacent other power generation element, and an insulating member is provided at a position that is on the solid electrolyte in the adjacent one power generation element and between the air electrode in the adjacent one power generation element and the solid electrolyte therein.

公开(公告)号：US09461327B2

公开(公告)日：2016-10-04

申请号：US14229164

申请日：2014-03-28

Applicant: TOTO LTD.

Inventor： Shigeru Ando ,  Osamu Okamoto ,  Kiyoshi Hayama ,  Seiki Furuya ,  Yutaka Momiyama ,  Nobuo Isaka ,  Masaki Sato ,  Shuhei Tanaka ,  Takuya Hoshiko ,  Naoki Watanabe ,  Yasuo Kakinuma

IPC: H01M8/12 ,  H01M8/00 ,  H01M8/02

CPC classification number: H01M8/1286 ,  H01M8/004 ,  H01M8/0236 ,  H01M8/0243 ,  H01M8/0245 ,  H01M8/0252 ,  H01M8/1226 ,  H01M8/124 ,  H01M8/1246 ,  H01M2300/0074 ,  Y02E60/521 ,  Y02E60/525 ,  Y02P70/56

Abstract: Disclosed is a solid oxide fuel cell which includes an inner electrode, a solid electrolyte, and an outer electrode, each being sequentially laminated on the surface of a porous support. The porous support contains forsterite, and further has a strontium element concentration of 0.02 mass % to 1 mass % both inclusive in terms of SrO based on the mass of the forsterite.

Abstract translation: 公开了一种固体氧化物燃料电池，其包括内电极，固体电解质和外电极，各自依次层压在多孔载体的表面上。 所述多孔质载体包含镁橄榄石，并且进一步具有基于所述镁橄榄石质量的SrO换算为0.02质量％〜1质量％的锶元素浓度。

公开(公告)号：US08778559B2

公开(公告)日：2014-07-15

申请号：US14026454

申请日：2013-09-13

Applicant: Toto Ltd.

Inventor： Shigeru Ando ,  Seiki Furuya ,  Yutaka Momiyama ,  Kiyoshi Hayama ,  Osamu Okamoto ,  Naoki Watanabe ,  Nobuo Isaka ,  Masaki Sato

IPC: H01M8/10 ,  H01M8/02 ,  H01M8/24 ,  H01M8/12 ,  H01M8/00

CPC classification number: H01M8/023 ,  H01M8/004 ,  H01M8/1226 ,  H01M8/1246 ,  H01M8/243 ,  H01M2008/1293 ,  Y02E60/525 ,  Y02P70/56

Abstract: An object of the present invention is to provide a fuel cell preventing formation of a diffusion layer containing Ca and other elements, and having an excellent power generation performance at low temperature by preventing breakdown of a crystal structure of an electrolyte by firing. Disclosed is a solid oxide fuel cell which includes a fuel electrode, a solid electrolyte, and an air electrode, each being sequentially laminated on the surface of a porous support. The porous support contains forsterite, and further has a calcium element (Ca) content of more than 0.2 mass % but not more than 2 mass % in terms of CaO.

Abstract translation: 本发明的目的在于提供一种防止含有Ca等元素的扩散层的形成的燃料电池，并且通过烧结来防止电解液的晶体结构的破坏，在低温下具有优异的发电性能。 公开了一种固体氧化物燃料电池，其包括燃料电极，固体电解质和空气电极，各自依次层压在多孔载体的表面上。 多孔质载体含有镁橄榄石，并且还具有以CaO计为0.2质量％以上2质量％以下的钙元素（Ca）含量。