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27 条记录 (耗时 0.016 秒)

    Electrostatic chuck
    1.
    发明授权
    Electrostatic chuck 有权

    公开(公告)号：US11557467B2

    公开(公告)日：2023-01-17

    申请号：US17009216

    申请日：2020-09-01

    申请人： TOTO LTD.

    发明人： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

    IPC分类号： H01L21/683 ,  H01T23/00 ,  H01J37/32

    摘要： According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is greater than an average electrical resistance of the first portion.

    Solid oxide fuel cell and manufacturing method and manufacturing apparatus for same
    3.
    发明授权
    Solid oxide fuel cell and manufacturing method and manufacturing apparatus for same 有权
    固体氧化物燃料电池及其制造方法和制造装置

    公开(公告)号：US09543608B2

    公开(公告)日：2017-01-10

    申请号：US14311875

    申请日：2014-06-23

    申请人： TOTO LTD.

    发明人： Nobuo Isaka ,  Naoki Watanabe ,  Shuhei Tanaka ,  Takuya Hoshiko ,  Masaki Sato ,  Osamu Okamoto ,  Shigeru Ando ,  Seiki Furuya ,  Yutaka Momiyama ,  Kiyoshi Hayama

    IPC分类号： H01M8/24 ,  H01M8/12

    CPC分类号： H01M8/12 ,  H01M2008/1293 ,  Y02E60/521 ,  Y02E60/525 ,  Y02P70/56

    摘要： The present invention provides a novel manufacturing method for a solid oxide fuel cell apparatus in which members of the apparatus are joined together with an adhesive, such as a ceramic adhesive. The method implements first and second types of drying and hardening steps. The first type of step may be called a workable hardening step and gives an assembly of members in the solid oxide fuel cell apparatus structural rigidity to go through assembling of the solid oxide fuel cell apparatus. The second type of step may be called a solvent elimination and hardening step and gives the assembled members property to withstand the operation temperature of the solid fuel oxide cell apparatus. The first type of step is performed at a first temperature lower than a second temperature at which the second type of step is performed. The second type of step is performed only after the first type of step is performed at multiple times.

    摘要翻译： 本发明提供了一种固体氧化物燃料电池装置的新型制造方法，其中装置的构件用诸如陶瓷粘合剂的粘合剂接合在一起。 该方法实施第一和第二类干燥和硬化步骤。 第一类型的步骤可以称为可加工的硬化步骤，并且通过固体氧化物燃料电池装置的组装，提供固体氧化物燃料电池装置中的部件的结构刚度的组件。 第二类型的步骤可以被称为消除溶剂和硬化步骤，并且使组装的构件的性能能够承受固体燃料氧化物电池装置的操作温度。 第一类型的步骤在低于执行第二类型步骤的第二温度的第一温度下进行。 第二类型的步骤仅在第一类型的步骤被多次执行之后执行。

    Electrostatic chuck and processing apparatus
    4.
    发明授权
    Electrostatic chuck and processing apparatus 有权

    公开(公告)号：US12100610B2

    公开(公告)日：2024-09-24

    申请号：US17897417

    申请日：2022-08-29

    申请人： TOTO LTD.

    发明人： Yuki Sasaki ,  Jun Shiraishi ,  Yutaka Momiyama ,  Reo Kawano

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6833

    摘要： An electrostatic chuck includes a ceramic dielectric substrate, a base plate, a bonding part, a gas inlet path, a counterbore part, a ceramic porous part, and an elastic body. The base plate supports the ceramic dielectric substrate. The bonding part is located between the ceramic dielectric substrate and the base plate. The gas inlet path extends through the ceramic dielectric substrate, the base plate, and the bonding part. The gas inlet path includes a first hole part, a second hole part and a third hole part. The first hole part is positioned at the ceramic dielectric substrate. The third hole part is positioned at the bonding part. The counterbore part is located in the first hole part. The ceramic porous part is located in the counterbore part. The elastic body faces an end part of the bonding part at the third hole part side.

    Electrostatic chuck
    5.
    发明授权
    Electrostatic chuck 有权

    公开(公告)号：US11410868B2

    公开(公告)日：2022-08-09

    申请号：US17179994

    申请日：2021-02-19

    申请人： TOTO LTD.

    发明人： Masaki Sato ,  Ikuo Itakura ,  Shuichiro Saigan ,  Jun Shiraishi ,  Yutaka Momiyama ,  Kouta Kobayashi

    IPC分类号： H01L21/683

    摘要： An electrostatic chuck includes: an electrically-conductive base plate including a first part, a second part at an outer circumference of the first part, and a gas inlet path for introducing a cooling gas; a first electrostatic chuck part configured to clamp a wafer on the first part, including a ceramic dielectric substrate that includes an embedded first clamping electrode and at least one through-hole communicating with the gas inlet path; and a second electrostatic chuck part configured to clamp a focus ring on the second part, including a ceramic layer that includes at least one through-hole for introducing a cooling gas and that includes at least a first layer contacting the focus ring when the second electrostatic chuck part clamps the focus ring, in which the first layer is less dense than the ceramic dielectric substrate. Thereby, the electrostatic chuck can increase the device yield.

    Solid oxide fuel cell
    7.
    发明授权
    Solid oxide fuel cell 有权
    固体氧化物燃料电池

    公开(公告)号：US09190689B2

    公开(公告)日：2015-11-17

    申请号：US14026401

    申请日：2013-09-13

    申请人： TOTO LTD.

    发明人： Shigeru Ando ,  Seiki Furuya ,  Yutaka Momiyama ,  Kiyoshi Hayama ,  Osamu Okamoto ,  Naoki Watanabe ,  Nobuo Isaka ,  Masaki Sato

    IPC分类号： H01M8/10 ,  H01M8/12 ,  H01M8/00 ,  H01M8/02 ,  H01M8/24

    CPC分类号： H01M8/1286 ,  H01M8/004 ,  H01M8/0206 ,  H01M8/0236 ,  H01M8/0245 ,  H01M8/0258 ,  H01M8/0267 ,  H01M8/0271 ,  H01M8/0297 ,  H01M8/1226 ,  H01M8/243 ,  H01M8/2483 ,  H01M2008/1293 ,  Y02E60/521 ,  Y02E60/525

    摘要： An object of the present invention is to provide a fuel cell preventing formation of a diffusion layer containing Ca and other elements, and having an excellent power generation performance at low temperature by preventing breakdown of a crystal structure of an electrolyte by firing. Disclosed is a solid oxide fuel cell which includes an inner electrode, a solid electrolyte, and an outer electrode, each being sequentially laminated on the surface of a porous support. The porous support contains forsterite, and has a Mg/Si molar ratio of 1.90 to 2.2 both inclusive, and an A-to-B ratio (A/B) of 0.0% to 9.0% both inclusive, where A denotes a maximum peak height which appears at a diffraction angle 2θ=26.5° to 27.0° and B denotes a maximum peak height which appears at 36.5° to 37.0° in a powder X-ray diffraction pattern obtained by using Cu-Kα radiation.

    摘要翻译： 本发明的目的在于提供一种防止含有Ca等元素的扩散层的形成的燃料电池，并且通过烧结来防止电解液的晶体结构的破坏，在低温下具有优异的发电性能。 公开了一种固体氧化物燃料电池，其包括内电极，固体电解质和外电极，各自依次层压在多孔载体的表面上。 多孔载体含有镁橄榄石，Mg / Si摩尔比为1.90〜2.2，A-B比（A / B）为0.0〜9.0％，其中A表示最大峰高 其出现在衍射角2θ= 26.5°至27.0°，B表示在通过使用Cu-Kα辐射获得的粉末X射线衍射图中在36.5°至37.0°处出现的最大峰高。

    Electrostatic chuck including ceramic dielectric substrate
    8.
    发明授权
    Electrostatic chuck including ceramic dielectric substrate 有权

    公开(公告)号：US10943809B2

    公开(公告)日：2021-03-09

    申请号：US16825318

    申请日：2020-03-20

    申请人： TOTO LTD.

    发明人： Hitoshi Sasaki ,  Yutaka Momiyama

    IPC分类号： H01L21/683 ,  B23Q3/15 ,  H01J37/32 ,  C23C16/458 ,  H01L21/3065 ,  H01L21/67 ,  H01L21/687

    摘要： According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first electrode layer. The ceramic dielectric substrate has first and second major surfaces. The first electrode layer is provided inside the ceramic dielectric substrate. The first electrode layer is connected to a high frequency power supply. The first electrode layer has a first surface at the first major surface side and a second surface at a side opposite to the first surface. The first electrode layer includes a first portion including the first surface. The first electrode layer includes a ceramic component and a metal component. A concentration of the metal component in the first portion is higher than an average concentration of the metal component in the first electrode layer.

    Electrostatic chuck
    9.
    发明授权
    Electrostatic chuck 有权

    公开(公告)号：US10923383B2

    公开(公告)日：2021-02-16

    申请号：US16352904

    申请日：2019-03-14

    申请人： TOTO LTD.

    发明人： Takara Katayama ,  Kosuke Yamaguchi ,  Ikuo Itakura ,  Yutaka Momiyama ,  Jun Shiraishi ,  Shuichiro Saigan

    IPC分类号： H01L21/683 ,  H01L21/687 ,  H01L21/67 ,  H02N13/00

    摘要： According to the embodiment, an electrostatic chuck includes a ceramic dielectric substrate having a first major surface placing a suction object, a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface of the ceramic dielectric substrate and being opposite to the gas introduction path. The first porous part includes a first region positioned on the ceramic dielectric substrate side. The ceramic dielectric substrate includes a first substrate region positioned on the first region side. The first region and the first substrate region are provided in contact with each other, and an average particle diameter in the first region is different from an average particle diameter in the first substrate region.