公开(公告)号：US20230380148A1

公开(公告)日：2023-11-23

申请号：US17844076

申请日：2022-06-20

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chun-Hsien Lin ,  Chih-Kai Kang ,  Ting-Hsiang Huang ,  Chien-Liang Wu ,  Sheng-Yuan Hsueh ,  Chi-Horn Pai

IPC: H01L27/112

CPC classification number: H01L27/11206

Abstract: A method for fabricating a semiconductor device includes the steps of first providing a substrate having an one time programmable (OTP) device region, forming a shallow trench isolation (STI) in the substrate, forming a first doped region adjacent to the STI, removing part of the STI, and then forming a first gate structure on the substrate and the STI. Preferably, the first gate structure includes a high-k dielectric layer on the substrate and a gate electrode on the high-k dielectric layer, in which the high-k dielectric layer comprises a first L-shape.

公开(公告)号：US11765891B2

公开(公告)日：2023-09-19

申请号：US17391067

申请日：2021-08-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Sheng-Yuan Hsueh ,  Chun-Hsien Lin ,  Yung-Chen Chiu ,  Chien-Liang Wu ,  Te-Wei Yeh

IPC: H10B20/20 ,  H10B20/25

CPC classification number: H10B20/20 ,  H10B20/25

Abstract: A one-time programmable (OTP) memory cell includes a substrate having a first conductivity type and having an active area surrounded by an isolation region, a transistor disposed on the active area, and a capacitor disposed on the active area and electrically coupled to the transistor. The capacitor comprises a diffusion region of a second conductivity type in the substrate, a metallic film in direct contact with the active area, a capacitor dielectric layer on the metallic film, and a metal gate surrounded by the capacitor dielectric layer. The diffusion region and the metallic film constitute a capacitor bottom plate.

公开(公告)号：US20230100606A1

公开(公告)日：2023-03-30

申请号：US18075396

申请日：2022-12-05

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Lin

IPC: H01L29/66 ,  H01L29/78 ,  H01L29/49 ,  H01L21/02 ,  H01L21/28 ,  H01L21/3213

Abstract: A method for fabricating a semiconductor device includes the steps of: forming a fin-shaped structure on a substrate, forming a gate material layer on the fin-shaped structure, performing an etching process to pattern the gate material layer for forming a gate structure and a silicon residue, performing an ashing process on the silicon residue, and then performing a cleaning process to transform the silicon residue into a polymer stop layer on a top surface and sidewalls of the fin-shaped structure.

公开(公告)号：US20220392905A1

公开(公告)日：2022-12-08

申请号：US17363015

申请日：2021-06-30

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chun-Hsien Lin ,  Chih-Wei Yang ,  Chang-Chien Wong ,  Te-Wei Yeh ,  Sheng-Yuan Hsueh

IPC: H01L27/112

Abstract: A method for fabricating an one time programmable (OTP) device includes the steps of: forming a first gate structure and a second gate structure extending along a first direction on a substrate; forming a diffusion region adjacent to two sides of the first gate structure and the second gate structure; forming a silicide layer adjacent to the first gate structure; and patterning the first gate structure for forming a third gate structure and a fourth gate structure.

公开(公告)号：US20220344358A1

公开(公告)日：2022-10-27

申请号：US17329171

申请日：2021-05-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chun-Hsien Lin ,  Sheng-Yuan Hsueh

IPC: H01L27/112 ,  H01L29/423 ,  H01L27/11

Abstract: A semiconductor device includes a substrate having an input/output (I/O) region, an one time programmable (OTP) capacitor region, and a core region, a first metal gate disposed on the I/O region, a second metal gate disposed on the core region, and a third metal gate disposed on the OTP capacitor region. Preferably, the first metal gate includes a first high-k dielectric layer, the second metal gate includes a second high-k dielectric layer, and the first high-k dielectric layer and the second high-k dielectric layer include an I-shape.

公开(公告)号：US20220223716A1

公开(公告)日：2022-07-14

申请号：US17705416

申请日：2022-03-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： An-Chi Liu ,  Chun-Hsien Lin

IPC: H01L29/66 ,  H01L29/20 ,  H01L29/201 ,  H01L29/40 ,  H01L29/778

Abstract: A high electron mobility transistor (HEMT) includes a buffer layer on a substrate, a barrier layer on the buffer layer, a gate electrode on the barrier layer, a field plate adjacent to two sides of the gate electrode, and a first passivation layer adjacent to two sides of the gate electrode. Preferably, a sidewall of the field plate includes a first curve.

公开(公告)号：US11355639B1

公开(公告)日：2022-06-07

申请号：US17140157

申请日：2021-01-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Shou-Wan Huang ,  Chun-Hsien Lin

IPC: H01L29/78 ,  H01L27/06 ,  H01L27/088 ,  H01L29/66 ,  H01L29/06

Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region and a second region; forming a first fin-shaped structure on the first region; removing part of the first fin-shaped structure to form a first trench; forming a dielectric layer in the first trench to form a double diffusion break (DDB) structure; and forming a first gate structure and a second gate structure on the DDB structure. Preferably, a bottom surface of the first gate structure is lower than a top surface of the first fin-shaped structure.

公开(公告)号：US20220115517A1

公开(公告)日：2022-04-14

申请号：US17088522

申请日：2020-11-03

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Lin

IPC: H01L29/66 ,  H01L29/78 ,  H01L29/49 ,  H01L21/02 ,  H01L21/28 ,  H01L21/3213

Abstract: A method for fabricating a semiconductor device includes the steps of: forming a fin-shaped structure on a substrate, forming a gate material layer on the fin-shaped structure, performing an etching process to pattern the gate material layer for forming a gate structure and a silicon residue, performing an ashing process on the silicon residue, and then performing a cleaning process to transform the silicon residue into a polymer stop layer on a top surface and sidewalls of the fin-shaped structure.

公开(公告)号：US10991875B2

公开(公告)日：2021-04-27

申请号：US16455674

申请日：2019-06-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： An-Chi Liu ,  Chun-Hsien Lin

IPC: H01L43/02 ,  H01L43/10 ,  H01L43/12 ,  H01L27/22 ,  G11C11/16

Abstract: A semiconductor device includes: a substrate having a magnetic tunneling junction (MTJ) region and a logic region; an inter-metal dielectric (IMD) layer on the substrate; a first metal interconnection in the IMD layer on the logic region; and protrusions adjacent to two sides of the first metal interconnection. Preferably, the first metal interconnection further includes a via conductor and a trench conductor and the protrusions includes a first protrusion on one side of the via conductor and a second protrusion on another side of the via conductor.

公开(公告)号：US20210118750A1

公开(公告)日：2021-04-22

申请号：US17134465

申请日：2020-12-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Fu-Jung Chuang ,  Po-Jen Chuang ,  Yu-Ren Wang ,  Chi-Mao Hsu ,  Chia-Ming Kuo ,  Guan-Wei Huang ,  Chun-Hsien Lin

IPC: H01L21/8238 ,  H01L27/092 ,  H01L21/762

Abstract: A method for fabricating semiconductor device includes the steps of first providing a substrate having a fin-shaped structure thereon, forming a single diffusion break (SDB) structure in the substrate to divide the fin-shaped structure into a first portion and a second portion, and then forming more than one gate structures such as a first gate structure and a second gate structure on the SDB structure. Preferably, each of the first gate structure and the second gate structure overlaps the fin-shaped structure and the SDB structure.