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公开(公告)号：US11591686B2
公开(公告)日：2023-02-28
申请号：US17082169
申请日：2020-10-28
Applicant: Universal Display Corporation
Inventor： Gregory McGraw , William E. Quinn , Matthew King , Elliot H. Hartford, Jr. , Siddharth Harikrishna Mohan , Benjamin Swedlove , Gregg Kottas
Abstract: Methods of modulating flow during vapor jet deposition of organic materials are provided. A method may include ejecting a vapor entrained in a delivery gas from a nozzle onto a substrate upon which the vapor condenses. A confinement gas may be provided that has a flow direction opposing a flow direction of the delivery gas ejected from the nozzle. A vacuum source may be provided that is adjacent to a delivery gas aperture of the nozzle. The method may include adjusting, by an actuator, a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target.
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12.发明授权公开(公告)号：US11588140B2
公开(公告)日：2023-02-21
申请号：US16245554
申请日：2019-01-11
Applicant: Universal Display Corporation
Inventor： Gregory McGraw , William E. Quinn , Gregg Kottas , Matthew King , Benjamin Swedlove , Tomasz Trojacki
IPC: C23C16/455 , C23C16/44 , H01L51/56 , H01L51/00
Abstract: Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
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公开(公告)号：US10704144B2
公开(公告)日：2020-07-07
申请号：US15290101
申请日：2016-10-11
Applicant: Universal Display Corporation
Inventor： Gregory McGraw , William E. Quinn , Gregg Kottas , Siddharth Harikrishna Mohan , Matthew King
Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.
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公开(公告)号：US10654272B2
公开(公告)日：2020-05-19
申请号：US16243393
申请日：2019-01-09
Applicant: Universal Display Corporation
Inventor： Gregory McGraw , Matthew King , William E. Quinn
Abstract: Embodiments of the disclosed subject matter provide a micronozzle array formed from monolithic silicon. The micronozzle array may have a plurality of nozzles, where each nozzle of the plurality of nozzles including an integrated plug valve that allows flow from the nozzle to be attenuated separately from each other nozzle of the plurality of nozzles. Each of the plurality of nozzles may include a microchannel, formed from the monolithic silicon, having a first channel portion and a second channel portion, where the first channel portion is narrower than the second channel portion, and where the first channel portion forms an aperture of the nozzle that is configured to eject vapor from the microchannel. Each of the plurality of nozzles may include a stem, formed from the monolithic silicon that includes the integrated plug valve is suspended in the microchannel to attenuate the flow from the nozzle.
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公开(公告)号：US10128468B2
公开(公告)日：2018-11-13
申请号：US15441331
申请日：2017-02-24
Applicant: Universal Display Corporation
Inventor： William E. Quinn , Gregory McGraw , Siddharth Harikrishna Mohan , Matthew King , Elliot H. Hartford, Jr.
CPC classification number: H01L51/56 , B05B12/18 , B05B15/555 , B41J2/1433 , B41J2/162 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2002/14475 , C23C14/12 , C23C14/22 , C23C14/228 , C23C14/24 , H01L51/0004 , H01L51/0005 , H01L51/50
Abstract: Embodiments of the disclosed subject matter provide a nozzle assembly and method of making the same, the nozzle assembly including a first aperture formed on a first aperture plate to eject a carrier gas flow having organic vapor onto a substrate in a deposition chamber, second apertures formed on a second aperture plate disposed adjacent to the first aperture to form a vacuum aperture, where the first aperture plate and the second aperture plate are separated by a first separator plate, third apertures formed on a third aperture plate to eject purge gas that are disposed adjacent to the second aperture plate, where the second aperture plate and the third aperture plate are separated by second separator plate, and a third separator plate is disposed adjacent to the one or more third aperture plates to form a gas channel in the one or more third aperture plates.
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Patent Agency Ranking
公开(公告)号：US12065728B2
公开(公告)日：2024-08-20
申请号：US17854232
申请日：2022-06-30
Applicant: Universal Display Corporation
Inventor： Matthew King , Gregg Kottas , Gregory McGraw , William E. Quinn
IPC: B41J2/14 , B05B1/00 , B05B1/24 , B05B1/28 , B41J2/005 , C23C14/12 , C23C14/24 , H10K71/00 , H10K50/11 , H10K71/18 , H10K101/10
CPC classification number: C23C14/24 , B05B1/005 , B05B1/24 , B05B1/28 , B41J2/005 , B41J2/14 , B41J2/14145 , C23C14/12 , H10K71/00 , H10K50/11 , H10K71/18 , H10K2101/10
Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.
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公开(公告)号：US11751466B2
公开(公告)日：2023-09-05
申请号：US17224240
申请日：2021-04-07
Applicant: Universal Display Corporation
Inventor： Matthew King , Gregg Kottas , Gregory McGraw , William E. Quinn
CPC classification number: H10K71/00 , B41J2/005 , B41J2/14 , B41J2/14145 , H10K71/135 , H10K71/16 , B41J2002/0055
Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.
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公开(公告)号：US11121322B2
公开(公告)日：2021-09-14
申请号：US16689259
申请日：2019-11-20
Applicant: Universal Display Corporation
Inventor： Matthew King , William E. Quinn , Gregory McGraw , Siddharth Harikrishna Mohan , Elliot H. Hartford , Benjamin Swedlove , Gregg Kottas , Tomasz Trojacki , Julia J. Brown
Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.
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公开(公告)号：US11108027B2
公开(公告)日：2021-08-31
申请号：US16245517
申请日：2019-01-11
Applicant: Universal Display Corporation
Inventor： William E. Quinn , Jason Paynter , Gregory McGraw , Matthew King
Abstract: Techniques and devices are provided for attaching a die to a metal manifold. A metal-containing ink is used to deposit a metal trace on the die and thereby to form a gasket, after which the die is compressed against the manifold to form a sealed connection between the two.
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公开(公告)号：US11104988B2
公开(公告)日：2021-08-31
申请号：US16255040
申请日：2019-01-23
Applicant: Universal Display Corporation
Inventor： William E. Quinn , Gregory McGraw , Matthew King , Gregg Kottas
Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.
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