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公开(公告)号：US20060186355A1
公开(公告)日：2006-08-24
申请号：US11347138
申请日：2006-02-03
申请人： Henry Smith , George Barbastathis , Rajesh Menon
发明人： Henry Smith , George Barbastathis , Rajesh Menon
IPC分类号： G21K5/10
CPC分类号： G03F7/70291 , G03F7/70275 , G03F7/70283 , G03F7/70316 , G03F7/70358
摘要： A lithography system includes a source of radiation energy and a zone plate array to focus the radiation energy to create an array of images in order to produce a permanent pattern on a substrate. A phase-shift mask is optically located between the source of radiation energy and the zone plate array. The modulated wavefront produced by the phase-shift mask alters the field diffracted by the zone plate array, and the center lobe of the point-spread function narrows as a result.
摘要翻译： 光刻系统包括辐射能量源和区板阵列，以聚焦辐射能量以产生图像阵列，以便在衬底上产生永久性图案。 相移掩模光学地位于辐射能源和区板阵列之间。 由相移掩模产生的调制波前改变由区域阵列衍射的场，结点是扩散函数的中心波瓣变窄。
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12.发明授权公开(公告)号：US06433911B1
公开(公告)日：2002-08-13
申请号：US09574267
申请日：2000-05-19
IPC分类号： G02B2608
CPC分类号： G02B6/3522 , G02B6/29307 , G02B6/2931 , G02B6/29311 , G02B6/29383 , G02B6/29395 , G02B6/3516 , G02B6/3548 , G02B6/356 , G02B6/4215 , G02B26/02
摘要： A micro-opto-electro-mechanical systems (MOEMS) modulator based on the phenomenon of frustrated total internal reflection (FTIR). The modulator effects amplitude and phase modulation at the boundary of a waveguide. Wavelength-specific switching is achieved by spatially separating the wavelength channels by dispersing a broadband input signal into its wavelength components through a grating. In exemplary embodiments, an array of micro-fabricated actuators is used to switch or modulate wavelengths individually. Applications include wavelength and space-resolved phase and amplitude modulation of optical beams, and re-configurable add/drop switching of dense wavelength-division multiplexed (DWDM) optical communication signals.
摘要翻译： 基于沮丧全内反射（FTIR）现象的微光机电系统（MOEMS）调制器。 调制器在波导的边界处实现幅度和相位调制。 通过通过光栅将宽带输入信号分散到其波长分量中，通过空间分离波长信道来实现波长特定的切换。 在示例性实施例中，微制造致动器的阵列用于单独地切换或调制波长。 应用包括光束的波长和空间分辨相位和幅度调制，以及密集波分复用（DWDM）光通信信号的可重新配置的分插交换。
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公开(公告)号：US5671073A
公开(公告)日：1997-09-23
申请号：US389890
申请日：1995-02-15
IPC分类号： G03H1/26 , G11B7/0065 , G03H1/12 , G11B7/00 , G11C13/04
CPC分类号： G03H1/26 , G11B7/0065 , G03H2001/2675
摘要： The invention is embodied in a method of recording successive holograms in a recording medium, using at least a fan of M waves along at least a first axis with a separation angle between adjacent waves and directing the fan of M waves as a reference beam along a reference beam path onto the recording medium, successively modulating a wave with a succession of images to produce a succession of signal beams along a signal beam path lying at a propagation angle relative to the reference beam path so that the signal and reference beams intersect at a beam intersection lying within the medium, the beam intersection having a size corresponding to beam areas of the reference and signal beams, producing a succession of relative displacements in a direction parallel to the first axis between the recording medium and the beam intersection of the signal and reference beam paths in synchronism with the succession of signal beams, each of the displacements being less than the size of the intersection whereby to record successive holograms partially overlapped along a direction of the displacements.
摘要翻译： 本发明体现在一种在记录介质中记录连续的全息图的方法，至少使用沿着至少第一轴的M波的风扇，并在相邻的波之间具有分隔角，并将M波的风扇作为参考光束沿着 参考光束路径到记录介质上，连续地调制具有一系列图像的波，以沿着相对于参考光束路径传播角度的信号光束路径产生一系列信号光束，使得信号和参考光束在 光束交叉处具有对应于参考和信号光束的光束区域的大小的光束交叉，在平行于第一轴的方向上产生一系列相对位移，该相对位移在记录介质与信号和 参考光束路径与信号光束的连续同步，每个位移小于相交的大小 从而记录连续的全息图沿着位移的方向部分重叠。
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公开(公告)号：US08427630B2
公开(公告)日：2013-04-23
申请号：US12805735
申请日：2010-08-17
CPC分类号： G03F7/70291 , G03F7/70316 , G03F7/70533
摘要： Disclosed herein is a semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus precisely adjusts the position and size of a light spot formed on a substrate, enabling formation of a target pattern or elimination of an unnecessary pattern in an accurate and rapid manner. The semiconductor manufacturing apparatus includes a light source, a light modulator to modulate light irradiated from the light source into a plurality of beams to correspond to a target pattern, a diffraction element to adjust a direction of each of the plurality of beams, and an optics system to allow the plurality of beams, the direction of which has been controlled by the diffraction element, to form a light spot having a target size.
摘要翻译： 这里公开了一种半导体制造装置。 半导体制造装置精确地调整形成在基板上的光点的位置和尺寸，能够以准确且快速的方式形成目标图案或消除不必要的图案。 半导体制造装置包括光源，光调制器，用于将从光源照射的光调制成对应于目标图案的多个光束，用于调整多个光束中的每一个的方向的衍射元件，以及光学器件 系统允许其方向已被衍射元件控制的多个光束形成具有目标尺寸的光点。
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公开(公告)号：US07644489B2
公开(公告)日：2010-01-12
申请号：US11513952
申请日：2006-08-31
IPC分类号： H01F7/06
CPC分类号： B81C1/00007 , B82Y25/00 , B82Y30/00 , H01F1/009 , Y10T29/49075
摘要： A passive nanomagnet alignment method is described to self-align a membrane to another surface. The membrane and the surface each have a plurality of nanomagnets patterned on it, wherein the nanomagnets are magnetized based on an applied external magnetic field. The membrane is brought into close proximity and coarse alignment to the surface by a positioning mechanism (e.g., an actuation force), such that the nanomagnets on the membrane attract to and self-align with the nanomagnets on said surface based on the nanomagnet magnetizations.
摘要翻译： 被动纳米磁体对准方法被描述为将膜自对准到另一表面。 膜和表面各自具有图案化的多个纳米磁体，其中基于所施加的外部磁场来磁化纳米磁体。 通过定位机构（例如，致动力）使膜紧密接近并与表面粗略对准，使得膜上的纳米磁体基于纳米磁体磁化而吸引并与所述表面上的纳米磁体自对准。
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16.发明申请公开(公告)号：US20090168129A1
公开(公告)日：2009-07-02
申请号：US12287702
申请日：2008-10-10
IPC分类号： G03H1/20
CPC分类号： G11C13/042 , G03H1/0406 , G03H1/0465 , G03H1/20 , G03H1/265 , G03H2001/0413 , G03H2001/0415 , G03H2001/0417 , G03H2001/205 , G03H2001/2615 , G03H2223/19 , G11B7/0065 , G11B7/083 , G11B7/1275 , G11B7/28
摘要： An apparatus for replicating holographically recorded data, comprising a holographic master media having holographically recorded data thereon; a holographic copy media; a light source for generating a master reference beam and a copy reference beam, coherent with the first object beam, the first master reference beam incident on the holographic master media, the holographic master media diffracting the master reference beam to provide a first object beam; the copy reference beam incident on the holographic copy media; and a first optical relay system, disposed between the holographic master media and the holographic copy media, for relaying the first object beam from the holographic master media to the holographic copy media, the holographic copy media recording an interference pattern between the first object beam and the copy reference beam, thereby replicating at least a portion of holographically recorded data.
摘要翻译： 一种用于复制全息记录数据的装置，包括在其上具有全息记录数据的全息主介质; 全息复印介质; 用于产生与第一物体光束相关的主参考光束和复制参考光束的光源，入射到全息主介质上的第一主参考光束，衍射主参考光束以提供第一物体光束的全息主介质; 复制参考光束入射到全息复印介质上; 以及第一光学继电器系统，设置在全息主介质和全息复制介质之间，用于将第一物体光束从全息主介质传送到全息复印介质，全息复印介质记录第一物体光束和 复制参考光束，从而复制至少一部分全息记录的数据。
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17.发明授权公开(公告)号：US07453611B2
公开(公告)日：2008-11-18
申请号：US11450158
申请日：2006-06-09
IPC分类号： G03H1/20
CPC分类号： G11C13/042 , G03H1/0406 , G03H1/0465 , G03H1/20 , G03H1/265 , G03H2001/0413 , G03H2001/0415 , G03H2001/0417 , G03H2001/205 , G03H2001/2615 , G03H2223/19 , G11B7/0065 , G11B7/083 , G11B7/1275 , G11B7/28
摘要： An apparatus for replicating holographically recorded data, comprising a holographic master media having holographically recorded data thereon; a holographic copy media; a light source for generating a master reference beam and a copy reference beam, coherent with the first object beam, the first master reference beam incident on the holographic master media, the holographic master media diffracting the master reference beam to provide a first object beam; the copy reference beam incident on the holographic copy media; and a first optical relay system, disposed between the holographic master media and the holographic copy media, for relaying the first object beam from the holographic master media to the holographic copy media, the holographic copy media recording an interference pattern between the first object beam and the copy reference beam, thereby replicating at least a portion of holographically recorded data.
摘要翻译： 一种用于复制全息记录数据的装置，包括在其上具有全息记录数据的全息主介质; 全息复印介质; 用于产生与第一物体光束相关的主参考光束和复制参考光束的光源，入射到全息主介质上的第一主参考光束，衍射主参考光束以提供第一物体光束的全息主介质; 复制参考光束入射到全息复印介质上; 以及第一光学继电器系统，设置在全息主介质和全息复制介质之间，用于将第一物体光束从全息主介质传送到全息复印介质，全息复印介质记录第一物体光束和 复制参考光束，从而复制至少一部分全息记录的数据。
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18.发明授权公开(公告)号：US07262889B2
公开(公告)日：2007-08-28
申请号：US11113544
申请日：2005-04-25
申请人： Wenyang Sun , George Barbastathis
发明人： Wenyang Sun , George Barbastathis
IPC分类号： G02B5/32
CPC分类号： G01J3/1838 , G01J3/2823
摘要： A holographic imaging system is disclosed that includes a spectral electromagnetic field unit for providing a plurality of focal areas of a plurality of wavelengths of electromagnetic fields along a first direction, a lens system for directing the electromagnetic fields having the plurality of wavelengths from an object that may be positioned at least substantially near the plurality of focal areas toward a holographic recording, and a detector surface for receiving electromagnetic fields from the holographic recording.
摘要翻译： 公开了一种全息成像系统，其包括用于沿着第一方向提供多个电磁场波长的多个焦点区域的光谱电磁场单元，用于从具有多个波长的物体引导具有多个波长的电磁场的透镜系统， 可以至少基本上靠近多个聚焦区域朝向全息记录，以及用于从全息记录接收电磁场的检测器表面。
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公开(公告)号：US20070053029A1
公开(公告)日：2007-03-08
申请号：US11450158
申请日：2006-06-09
IPC分类号： G03H1/20
CPC分类号： G11C13/042 , G03H1/0406 , G03H1/0465 , G03H1/20 , G03H1/265 , G03H2001/0413 , G03H2001/0415 , G03H2001/0417 , G03H2001/205 , G03H2001/2615 , G03H2223/19 , G11B7/0065 , G11B7/083 , G11B7/1275 , G11B7/28
摘要： An apparatus for replicating holographically recorded data, comprising a holographic master media having holographically recorded data thereon; a holographic copy media; a light source for generating a master reference beam and a copy reference beam, coherent with the first object beam, the first master reference beam incident on the holographic master media, the holographic master media diffracting the master reference beam to provide a first object beam; the copy reference beam incident on the holographic copy media; and a first optical relay system, disposed between the holographic master media and the holographic copy media, for relaying the first object beam from the holographic master media to the holographic copy media, the holographic copy media recording an interference pattern between the first object beam and the copy reference beam, thereby replicating at least a portion of holographically recorded data.
摘要翻译： 一种用于复制全息记录数据的装置，包括在其上具有全息记录数据的全息主介质; 全息复印介质; 用于产生与第一物体光束相关的主参考光束和复制参考光束的光源，入射到全息主介质上的第一主参考光束，衍射主参考光束以提供第一物体光束的全息主介质; 复制参考光束入射到全息复印介质上; 以及第一光学继电器系统，设置在全息主介质和全息复制介质之间，用于将第一物体光束从全息主介质传送到全息复印介质，全息复印介质记录第一物体光束和 复制参考光束，从而复制至少一部分全息记录的数据。
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公开(公告)号：US20070052045A1
公开(公告)日：2007-03-08
申请号：US11513952
申请日：2006-08-31
IPC分类号： H01L29/82
CPC分类号： B81C1/00007 , B82Y25/00 , B82Y30/00 , H01F1/009 , Y10T29/49075
摘要： A passive nanomagnet alignment method is described to self-align a membrane to another surface. The membrane and the surface each have a plurality of nanomagnets patterned on it, wherein the nanomagnets are magnetized based on an applied external magnetic field. The membrane is brought into close proximity and coarse alignment to the surface by a positioning mechanism (e.g., an actuation force), such that the nanomagnets on the membrane attract to and self-align with the nanomagnets on said surface based on the nanomagnet magnetizations.
摘要翻译： 被动纳米磁体对准方法被描述为将膜自对准到另一表面。 膜和表面各自具有图案化的多个纳米磁体，其中基于所施加的外部磁场来磁化纳米磁体。 通过定位机构（例如，致动力）使膜紧密接近并与表面粗略对准，使得膜上的纳米磁体基于纳米磁体磁化而吸引并与所述表面上的纳米磁体自对准。
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