公开(公告)号：US06638608B1

公开(公告)日：2003-10-28

申请号：US09987570

申请日：2001-11-15

申请人： Jing Gui ,  Michael Stirniman ,  Xiaoding Ma

发明人： Jing Gui ,  Michael Stirniman ,  Xiaoding Ma

IPC分类号： G11B572

CPC分类号： G11B5/72 ,  Y10S427/103 ,  Y10T428/24942 ,  Y10T428/265 ,  Y10T428/30

摘要： A magnetic recording medium comprising a magnetic layer and a protective carbon-containing overcoat comprising a first carbon density, preferably of a low-density carbon, and a second carbon density different from the first carbon density, preferably of a high-density carbon, and a method of making and using the magnetic recording medium are disclosed.

摘要翻译： 一种包含磁性层和保护性含碳外涂层的磁记录介质，其包含优选低密度碳的第一碳密度和不同于第一碳密度的第二碳密度，优选为高密度碳，以及 公开了制造和使用磁记录介质的方法。

公开(公告)号：US20050181238A1

公开(公告)日：2005-08-18

申请号：US10776191

申请日：2004-02-12

申请人： Xiaoding Ma ,  Michael Stirniman ,  Jing Gui

发明人： Xiaoding Ma ,  Michael Stirniman ,  Jing Gui

IPC分类号： C23C14/06 ,  G11B5/72 ,  G11B5/84 ,  C23C16/00 ,  G11B5/64

CPC分类号： G11B5/72 ,  C23C14/0605 ,  G11B5/8408 ,  Y10T428/24975 ,  Y10T428/24983 ,  Y10T428/24992

摘要： A recording medium, comprising: (a) a substrate having at least one surface; (b) a stacked plurality of thin film layers on the at least one surface and including at least one magnetic or magneto-optical (MO) recording layer; and (c) a protective overcoat layer on an outer surface of an outermost layer of the layer stack, comprising: (i) a first sub-layer layer (c1) of undoped tetrahedral amorphous carbon (ta-C) formed by filtered cathodic arc deposition (FCAD) on the outer surface of the outermost layer of the stacked plurality of thin film layers and having a high mass density of carbon (C) atoms greater than about 2.5 gms/cm3; and (ii) a second sub-layer (c2) of nitrogen-doped tetrahedral amorphous carbon (ta-C:N) formed by FCAD on the undoped ta-C layer and having a high mass density of carbon (C) atoms greater than about 2.0 gms/cm3.

摘要翻译： 一种记录介质，包括：（a）具有至少一个表面的基底; （b）在所述至少一个表面上堆叠的多个薄膜层，并且包括至少一个磁光或磁光（MO）记录层; （c）在层叠体的最外层的外表面上的保护性外涂层，包括：（i）未掺杂的四面体无定形碳（ta）的第一子层层（c 1） -C）通过过滤的阴极电弧沉积（FCAD）形成在层叠的多个薄膜层的最外层的外表面上，并且具有大于约2.5gms / cm 2的碳（C）原子的高质量密度， 3 ; 和（ii）由FCAD在未掺杂的Ta-C层上形成并且具有高质量密度的由氮化物掺杂的四面体无定形碳（ta-C：N）的第二子层（c 2 N 2） 的碳（C）原子大于约2.0gms / cm 3。

公开(公告)号：US06656614B1

公开(公告)日：2003-12-02

申请号：US09986085

申请日：2001-11-07

申请人： Xinwei Li ,  Xiaoding Ma ,  Huan Tang ,  Jing Gui

发明人： Xinwei Li ,  Xiaoding Ma ,  Huan Tang ,  Jing Gui

IPC分类号： G11B566

CPC分类号： G11B5/82 ,  G11B5/8404 ,  Y10S428/90

摘要： A method of texturing the surface of a CSS/landing zone of a substrate for a magnetic recording medium, comprising steps of: (a) providing a disk-shaped substrate having a surface; (b) providing a patterned mask in overlying relation to the substrate surface, (c) selectively implanting ions in portions of the surface of the CSS/landing zone exposed by the patterned mask openings, whereby the height of the selectively ion-implanted portions is increased or decreased relative to the height of non-ion-implanted portions of the CSS/landing zone to form bumps or depressions, thereby providing the surface of the CSS/landing zone with a texture for reducing stiction and friction when the medium is used with a low flying height read/write transducer. Embodiments of the invention include hard disk magnetic recording media with textured CSS/landing zones produced by the inventive ion implation methodology.

摘要翻译： 一种纹理化用于磁记录介质的衬底的CSS /着陆区的表面的方法，包括以下步骤：（a）提供具有表面的盘形衬底;（b）提供图案化掩模， 衬底表面，（c）在由图案化掩模开口暴露的CSS /着陆区的表面的部分中选择性地注入离子，由此，选择性离子注入部分的高度相对于非离子注入部分的高度增加或减小， CSS /着陆区的植入部分形成凸起或凹陷，从而为介质与低飞行高度读/写换能器一起使用时提供CSS /着陆区的表面，以减少静摩擦和摩擦。 本发明包括通过本发明的离子注入方法产生的具有纹理CSS /着陆区的硬盘磁记录介质。

公开(公告)号：US20060229217A1

公开(公告)日：2006-10-12

申请号：US11104885

申请日：2005-04-12

申请人： Jianwei Liu ,  Michael Stirniman ,  Huan Tang ,  Jing Gui

发明人： Jianwei Liu ,  Michael Stirniman ,  Huan Tang ,  Jing Gui

IPC分类号： C10M107/48

CPC分类号： C10M107/48 ,  C10M153/00 ,  C10M153/04 ,  C10M2225/00 ,  C10M2225/003 ,  C10N2240/204 ,  G11B5/725 ,  Y10T428/30

摘要： A lubricant for improving the durability and reliability of recording media used in hard drives is disclosed. The lubricant comprises a perfluoropolyether main chain with a first end attached to a hexa(trifluoromethylphenoxy) cyclotriphosphazene, a second end attached to a bonding enhancer for enhancing bonding between the lubricant and a carbon-containing layer. The bonding enhancer of the lubricant can contain multiple hydroxyl, amide groups, 2,3-dihydroxy-1-propoxyl, acetamide, methacrylate, methyl methacrylate and glycidyl ether. Some bonding enhancers such as methacrylate, methyl methacrylate or glycidyl ether, can be further activated with ultraviolet light.

公开(公告)号：US06589676B1

公开(公告)日：2003-07-08

申请号：US09902600

申请日：2001-07-12

申请人： Jing Gui ,  Raj Thangaraj ,  Roger Alan Ristau ,  Samuel Dacke Harkness, IV ,  Gary Clark Rauch

发明人： Jing Gui ,  Raj Thangaraj ,  Roger Alan Ristau ,  Samuel Dacke Harkness, IV ,  Gary Clark Rauch

IPC分类号： G11B566

CPC分类号： C23C14/165 ,  G11B5/66 ,  G11B5/72 ,  G11B5/851 ,  G11B5/855 ,  Y10S428/90 ,  Y10T428/24975 ,  Y10T428/265

摘要： Corrosion resistant magnetic thin film media are fabricated using a CoCr magnetic layer having a stabilized protective chromium oxide film thereon. Stabilization of the protective chromium oxide film is achieved by incorporating a stabilizing element, such as Mo, V, Mn, Nb, Ni or Si, in the magnetic layer, thereby enabling elimination of the protective overcoat, e.g., C-containing protective overcoat, or forming the protective overcoat at a significantly low thickness of less than about 20 Å, e.g., up to about 1 Å. Embodiments include forming a magnetic layer comprising Co and Cr on an underlayer, and then forming a thin magnetic layer containing Co and Cr with the chromium oxide stabilizing element thereon. Embodiments further include introducing the chromium oxide stabilizing element by diffusion or ion implantation into a sputter deposited Co—Cr magnetic alloy layer.

摘要翻译： 使用其上具有稳定的保护性氧化铬膜的CoCr磁性层制造耐腐蚀磁性薄膜介质。 保护性氧化铬膜的稳定化是通过在磁性层中并入稳定元素如Mo，V，Mn，Nb，Ni或Si而实现的，由此能够消除保护性外涂层，例如含C的保护性外涂层， 或形成保护性外涂层，其厚度小于约20埃，例如至多约。 实施例包括在底层上形成包含Co和Cr的磁性层，然后在其上形成含有Co和Cr的薄的磁性层与氧化铬稳定元件。 实施例还包括通过扩散或离子注入将氧化铬稳定化元件引入溅射沉积的Co-Cr磁性合金层。

公开(公告)号：US06878418B2

公开(公告)日：2005-04-12

申请号：US10402070

申请日：2003-03-27

申请人： Xiaoding Ma ,  Michael Joseph Stirniman ,  Jing Gui

发明人： Xiaoding Ma ,  Michael Joseph Stirniman ,  Jing Gui

IPC分类号： C08F2/46 ,  C23C14/02 ,  C23C14/12 ,  G11B5/84 ,  C23C16/04 ,  C08J7/18 ,  C23C16/02 ,  C23C16/48

CPC分类号： C23C14/12 ,  C23C14/022 ,  G11B5/8408

摘要： A system and method for improving the durability and reliability of recording media used in hard drives is disclosed. A protective overcoat made by depositing a diamond like carbon (DLC) layer over a magnetic layer and then depleting a portion of the DLC protective layer of hydrogen before it is coated with a Perfluoropolyethers (PFPE) using an in-situ vapor lubrication technique. The portion of the DLC layer which is depleted can be data zone of the media so that the lubricant-bonding ratio is higher for the landing zone than it is for the data zone.

公开(公告)号：US06312798B1

公开(公告)日：2001-11-06

申请号：US09400187

申请日：1999-09-21

申请人： Xiaoding Ma ,  Kevin J. Grannen ,  Jing Gui ,  Jeffrey A. McCann ,  Mark A. Shows

发明人： Xiaoding Ma ,  Kevin J. Grannen ,  Jing Gui ,  Jeffrey A. McCann ,  Mark A. Shows

IPC分类号： G11B572

CPC分类号： G11B5/72 ,  Y10T428/265 ,  Y10T428/30

摘要： Ion beam-deposited, nitrogen-doped C:H films having substantially lower resistivities than undoped ion beam-deposited C:H films and suitable for use as hard, abrasion-resistant overcoat layers for magnetic recording media, such as hard disks, are formed by supplying a mixture of hydrocarbon and nitrogen gases to an ion beam generator. Nitrogen atom content of the films is controlled to within from about 5 to about 25 at. % by appropriate selection of the ratio of hydrocarbon gas flow to nitrogen gas flow. The resultant IBD i-C:HN films exhibit a reduced tendency for charge build-up thereon during hard disk operation by virtue of their lower resistivity vis-à-vis conventional a-C:H materials.

摘要翻译： 离子束沉积的氮掺杂的C：H膜具有比未掺杂的离子束沉积的C：H膜具有显着更低的电阻率，并且适合用作硬记录介质（例如硬盘）的硬的，耐磨损的外涂层 通过向离子束发生器提供烃和氮气的混合物。 将膜的氮原子含量控制在约5至约25at。 通过适当选择碳氢化合物气体流量与氮气流量的比例来确定。 所得到的IBD i-C：HN膜在硬盘操作期间由于其相对于常规a-C：H材料的较低电阻率而在其上积累电荷降低的倾向。

公开(公告)号：US20100092802A1

公开(公告)日：2010-04-15

申请号：US12252022

申请日：2008-10-15

申请人： Xiaoding Ma ,  Jing Gui ,  Michael Joseph Stirniman ,  Thomas Nolan

发明人： Xiaoding Ma ,  Jing Gui ,  Michael Joseph Stirniman ,  Thomas Nolan

IPC分类号： G11B5/62 ,  C23F1/02

CPC分类号： C23F4/00 ,  G11B5/65 ,  G11B5/66 ,  G11B5/84

摘要： A method of forming a granular magnetic recording medium comprises etching a cap layer disposed on a granular magnetic recording layer. The etching process is carried out at a varying ion energy, including a first ion energy and a lower subsequent second energy. A device including the etched cap layer is also disclosed.

摘要翻译： 形成粒状磁记录介质的方法包括蚀刻设置在粒状磁记录层上的盖层。 蚀刻工艺在变化的离子能量下进行，包括第一离子能量和较低的随后的第二能量。 还公开了包括蚀刻盖层的装置。

公开(公告)号：US20080050521A1

公开(公告)日：2008-02-28

申请号：US11508843

申请日：2006-08-24

申请人： Xiaoding Ma ,  Michael J. Stimiman ,  Jing Gui

发明人： Xiaoding Ma ,  Michael J. Stimiman ,  Jing Gui

IPC分类号： C23C16/00

CPC分类号： C23C14/12 ,  G11B5/8408

摘要： A vapor source for depositing a thin film of polymeric lubricant on a magnetic or MO recording medium comprises an enclosure comprised of at least one thermally conductive material and including a back wall and a front wall spaced apart by at least one sidewall thereby defining a chamber with an interior space, the front wall comprising a plurality of openings forming a vapor diffusion plate with an array of vapor orifices; at least one liquid reservoir within the interior space for containing a vaporizable liquid material; a heater for heating the interior space and forming a vapor of the liquid material; and a shutter device for controlling flow of vapor through the orifices of the vapor diffusion plate, thereby reducing lubricant consumption.

摘要翻译： 用于在磁性或MO记录介质上沉积聚合物润滑剂的薄膜的蒸汽源包括由至少一种导热材料组成的外壳，并且包括后壁和由至少一个侧壁隔开的前壁，从​​而限定具有 内部空间，前壁包括形成具有蒸气孔阵列的蒸气扩散板的多个开口; 在内部空间内的至少一个液体储存器，用于容纳可蒸发的液体材料; 用于加热内部空间并形成液体材料的蒸气的加热器; 以及用于控制通过蒸气扩散板的孔口的蒸汽流动的快门装置，从而减少润滑剂消耗。

公开(公告)号：US06392244B1

公开(公告)日：2002-05-21

申请号：US09376495

申请日：1999-08-18

申请人： Kevin J. Grannen ,  Xiaoding Ma ,  Jing Gui

发明人： Kevin J. Grannen ,  Xiaoding Ma ,  Jing Gui

IPC分类号： H05H124

CPC分类号： C23C14/221 ,  C23C14/0605

摘要： Stable operation of an ion beam deposition (IBD) station forming part of a multi-station apparatus and formation therein of a tribologically robust DLC-type i-C:H ultra-thin protective overcoat for high recording density magnetic media are achieved by pulsing (i.e., limiting) the flow of a hydrocarbon source gas to the ion beam source to deposition intervals between substrate transfer/pressure cycling. Embodiments include utilizing a circularly-shaped, closed drift, end Hall type ion beam source as part of a multi-process station apparatus, wherein undesirable arcing of the ion beam source during substrate transfer is eliminated, or at least substantially reduced, as a result of the pulsed supply of hydrocarbon source gas to the ion beam source.

摘要翻译： 形成多工位装置的一部分的离子束沉积（IBD）站的稳定操作，并且在其中形成用于高记录密度磁介质的摩擦学稳健的DLC型iC：H超薄保护外涂层通过脉冲（即， 限制）烃源气体到离子束源的流动到衬底转移/压力循环之间的沉积间隔。 实施例包括利用圆形封闭漂移端霍尔型离子束源作为多处理站装置的一部分，其中在衬底传送期间不期望的离子束源的电弧消除或至少大大减少 将烃源气体脉冲供应给离子束源。