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公开(公告)号：US06422069B1
公开(公告)日：2002-07-23
申请号：US09526148
申请日：2000-03-15
IPC分类号： G01B528
CPC分类号： G01Q10/045 , G01Q20/04 , Y10S977/873
摘要： A scanning probe apparatus and a self-exciting cantilever probe therefor are provided for measuring a characteristic of a sample by scanning a lever of the probe across the sample surface. The probe has a deflectable lever extending from a base and formed integrally therewith, and a resistive body provided on the lever to excite the lever in response to a periodic bias signal applied to the resistive body. In addition, the resistive body has a resistance value that varies in response to deflection of the lever so that the resistance of the resistive body may be monitored to detect deflection of the lever.
摘要翻译： 提供扫描探针装置和自激式悬臂探针，用于通过将探针的杆扫过样品表面来测量样品的特性。 探针具有从基座延伸并与其一体形成的可偏转杆，以及设置在杠杆上的电阻体，以响应于施加到电阻体的周期性偏置信号来激励杠杆。 此外，电阻体具有响应于杠杆的偏转而变化的电阻值，使得可以监视电阻体的电阻以检测杠杆的偏转。
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公开(公告)号：US07337656B2
公开(公告)日：2008-03-04
申请号：US11230904
申请日：2005-09-20
CPC分类号： G01Q70/16 , G01N23/00 , G01N23/225 , G01Q70/06 , G01Q70/12 , G01R3/00 , Y10T29/49007
摘要： In order to establish processing techniques capable of making multi-tip probes with sub-micron intervals and provide such microscopic multi-tip probes, there is provided an outermost surface analysis apparatus for semiconductor devices etc. provided with a function for enabling positioning to be performed in such a manner that there is no influence on measurement in electrical measurements at an extremely small region using this microscopic multi-tip probe, and there are provided the steps of making a cantilever 1 formed with a plurality of electrodes 3 using lithographic techniques, and forming microscopic electrodes 6 minute in pitch by sputtering or gas-assisted etching a distal end of the cantilever 1 using a focused charged particle beam or using CVD.
摘要翻译： 为了建立能够制造具有亚微米间隔的多尖端探针并提供这种微观多尖头探针的加工技术，提供了一种用于半导体器件等的最外表面分析装置，其具有使得能够进行定位的功能 使用这种显微多头探针在极小区域的电测量中对测量没有影响，并且提供了使用光刻技术制造形成有多个电极3的悬臂1的步骤，以及 通过溅射或使用聚焦的带电粒子束或使用CVD气化辅助蚀刻悬臂1的远端来形成6分钟的间距的微观电极。
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公开(公告)号：US06667467B2
公开(公告)日：2003-12-23
申请号：US09803862
申请日：2001-03-12
申请人： Nobuhiro Shimizu , Hiroshi Takahashi , Yoshiharu Shirakawabe , Jurgen P. Brugger , Walter Häberle , Gerd K. Binnig , Peter Vettiger
发明人： Nobuhiro Shimizu , Hiroshi Takahashi , Yoshiharu Shirakawabe , Jurgen P. Brugger , Walter Häberle , Gerd K. Binnig , Peter Vettiger
IPC分类号： G02B2740
CPC分类号： G01Q20/04 , G01Q60/38 , Y10S977/874
摘要： The present invention provides a microprobe capable of simplifying constitution, capable of promoting measurement accuracy of sample face and capable of dispensing with alignment adjustment at each measurement and a scanning type probe apparatus using thereof. The present invention includes a low resolution cantilever portion supported by a support portion and integrally formed with heater laminating portions, heater portions formed at the heater laminating portions, piezoresistive elements provided at bending portions and a movable portion having a low resolution stylus and a high resolution cantilever portion supported by the support portion and integrally formed with piezoresistive elements provided at the bending portions and a movable portion having a high resolution stylus.
摘要翻译： 本发明提供了一种能够简化结构的微探针，能够提高样品面的测量精度并能够在每次测量时分配对准调整和使用其的扫描型探针装置。本发明包括一个低分辨率悬臂部分， 支撑部分和加热器层压部分一体形成，形成在加热器层压部分的加热器部分，设置在弯曲部分处的压阻元件和具有低分辨率触针的可移动部分和由支撑部分支撑并且一体形成压阻的高分辨率悬臂部分 设置在弯曲部分的元件和具有高分辨率触针的可移动部分。
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14.发明授权Correlation sample for scanning probe microscope and method of processing the correlation sample 失效扫描探针显微镜相关样品及相关样品处理方法公开(公告)号：US06405583B1
公开(公告)日：2002-06-18
申请号：US09296081
申请日：1999-04-21
IPC分类号： G01B528
CPC分类号： G01Q40/02
摘要： A correlation sample of scanning probe microscope enable to detect correctly each force performing as a standard without influence of irregular data of surface of the sample. Photo-resist film is applied on surface of a silicon substrate, and the resist mask is patterned. Hollow portions having vertical wall face are formed at the silicon substrate by carrying out anisotropic etching using the resist mask for etching mask. After that, metal is deposited from upper side of resist mask by deposition method, the metal upper than the resist mask by lift off process is removed, and a correlation sample in which the metal is buried in the hollow portions of the silicon substrate is formed. Surface of the sample can be flattened by coating DLC film on surface of the correlation sample.
摘要翻译： 扫描探针显微镜的相关样本能够正确地检测作为标准执行的每个力而不影响样品表面的不规则数据。 将光刻胶膜施加在硅衬底的表面上，并对抗蚀剂掩模进行图案化。 通过使用蚀刻掩模用抗蚀剂掩模进行各向异性蚀刻，在硅基板上形成具有垂直壁面的中空部分。 之后，通过沉积法从抗蚀剂掩模的上侧沉积金属，去除通过剥离处理而比抗蚀剂掩模上方的金属，并且形成金属被埋在硅衬底的中空部分中的相关样品 。 样品的表面可以通过在相关样品的表面上涂覆DLC膜而变平。
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公开(公告)号：US06383823B1
公开(公告)日：2002-05-07
申请号：US09328139
申请日：1999-06-08
IPC分类号： H01L3126
CPC分类号： G01Q60/30 , G01Q20/04 , G01Q60/38 , Y10S977/873
摘要： To provide an SPM probe comprising an SPM probe having a piezoresistor and enable to measure surface voltage of a sample. An SPM probe forming a piezoresistor 20 has conductivity covering metal film 22 on a tip surface 12, and conductive layer 24 is wired from the metal film 22 so as to be one side of an electrode. By that, it is possible to measure interaction between the sample surface by detecting bending quantity of the SPM probe by the piezoresistor and the tip, and to measure voltage of the sample surface without using a detector needing complicated adjustment.
摘要翻译： 提供一种包括具有压敏电阻的SPM探针的SPM探针，并且能够测量样品的表面电压。 形成压电电阻20的SPM探针具有覆盖在前表面12上的金属膜22的导电性，导电层24从金属膜22配线成电极的一侧。 由此，可以通过利用压敏电阻和尖端检测SPM探针的弯曲量来测量样品表面之间的相互作用，并且可以在不使用需要复杂调节的检测器的情况下测量样品表面的电压。
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公开(公告)号：US20070278405A1
公开(公告)日：2007-12-06
申请号：US11809014
申请日：2007-05-30
IPC分类号： G01N23/00
CPC分类号： G01Q70/16 , G01N23/00 , G01N23/225 , G01Q70/06 , G01Q70/12 , G01R3/00 , Y10T29/49007
摘要： In order to establish processing techniques capable of making multi-tip probes with sub-micron intervals and provide such microscopic multi-tip probes, there is provided an outermost surface analysis apparatus for semiconductor devices etc. provided with a function for enabling positioning to be performed in such a manner that there is no influence on measurement in electrical measurements, at an extremely small region using this microscopic multi-tip probe, and there are provided the steps of making a cantilever 1 formed with a plurality of electrodes 3 using lithographic techniques, and forming microscopic electrodes 6 minute in pitch by sputtering or gas-assisted etching a distal end of the cantilever 1 using a focused charged particle beam or using CVD.
摘要翻译： 为了建立能够制造具有亚微米间隔的多尖端探针并提供这种微观多尖头探针的加工技术，提供了一种用于半导体器件等的最外表面分析装置，其具有使得能够进行定位的功能 以这样的方式，在使用这种微型多尖头探针的极小区域上对电测量中的测量没有影响，并且提供了使用光刻技术制造形成有多个电极3的悬臂1的步骤， 并通过溅射或使用聚焦的带电粒子束或使用CVD气化辅助蚀刻悬臂1的远端来形成间隔6分钟的微观电极。
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17.发明授权Scanning probe microscope, and semiconductor distortion sensor for use therein 失效扫描探针显微镜和半导体失真传感器用于其中
公开(公告)号：US6049115A
公开(公告)日：2000-04-11
申请号：US842845
申请日：1997-04-17
CPC分类号： G01Q20/04 , B82Y35/00 , G01B7/18 , G01Q60/38 , Y10S977/873
摘要： A semiconductor distortion sensor comprises a flexible cantilever having a free end portion and a fixed end portion. A p-type region and an n-type region define a pn junction formed in a preselected region of the cantilever where stress-caused distortion occurs due to flexure of the cantilever upon displacement of the free end portion of the cantilever. When the free end portion of the cantilever is subjected to displacement, the cantilever is flexed and the amount of displacement of the free end portion of the cantilever is detected on the basis of a change in an electrical characteristic of the pn junction.
摘要翻译： 半导体失真传感器包括具有自由端部和固定端部的柔性悬臂。 p型区域和n型区域限定形成在悬臂的预选区域中的pn结，其中由于在悬臂的自由端部分移位时由于悬臂的挠曲而发生应力引起的变形。 当悬臂的自由端部进行位移时，基于pn结的电气特性的变化来检测悬臂，并且检测悬臂的自由端部的位移量。
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公开(公告)号：US09496979B2
公开(公告)日：2016-11-15
申请号：US14236419
申请日：2012-08-02
CPC分类号： H04J14/02 , H04J14/0212 , H04J14/0213 , H04J14/0217 , H04Q11/0005 , H04Q2011/0016 , H04Q2011/0024 , H04Q2011/0035 , H04Q2011/0052
摘要： Disclosed is a spatial switching apparatus having a plurality of input terminals, an input optical signal of a single wavelength being input to each of the plurality of the input terminals, and a plurality of output terminals an output optical signal of a single wavelength being output from each of the plurality of the output terminals. The apparatus includes a signal wavelength converting portion having an electric signal converting element converting the input optical signal into an electric signal and a variable wavelength laser, the signal wavelength converting portion using the variable wavelength laser to convert an electric signal converted by the electric signal converting element into an optical signal of an arbitrary wavelength; and a spatial switching portion having a plurality of first cyclic AWGs performing output from a plurality of output ports corresponding to wavelengths of a plurality of input signals input from the variable wavelength laser.
摘要翻译： 公开了一种空间切换装置，具有多个输入端子，单个波长的输入光信号输入到多个输入端子中的每一个，多个输出端子输出单个波长的输出光信号， 多个输出端子中的每一个。 该装置包括信号波长转换部分，其具有将输入光信号转换为电信号的电信号转换元件和可变波长激光器，信号波长转换部分使用可变波长激光器转换由电信号转换转换的电信号 元素变成任意波长的光信号; 以及具有多个第一循环AWG的空间切换部分，其执行从与所述可变波长激光器输入的多个输入信号的波长对应的多个输出端口的输出。
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公开(公告)号：US09129793B2
公开(公告)日：2015-09-08
申请号：US13397346
申请日：2012-02-15
CPC分类号： H01J61/54 , H01J61/547
摘要： A high pressure discharge lamp with auxiliary lamp comprises: a high pressure discharge lamp having an arc tube and at least one sealing portion, a pair of main electrodes, and a pair of feeders supplying power to the main electrodes; an auxiliary lamp having an airtight case, an inner electrode, and an outer electrode, wherein the inner electrode is arranged at a position so as to part the inner space to large and small spaces, the outer electrode is arranged at a position so as to face the large space, the auxiliary lamp as arranged as the large space faces the sealing portion.
摘要翻译： 具有辅助灯的高压放电灯包括：具有电弧管和至少一个密封部分的一个高压放电灯，一对主电极和向主电极供电的一对馈电器; 具有气密壳体，内部电极和外部电极的辅助灯，其中，所述内部电极布置在将所述内部空间分成大小空间的位置，所述外部电极被布置在 面对大空间，辅助灯排列成大空间面向密封部分。
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公开(公告)号：US09067285B2
公开(公告)日：2015-06-30
申请号：US13228571
申请日：2011-09-09
申请人： Yoshitake Ota , Hiroshi Takahashi
发明人： Yoshitake Ota , Hiroshi Takahashi
CPC分类号： B23P19/06 , B23P19/006 , B25B23/04 , B25B23/08
摘要： In an automatic screw tightening apparatus, a feed head unit is movable to and from close contact with a driver bit portion. The driver bit portion contacts the screw and sucks the head portion of the screw in close contact. The feed head unit includes a longitudinal groove opened to the outside and connected to a vertically extending screw feed hole. Only a thread portion of the screw is capable of horizontally advancing and retreating in the longitudinal groove.
摘要翻译： 在自动螺丝紧固装置中，进给头单元可移动到与驱动器钻头部分紧密接触的位置。 螺丝刀钻头部分接触螺钉，并紧密接触螺丝头部。 进给头单元包括向外部开口并连接到垂直延伸的螺钉进给孔的纵向槽。 只有螺杆的螺纹部分能够在纵向槽中水平前进和后退。
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