Piezoelectric MEMS switch and method of fabricating the same
    13.
    发明授权
    Piezoelectric MEMS switch and method of fabricating the same 有权
    压电MEMS开关及其制造方法

    公开(公告)号:US07545246B2

    公开(公告)日:2009-06-09

    申请号:US11515717

    申请日:2006-09-06

    IPC分类号: H01H51/22

    摘要: A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

    摘要翻译: 一种压电微电子机械系统(MEMS)开关包括基板,第一和第二固定信号线,其在基板上以彼此间隔开的关系对称地形成,以在其间具有预定的间隙;压电致动器,其布置成与第一 并且所述第二固定信号线处于所述预定间隙中,并且具有支撑在所述基板上的第一端,以允许所述压电致动器能够上下移动;以及可移动信号线,其具有连接到所述第一和第二 固定信号线,以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端,可移动信号线的至少一侧连接到压电致动器的上表面。

    Piezoelectric RF MEMS device and method of fabricating the same
    14.
    发明授权
    Piezoelectric RF MEMS device and method of fabricating the same 失效
    压电RF MEMS器件及其制造方法

    公开(公告)号:US07545081B2

    公开(公告)日:2009-06-09

    申请号:US11594813

    申请日:2006-11-09

    IPC分类号: H01L41/08

    摘要: A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

    摘要翻译: 提供了一种压电RF微机电系统(MEMS)器件及其制造方法,其中基于压电效应,RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括:设置有RF输出信号线的上基板,位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板,使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开,其中压电致动器在其上设置有RF输入信号线,并且提供接触焊盘以将RF输出信号线与RF输入信号线连接, 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板,提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板,以及组装上基板和 下基板。

    Method of fabricating micro-needle array
    15.
    发明授权
    Method of fabricating micro-needle array 失效
    微针阵列制作方法

    公开(公告)号:US07456112B2

    公开(公告)日:2008-11-25

    申请号:US11327463

    申请日:2006-01-09

    申请人: Chang-seung Lee

    发明人: Chang-seung Lee

    IPC分类号: H01L21/302

    摘要: A method of fabricating a micro-needle array is provided. The method of fabricating a micro-needle array having a substrate having a first surface and a second surface spaced in a predetermined interval apart from the first surface, includes patterning on the first surface, thereby forming a shape of micro-needle bodies. Further, micro-passageways are formed that penetrate the first surface of the substrate from the second surface by a porous silicon process, and integrates the micro-passageways, thereby forming the bodies and channels of micro-needles.

    摘要翻译: 提供一种制造微针阵列的方法。 制造具有第一表面和与第一表面隔开预定间隔的第二表面的基底的微针阵列的方法包括在第一表面上的图案化,从而形成微针体的形状。 此外,通过多孔硅工艺形成从第二表面穿透基板的第一表面的微通道,并且将微通道整合,从而形成微针的主体和通道。

    Method of fabricating black matrix of a color filter
    16.
    发明授权
    Method of fabricating black matrix of a color filter 有权
    制造滤色片黑矩阵的方法

    公开(公告)号:US07371487B2

    公开(公告)日:2008-05-13

    申请号:US11505018

    申请日:2006-08-16

    IPC分类号: G02B5/20

    摘要: A method of fabricating a black matrix of a color filter is provided. In the method, a black matrix layer formed of a hydrophobic organic material is formed on an upper surface of a transparent substrate. A black matrix is formed by patterning the black matrix layer. Side surfaces of the black matrix are made hydrophilic by irradiating a lower surface of the transparent substrate with ultraviolet rays while heating the black matrix. A black matrix provided by the method is also disclosed.

    摘要翻译: 提供一种制造滤色器的黑矩阵的方法。 在该方法中,在透明基板的上表面上形成由疏水性有机材料形成的黑矩阵层。 通过构图黑矩阵层形成黑矩阵。 通过在加热黑色矩阵的同时用紫外线照射透明基板的下表面,使黑色矩阵的侧表面变得亲水。 还公开了由该方法提供的黑矩阵。

    ORGANIC ELECTRO-LUMINESCENT DISPLAY AND METHOD OF MANUFACTURING THE SAME
    17.
    发明申请
    ORGANIC ELECTRO-LUMINESCENT DISPLAY AND METHOD OF MANUFACTURING THE SAME 审中-公开
    有机电致发光显示器及其制造方法

    公开(公告)号:US20080106189A1

    公开(公告)日:2008-05-08

    申请号:US11780084

    申请日:2007-07-19

    CPC分类号: H01L27/3283

    摘要: An organic electro-luminescent display (“OELD”) and a method of manufacturing the OELD include: a substrate; a plurality of anodes substantially parallel with one another in a first direction and disposed on the substrate; a plurality of cathodes disposed substantially parallel with one another in a second direction orthogonal to the plurality of anodes; organic electro-luminescent parts disposed at intersections between the anodes and the cathodes; and cathode separators disposed between the cathodes. Upper portions of the cathode separators are wider than lower portions of the cathode separators; and protrusions protrude from sides of the upper portions of the cathode separators.

    摘要翻译: 有机电致发光显示器(“OELD”)和制造OELD的方法包括:基板; 多个阳极,在第一方向上彼此基本平行并且设置在所述基板上; 在与所述多个阳极正交的第二方向上彼此大致平行地设置的多个阴极; 设置在阳极和阴极之间的交叉处的有机电致发光部件; 和设置在阴极之间的阴极分离器。 阴极隔板的上部比阴极隔板的下部更宽; 并且突起从阴极隔板的上部的侧面突出。

    Method of manufacturing a monolithic ink-jet printhead
    18.
    发明授权
    Method of manufacturing a monolithic ink-jet printhead 有权
    制造单片喷墨打印头的方法

    公开(公告)号:US07334335B2

    公开(公告)日:2008-02-26

    申请号:US11647396

    申请日:2006-12-29

    IPC分类号: B21D53/76 G01D15/00 B41J2/05

    摘要: A monolithic ink-jet printhead, and a method of manufacturing the same, includes a substrate having an ink chamber, an ink channel, and a manifold, a nozzle plate formed on the substrate, a nozzle, a heater, and a conductor. The ink chamber includes sidewalls formed to a predetermined depth from the front surface of the substrate for defining side surfaces of the ink chamber and a bottom wall formed parallel to the front surface of the substrate at the predetermined depth from the front surface of the substrate for defining a bottom surface of the ink chamber. The nozzle plate includes a plurality of passivation layers, a heat dissipating layer being stacked on the passivation layers, and the nozzle for ejecting ink out of the printhead. The heater is positioned above the ink chamber and heats ink in the ink chamber and the conductor delivers a current to the heater.

    摘要翻译: 单片式喷墨打印头及其制造方法包括具有墨水室,墨水通道和歧管的基板,形成在基板上的喷嘴板,喷嘴,加热器和导体。 墨水室包括从衬底的前表面形成到预定深度的侧壁,用于限定墨水室的侧表面,以及在距衬底的前表面预定深度处平行于衬底前表面形成的底壁, 限定墨水室的底表面。 喷嘴板包括多个钝化层,堆叠在钝化层上的散热层和用于将墨从喷墨头喷出的喷嘴。 加热器位于墨水室上方,并且加热墨水室中的墨水,并且导体将电流输送到加热器。

    PIEZOELECTRIC INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME
    19.
    发明申请
    PIEZOELECTRIC INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 失效
    压电喷墨印刷机及其制造方法

    公开(公告)号:US20070171260A1

    公开(公告)日:2007-07-26

    申请号:US11468954

    申请日:2006-08-31

    IPC分类号: B41J2/045

    摘要: A piezoelectric inkjet printhead including an upper substrate formed of a single crystal silicon substrate or an SOI substrate and having an ink inlet therethrough, and a lower substrate formed of an SOI substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer in which a manifold, pressure chambers, and dampers are formed in the second silicon layer by wet or dry etching, and nozzles are formed through the intervening oxide layer and the first silicon layer by dry etching, and a method of manufacturing the same.

    摘要翻译: 一种压电喷墨打印头,包括由单晶硅衬底或SOI衬底形成的上衬底,并且具有墨入口,以及由具有第一硅层的顺序层叠结构的SOI衬底形成的下衬底,中间氧化物层 以及通过湿法或干蚀刻在第二硅层中形成歧管,压力室和阻尼器的第二硅层,并且通过干法蚀刻形成穿过中间氧化物层和第一硅层的喷嘴,以及方法 的制造相同。