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公开(公告)号：US12216068B2
公开(公告)日：2025-02-04
申请号：US18413637
申请日：2024-01-16
Applicant: FEI Company
Inventor： Alexander Henstra , Yuchen Deng , Holger Kohr
Abstract: Methods for using a single electron microscope system for investigating a sample with twin electron beams having different focal lengths include the steps of emitting electrons toward the sample, forming the electrons into a two beams, and then modifying the focal properties of at least one of the two beams such that they have different focal planes. Once the two beams have different focal planes, the first electron beam is focused at the sample, and the second electron beam is focused so that it acts as a TEM beam that is parallel beam when incident on the sample. Emissions resultant from the first electron beam and the TEM beam being incident on the sample can then be detected by a single detector or detector array and used to generate a TEM image.
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公开(公告)号：US12211295B2
公开(公告)日：2025-01-28
申请号：US17564106
申请日：2021-12-28
Applicant: FEI Company
Inventor： Darius Koĉár
Abstract: A scanning microscope system configured for material analysis and mineralogy comprising a first detector and a second detector, and a data-processing system comprising a data-storage component and a segmentation component. The data-storage component is configured for providing image(s) of a sample based on first emissions from a plurality of first scan locations. The segmentation component is configured for determining at least one or a plurality of second scan locations for at least one or a plurality of region(s) of the at least one image. The second detector is configured for detecting second emissions from at least one of the second scan locations of at least one of the regions. The system is further configured for determining the second scan location(s) for the region(s) and detecting the second emissions from the at least one of the second scan locations of the at least one of the regions in parallel.
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公开(公告)号：US20250029809A1
公开(公告)日：2025-01-23
申请号：US18357056
申请日：2023-07-21
Applicant: FEI Company
Inventor： Galen GLEDHILL , Alexander HENSTRA
IPC: H01J37/22 , H01J37/09 , H01J37/147 , H01J37/15 , H01J37/28
Abstract: Elongated or other non-circular charged-particle beams (CPBs) are used to produce substrate images that can be processed such as by deconvolution to produce a final image. In some cases, first and second images associated with an asymmetric CPB beams aligned along parallel axes are deconvolved and then combined to produce the final image or combined and then deconvolved to produce the final image. Milling or other processing can be performed by aligning an asymmetric CPB with respect to a CPB scan or processing direction.
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公开(公告)号：US12183537B2
公开(公告)日：2024-12-31
申请号：US18059585
申请日：2022-11-29
Applicant: FEI Company
Inventor： Edwin Verschueren , Paul Tacx
Abstract: A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.
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公开(公告)号：US20240429018A1
公开(公告)日：2024-12-26
申请号：US18828805
申请日：2024-09-09
Applicant: FEI Company
Inventor： Garrett BUDNIK , Chengge JIAO , Mostafa MAAZOUZ , Suzanna OFFICER , Galen GLEDHILL , Chad RUE
IPC: H01J37/147 , H01J37/26
Abstract: Methods and systems for imaging a sample with a charged particle microscope comprises after scanning a region of interest (ROI) of a sample with an electron beam and acquiring X-rays emitted from the sample, scanning the ROI with an ion beam and acquiring ion-induced photons emitted from the sample. A spatial distribution of multiple elements in the sample may be determined based on both the acquired X-rays and the acquired ion-induced photons.
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Patent Agency Ranking
公开(公告)号：US20240402103A1
公开(公告)日：2024-12-05
申请号：US18664184
申请日：2024-05-14
Applicant: FEI COMPANY
Inventor： Erik Michiel Franken , Trond K. Varslot , Bart Jozef Janssen
IPC: G01N23/2251 , G06T11/00
Abstract: A method of three-dimensional (3D) tomography comprising: providing a sample comprising an elongate section, the elongation of which defines an elongation axis having an axis length; acquiring a plurality of two-dimensional (2D) composite images of the elongate section along its axis length, each 2D composite image being generated from a respective series of image frames and comprising a projection of the elongate section that is parallel to the elongation axis, wherein each 2D composite image is acquired at a different respective angle of rotation of the sample, relative to an initial orientation of the sample, about a rotation axis that is substantially coincident with the elongation axis; and combining the plurality of projection images to obtain a 3D tomographic representation of the elongate section of the sample.
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公开(公告)号：US12154757B2
公开(公告)日：2024-11-26
申请号：US17750569
申请日：2022-05-23
Applicant: FEI COMPANY
Inventor： Jeremy Graham
IPC: H01J37/304 , H01J37/141 , H01J37/147 , H01J37/21 , H01J37/26 , H01J37/28 , H01J37/05
Abstract: Disclosed herein are scientific instrument support systems, as well as related methods, apparatus, computing devices, and computer-readable media. For example, some embodiments provide a scientific instrument comprising an ion-beam instrument configured to generate an ion beam including first and second sub-beams; an electron-beam instrument including a charged-particle-beam (CPB) lens having an adjustable setting controlling a magnetic force applied to the first and second sub-beams; and a computing device. The computing device is configured to: acquire an image by causing the ion-beam instrument to scan the ion beam across a sample using a selected setting of the CPB lens of the electron-beam instrument, apply automated image processing to the image to quantify an amount of spatial misalignment of the first and second sub-beams at the sample, and control the CPB lens of the electron-beam instrument to a setting based on the amount of spatial misalignment within the image.
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公开(公告)号：US20240385238A1
公开(公告)日：2024-11-21
申请号：US18320882
申请日：2023-05-19
Applicant: FEI Company
Inventor： Shyam Sundar Aswadha Narayanan
Abstract: Techniques for detecting contact of a probe on a surface are described. A computer-implemented method for detecting nanoscale contact of a probe tip on a surface includes positioning a probe tip at a first displacement relative to a sample surface, the sample surface exposing one or more nanostructures. The method can include displacing the probe tip toward the sample surface. The method can include generating response data for the probe tip based at least in part on one or more electrical properties of the probe tip. The method can also include detecting a contact between the sample surface and the probe tip using the response data.
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公开(公告)号：US20240347314A1
公开(公告)日：2024-10-17
申请号：US18299635
申请日：2023-04-12
Applicant: FEI Company
Inventor： Peter Christiaan Tiemeijer , Sorin Lazar , Bert Henning Freitag , Paolo Longo
IPC: H01J37/244
CPC classification number: H01J37/244 , H01J2237/1514 , H01J2237/1523 , H01J2237/24485 , H01J2237/2826
Abstract: Systems, devices, methods, and techniques for energy-loss spectroscopy at relatively large energy losses are described. A charged particle microscope system can include a beam column section. The beam column section can include one or more charged particle optical elements calibrated for a first energy and one or more charged particle optical elements calibrated for a second energy. The charged particle microscope system can include a detector section. The detector section can be disposed at a position downstream of the beam column section. The detector section can include an electrostatic or magnetic prism and one or more charged particle optical elements calibrated for the second energy. The first energy and the second energy can be different.
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公开(公告)号：US12117406B2
公开(公告)日：2024-10-15
申请号：US17770495
申请日：2020-11-09
Applicant: VG System Limited , FEI Company
Inventor： Bryan Barnard , Pavel Stejskal
IPC: G01N23/2273
CPC classification number: G01N23/2273 , G01N2223/07 , G01N2223/501
Abstract: A method and apparatus for detection of charged particles in spectroscopy. Charged particles, received from an energy dispersive spectroscopic analyser as a charged particle beam, are accelerated towards a detector. The accelerated charged particles are received at an array of detecting pixels, the array of detecting pixels forming the detector. The charged particles arriving at the detector have a spread in the energy dispersive direction.
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