公开(公告)号：US11942316B2

公开(公告)日：2024-03-26

申请号：US17311264

申请日：2019-12-06

Applicant: Scienta Omicron AB

Inventor： Peter Amann ,  Anders Nilsson

IPC: H01J49/06 ,  H01J37/08

CPC classification number: H01J49/067 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/188 ,  H01J2237/2855

Abstract: An aperture device (31) is described, which is attachable to a lens system (13). The lens system (13) is arranged to form a particle beam of charged particles, emitted from a sample surface (Ss). The aperture device (31) comprises an end surface (S) which is to be arranged facing the sample surface (Ss), at least one aperture (38) arranged in the end surface (S), a length axis (32) which extends through the centre of said at least one aperture (38), and at least one gas outlet (10), which is arranged at a transverse distance (T) perpendicular from the length axis (32), and is arranged to direct gas into a volume between at least one aperture (38) and the sample surface (Ss). The end surface (S) within a distance, equal to ⅓ of the transverse distance (T), perpendicular from the length axis (32) has a variation along the length axis (32) being smaller than ⅙ of the transverse distance (T).

公开(公告)号：US11002694B2

公开(公告)日：2021-05-11

申请号：US16588374

申请日：2019-09-30

Applicant: Scienta Omicron AB

Inventor： Tomas Wiell ,  Cristopher Liljenberg ,  Pål Palmgren

IPC: G01N23/00 ,  G01N23/2273 ,  H01J37/21 ,  H01J37/256

Abstract: The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray source providing a beam of photons which is directed through the system so as to excite electrons from an illuminated sample. An X-ray tube is connected to a monochromator vacuum chamber in which a crystal is configured to monochromatize and focus the beam onto an illuminated sample. A hemispherical electron energy analyser is mounted onto the analysis chamber. An air gap is provided between the X-ray tube and the monochromator chamber, which air gap is provided with a first radiation trap to shield the ambient air from the radiation when the air gap is illuminated with X-rays from the source.

公开(公告)号：US20210010960A1

公开(公告)日：2021-01-14

申请号：US16506168

申请日：2019-07-09

Applicant: Scienta Omicron AB

Inventor： Tomas WIELL ,  Christopher LILJENBERG ,  Pål PALMGREN

IPC: G01N23/2273 ,  H01J35/06 ,  G21K1/06 ,  H01J49/06 ,  H01J49/44

Abstract: The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray tube, an X-ray monochromator, and a sample. The X-ray tube provides a beam of photons, which via the X-ray monochromator is directed through the system so as to excite electrons from the illuminated sample. The X-ray tube is connected to a monochromator vacuum chamber in which the X-ray monochromator is configured to monochromatize and focus the beam onto the sample. The monochromator vacuum chamber is connected to an analysis vacuum chamber, the illuminated sample being mounted inside the analysis vacuum chamber and the analysis vacuum chamber being connected to an electron energy analyser. The electron energy analyser is mounted onto the analysis vacuum chamber.
Further, the beam of photons provided from the X-ray tube is divergent and has an energy above 6 keV. The X-ray monochromator also comprises a curved optical element arranged to both monochromatize and focus the diverging beam of photons.