PRESSURE SENSOR HAVING MULTIPLE PRESSURE CELLS AND SENSITIVITY ESTIMATION METHODOLOGY

    公开(公告)号:US20150090052A1

    公开(公告)日:2015-04-02

    申请号:US14043556

    申请日:2013-10-01

    Abstract: A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36).However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).

    VIBRATION AND DYNAMIC ACCELERATION SENSING USING CAPACITORS
    13.
    发明申请
    VIBRATION AND DYNAMIC ACCELERATION SENSING USING CAPACITORS 有权
    使用电容器的振动和动态加速感应

    公开(公告)号:US20150053023A1

    公开(公告)日:2015-02-26

    申请号:US14136145

    申请日:2013-12-20

    Inventor: Kai Gossner

    CPC classification number: G01L1/148 G01C19/5719 G01P15/125 H01G5/38

    Abstract: The present disclosure relates to an apparatus comprising at least one sensing capacitor and a controller, wherein the controller is configured to receive a signal from the at least one sensing capacitor indicative of a change of charge of the sensing capacitor, and wherein the controller is configured to determine an amount of force applied to the sensing capacitor, an acceleration of the sensing capacitor, a torsion of the sensing capacitor, a vibration of the sensing capacitor or a pulling force applied to the sensing capacitor based on the change of charge of the at least one sensing capacitor.

    Abstract translation: 本公开涉及包括至少一个感测电容器和控制器的装置,其中所述控制器被配置为从所述至少一个感测电容器接收指示感测电容器的电荷变化的信号,并且其中所述控制器被配置 以确定施加到感测电容器的力的大小,感测电容器的加速度,感测电容器的扭矩,感测电容器的振动或施加到感测电容器的拉力,基于该电容器的电荷变化 至少一个感测电容器。

    CAPACITIVE PRESSURE SENSOR AND A METHOD OF FABRICATING THE SAME
    14.
    发明申请
    CAPACITIVE PRESSURE SENSOR AND A METHOD OF FABRICATING THE SAME 审中-公开
    电容式压力传感器及其制造方法

    公开(公告)号:US20140374858A1

    公开(公告)日:2014-12-25

    申请号:US14376447

    申请日:2012-12-17

    Abstract: The invention discloses a capacitive pressure sensor and a method of fabricating the same. The capacitive pressure sensor includes a fixed plate configured as a back plate, a movable plate configured as diaphragm for sensing pressure, wherein a cavity is formed between the fixed plate and the movable plate, an isolation layer between the fixed plate and the movable plate and electrical contacts thereof for minimizing the leakage current, plurality of damping holes for configuring the contour of the fixed plate as the deflected diaphragm when pressure is exerted, a vent hole extending to the cavity having resistive air path for providing equilibrium to the diaphragm and an extended back chamber for increasing the sensitivity of the capacitive pressure sensor. The capacitive pressure sensor is also configured for minimizing parasitic capacitance.

    Abstract translation: 本发明公开了一种电容式压力传感器及其制造方法。 电容式压力传感器包括构成为背板的固定板,被构造为用于感测压力的隔膜的可动板,其中在固定板和可动板之间形成空腔,在固定板和可动板之间形成隔离层, 用于使泄漏电流最小化的电触头,用于在施加压力时将作为偏转隔膜的固定板的轮廓构成的多个阻尼孔,延伸到具有用于为隔膜提供平衡的电阻空气路径的空腔的通气孔和延伸的 后室,用于增加电容式压力传感器的灵敏度。 电容式压力传感器也被配置为最小化寄生电容。

    POSITION INDICATOR OF ELECTROMAGNETIC INDUCTION SYSTEM AND ELECTRONIC INK CARTRIDGE
    15.
    发明申请
    POSITION INDICATOR OF ELECTROMAGNETIC INDUCTION SYSTEM AND ELECTRONIC INK CARTRIDGE 有权
    电磁感应系统和电子墨盒的位置指示器

    公开(公告)号:US20140069532A1

    公开(公告)日:2014-03-13

    申请号:US13924381

    申请日:2013-06-21

    Inventor: Masayuki Obata

    Abstract: An electronic ink cartridge includes, in a direction of a central axis within a cylindrical body, a core body extended out from a distal end of the cylindrical body, a coupling member disposed on a side of a proximal end of the cylindrical body, a coil housed between the core body and the coupling member and having a predetermined inductance, and a pressure sensitive element whose capacitance changes according to pressure applied to the core body. Two terminals of the coil are electrically connected respectively to two terminals of the pressure sensitive element to thereby form two terminals of a resonance circuit formed by the coil and the pressure sensitive element. A connecting terminal electrically connected to at least one of the two terminals of the resonance circuit is disposed on a proximal end surface side of the coupling member to be accessible thereon from outside.

    Abstract translation: 一种电子墨盒,在圆柱体内的中心轴方向上包括从圆柱体的远端延伸的芯体,设置在圆柱体的近端一侧的耦合构件,线圈 容纳在芯体和耦合构件之间并且具有预定的电感,以及其电容根据施加到芯体的压力而变化的压敏元件。 线圈的两个端子分别电连接到压敏元件的两个端子,从而形成由线圈和压敏元件形成的谐振电路的两个端子。 电连接到谐振电路的两个端子中的至少一个端子的连接端子设置在耦合构件的近端表面侧上,以便从外部接近。

    Capacitive pressure sensor with a cantilever member
    16.
    发明授权
    Capacitive pressure sensor with a cantilever member 失效
    具有悬臂构件的电容式压力传感器

    公开(公告)号:US07478559B2

    公开(公告)日:2009-01-20

    申请号:US10581782

    申请日:2004-12-03

    CPC classification number: G01L9/0073 G01F23/18 G01L1/148

    Abstract: A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm member and supported on a support structure, wherein the base member and the cantilever member form a capacitor structure of the device and wherein deflection of the diaphragm member beyond a threshold value causes the cantilever member to deflect to cause a capacitive change in the capacitor structure.

    Abstract translation: 一种电容式压力感测装置,包括:基座构件,在外部压力下可偏转的隔膜构件;悬臂构件,设置在所述基座构件和所述隔膜构件之间并支撑在支撑结构上,其中所述基座构件和所述悬臂构件形成电容器 该装置的结构,并且其中隔膜部件的偏转超过阈值导致悬臂部件偏转以引起电容器结构中的电容变化。

    Micro-electromechanical sensor
    17.
    发明授权
    Micro-electromechanical sensor 有权
    微机电传感器

    公开(公告)号:US07305890B2

    公开(公告)日:2007-12-11

    申请号:US11329765

    申请日:2006-01-10

    CPC classification number: G01L1/148 G01L9/0073

    Abstract: A force or pressure transducer is includes a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on both the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and another portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured through associated circuitry.

    Abstract translation: 力或压力传感器包括衬底,设置在衬底上的电介质材料,设置在电介质材料上的间隔构件和设置在电介质材料和间隔构件两者上的弹性元件。 弹性元件的一部分与电介质材料分离,弹性元件的另一部分与电介质材料接触。 弹性元件和电介质材料之间的接触面积随弹性元件的移动而变化。 接触区域的变化会改变传感器的电容,可以通过相关的电路测量。

    NON-CONTACT RF STRAIN SENSOR
    18.
    发明申请
    NON-CONTACT RF STRAIN SENSOR 审中-公开
    非接触式RF应变传感器

    公开(公告)号:US20070186677A1

    公开(公告)日:2007-08-16

    申请号:US11674835

    申请日:2007-02-14

    CPC classification number: G01L1/148 G01M5/0041 G01M5/0091 G01N2203/0629

    Abstract: A passive, non-contact radio frequency (RF) strain sensor changes resonant frequency as it is deformed. The sensor's resonant frequency can be determined by monitoring the signals transmitted and/or reflected therefrom upon illumination of the sensor by a known RF signal source. The sensor can be implemented using thin film techniques on a flexible thin substrate that can be attached to the surface of a structural member of interest.

    Abstract translation: 无源,非接触射频(RF)应变传感器在谐振频率变形时改变谐振频率。 传感器的谐振频率可以通过在通过已知的RF信号源照射传感器时监测从其发送和/或反射的信号来确定。 传感器可以使用薄膜技术在柔性薄基底上实现,该柔性薄基底可以连接到感兴趣的结构构件的表面。

Patent Agency Ranking