公开(公告)号：US20060226355A1

公开(公告)日：2006-10-12

申请号：US11375063

申请日：2006-03-15

Applicant: Fumio Watanabe ,  Reiki Watanabe

Inventor： Fumio Watanabe ,  Reiki Watanabe

IPC: H01J49/28

CPC classification number: H01J49/147 ,  H01J41/10 ,  H01J49/4215

Abstract: In a quadrupole mass spectrometer which measures partial pressure strength according to a gas type in a vacuum system from ion current intensity, a quadrupole mass spectrometer with a total pressure measurement electrode has a total pressure measurement electrode for examining an ion density disposed in a demarcation space which is comprised of a grid electrode and an ion focusing electrode. And, a vacuum system is provided with only the quadrupole mass spectrometer which measures partial pressure strength according to a gas type in the vacuum system from an ion current intensity and does not have an ionization vacuum gauge other than the quadrupole mass spectrometer.

Abstract translation: 在根据离子电流强度根据真空系统中的气体类型测量分压强度的四极杆质谱仪中，具有总压力测量电极的四极质谱仪具有用于检查设置在分界空间中的离子密度的总压力测量电极 其由栅电极和离子聚焦电极组成。 并且，仅具有四极质谱仪的真空系统，该四极质谱仪根据离子电流强度根据真空系统中的气体类型测量分压强度，并且除四极质谱仪之外不具有电离真空计。

公开(公告)号：US20050199805A1

公开(公告)日：2005-09-15

申请号：US10798376

申请日：2004-03-12

Applicant: Carl Freidhoff

Inventor： Carl Freidhoff

IPC: H01J49/28

CPC classification number: H01J41/10 ,  H01J49/0013 ,  H01J49/288

Abstract: A solid state compact ion gauge includes an inlet, a gas ionizer, and a detector all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed in the cavity through which the cavity is evacuated by differential pumping. Preferably, the substrate is formed in two halves. The substrate halves are then bonded together after the components are provided therein.

Abstract translation: 固态紧凑型离子计包括入口，气体离子发生器和全部形成在半导体衬底中的空腔内的检测器。 气体离子发生器可以是固态电子发射器，其离子光学器件由形成在空腔中的电极提供，空腔通过差分泵浦而被抽空。 优选地，衬底形成为两半。 然后在其中提供部件之后将基板半部结合在一起。

公开(公告)号：US5889281A

公开(公告)日：1999-03-30

申请号：US891695

申请日：1997-07-11

Applicant: David H. Holkeboer ,  Robert E. Ellefson

Inventor： David H. Holkeboer ,  Robert E. Ellefson

IPC: G01N27/62 ,  H01J49/02 ,  H01J49/26 ,  H01J49/42 ,  H01J49/40

CPC classification number: H01J49/0027 ,  G01L21/30 ,  H01J41/10 ,  H01J49/02 ,  H01J49/42

Abstract: A method for linearizing the sensitivity of a quadrupole mass spectrometric system to allow the sensor to more accurately report partial pressures of a gas in high pressure areas in which the reported data is effected by a number of loss mechanisms. According to the invention, correction factors can be applied empirically or software in a quadrupole mass analyzer system can be equipped with correcting software to expand the useful range of the mass spectrometer.

公开(公告)号：US5808308A

公开(公告)日：1998-09-15

申请号：US863818

申请日：1997-05-27

Applicant: David H. Holkeboer

Inventor： David H. Holkeboer

IPC: H01J41/10 ,  H01J49/10 ,  H01J49/12 ,  H01J39/34

CPC classification number: H01J49/10 ,  H01J41/10

Abstract: A dual beam ion source comprises an ion volume in an ion chamber, an ion collector, and two identical ion accelerators. One ion accelerator accelerates a first, "test" ion stream from the ion volume in a first direction and directs it to the ion collector where it can be directly measured. The second ion accelerator accelerates a second, "utilizable" ion stream from the ion volume in a second direction. By directly measuring the ion current (caused by the first, "test" ion stream) at the ion collector, either or both the total ion pressure of the gas within the ion volume, and the magnitude of the second, "utilizable" ion stream, can be calculated.

Abstract translation: 双束离子源包括离子室中的离子体积，离子收集器和两个相同的离子加速器。 一个离子加速器从第一方向从离子体积加速第一个“测试”离子流，并将其引导到离子收集器，直接测量离子收集器。 第二离子加速器在第二方向从离子体积加速第二个“可利用的”离子流。 通过直接测量离子收集器处的离子电流（由第一个“测试”离子流引起的离子流），离子体积内的气体的总离子压力和第二个“可利用的”离子流的大小 ，可以计算。

公开(公告)号：US4535236A

公开(公告)日：1985-08-13

申请号：US582789

申请日：1984-02-23

Applicant: Jonathan H. Batey

Inventor： Jonathan H. Batey

IPC: H01J49/42

CPC classification number: H01J41/10 ,  H01J49/4215

Abstract: This invention relates to a method of operating quadrupole mass spectrometers with only an RF potential applied to the filter rods so that the spectrometer operates to pass all ions above a particular value of m/e. In practice, spectrometers operated in this way usually show a marked loss in transmission efficiency for ions of high m/e when operated with an RF potential low enough to pass ions of m/e

Abstract translation: 本发明涉及一种操作四极质谱仪的方法，其中仅将RF电势施加到过滤棒上，使得光谱仪操作以使所有离子超过m / e的特定值。 在实践中，以这种方式操作的光谱仪通常显示出高的m / e的离子的传输效率的显着损失，当RF电势足够低以使m / e <10的离子流动时，本发明通过提供 在两个或更多个值之间切换RF电位的方法，在该值处，不同范围的m / e值的离子被有效地传输，并且在每个值处组合输出信号，以使得所得到的信号更准确地与形成在 光谱仪的来源，无论其m / e值如何。 本发明可用于提高使用常规残留气体分析质谱仪的总压力测量的精度，从而消除了对附加压力计的需要。