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    IDT electroded piezoelectric diaphragms
    2.
    发明申请
    IDT electroded piezoelectric diaphragms 有权
    IDT电磁压电隔膜

    公开(公告)号：US20060186761A1

    公开(公告)日：2006-08-24

    申请号：US10996604

    申请日：2004-11-26

    Applicant: Susan Trolier-McKinstry ,  Eunki Hong ,  Carl Freidhoff ,  Silai Krishnaswamy

    Inventor： Susan Trolier-McKinstry ,  Eunki Hong ,  Carl Freidhoff ,  Silai Krishnaswamy

    IPC: H01L41/18

    CPC classification number: H01L41/0973 ,  F04B43/046 ,  H01L41/047 ,  H01L41/1876 ,  H01L41/257 ,  H01L41/317

    Abstract: The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.

    Abstract translation: 所公开的发明涉及实现微加工的压电致动隔膜。 压电振膜包括中心的非活性电极自由区和与中心区的外周相邻的环形交错电极。 隔膜还可以具有无活性环形，无电极区域和活性中心交叉电极区域。 隔膜可用于例如微型泵中。 泵可以包括多个腔室以产生流体的蠕动泵送。

    Compact ion gauge using micromachining and MISOC devices
    5.
    发明申请
    Compact ion gauge using micromachining and MISOC devices 失效
    使用微加工和MISOC装置的紧凑型离子计

    公开(公告)号：US20050199805A1

    公开(公告)日：2005-09-15

    申请号：US10798376

    申请日：2004-03-12

    Applicant: Carl Freidhoff

    Inventor： Carl Freidhoff

    IPC: H01J49/28

    CPC classification number: H01J41/10 ,  H01J49/0013 ,  H01J49/288

    Abstract: A solid state compact ion gauge includes an inlet, a gas ionizer, and a detector all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed in the cavity through which the cavity is evacuated by differential pumping. Preferably, the substrate is formed in two halves. The substrate halves are then bonded together after the components are provided therein.

    Abstract translation: 固态紧凑型离子计包括入口，气体离子发生器和全部形成在半导体衬底中的空腔内的检测器。 气体离子发生器可以是固态电子发射器，其离子光学器件由形成在空腔中的电极提供，空腔通过差分泵浦而被抽空。 优选地，衬底形成为两半。 然后在其中提供部件之后将基板半部结合在一起。

    Coiled circuit bio-sensor
    6.
    发明申请
    Coiled circuit bio-sensor 审中-公开
    线圈生物传感器

    公开(公告)号：US20080009687A1

    公开(公告)日：2008-01-10

    申请号：US11802806

    申请日：2007-05-25

    Applicant: Joseph Smith ,  Harvey Nathanson ,  Robert Howell ,  Christopher Kirby ,  Carl Freidhoff

    Inventor： Joseph Smith ,  Harvey Nathanson ,  Robert Howell ,  Christopher Kirby ,  Carl Freidhoff

    IPC: A61B5/07

    CPC classification number: A61B5/0002 ,  A61B5/14532

    Abstract: A coiled bio-medical device has a base layer coiled to form a plurality of concentric cylinders. The base layer comprises an inner surface. The coiled bio-medical includes a bio-sensor arranged on the inner surface of the base layer. The bio-sensor is adapted to collect bio-medical data from an organism. A transmitter is arranged on the inner surface of the base layer and is adapted to transmit the collected bio-medical data.

    Abstract translation: 盘绕的生物医疗装置具有卷绕成多个同心圆筒的基层。 基层包括内表面。 盘绕的生物医学包括布置在基层的内表面上的生物传感器。 生物传感器适于从生物体收集生物医学数据。 发射器布置在基层的内表面上，并适于传送收集的生物医学数据。

    MEMS mass spectrometer
    7.
    发明申请
    MEMS mass spectrometer 有权
    MEMS质谱仪

    公开(公告)号：US20070096023A1

    公开(公告)日：2007-05-03

    申请号：US11260106

    申请日：2005-10-28

    Applicant: Carl Freidhoff

    Inventor： Carl Freidhoff

    IPC: H01J49/28

    CPC classification number: H01J49/288 ,  H01J49/0018

    Abstract: A MEMS mass spectrometer having metal walls connected between a lid and base, with the walls defining a plurality of interior chambers including sample gas input chambers, an ionizer chamber, a plurality of ion optics chambers and a ion separation chamber. A detector array at the end of the ion separation chamber includes a plurality of V-shaped detector elements positioned along two parallel lines and arranged to intercept all of the ionized beams produced in the mass spectrometer.

    Abstract translation: 一种MEMS质谱仪，其具有连接在盖和底座之间的金属壁，其中壁限定了多个内室，包括样品气体输入室，离子发生器室，多个离子光学腔室和离子分离室。 在离子分离室的端部处的检测器阵列包括沿着两条平行线定位的多个V形检测器元件，并且布置成拦截在质谱仪中产生的所有电离束。

    Thin film encapsulation of MEMS devices
    8.
    发明申请
    Thin film encapsulation of MEMS devices 有权

    公开(公告)号：US20060183262A1

    公开(公告)日：2006-08-17

    申请号：US11401962

    申请日：2006-04-12

    Applicant: Carl Freidhoff

    Inventor： Carl Freidhoff

    IPC: H01L21/00 ,  H01L29/82

    CPC classification number: B81C1/00293 ,  B81C2203/0136

    Abstract: A method of manufacturing a miniature electromechanical system (MEMS) device includes the steps of forming a moving member on a first substrate such that a first sacrificial layer is disposed between the moving member and the substrate, encapsulating the moving member, including the first sacrificial layer, with a second sacrificial layer, coating the encapsulating second sacrificial layer with a first film formed of a material that establishes an hermetic seal with the substrate, and removing the first and second sacrificial layers.

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