Spectral sensor system with spatially modified center wavelengths

    公开(公告)号:US11650099B2

    公开(公告)日:2023-05-16

    申请号:US17302465

    申请日:2021-05-04

    申请人: Spectricity

    摘要: A sensor system comprises a plurality of sets optical sensors arranged on an integrated circuit, the plurality of sets optical sensors having a respective top surface. The sensor system further comprising an interface between the plurality of optical sensors and a processing device configured to transmit information there between and an array of optical filters having a respective bottom surface and a respective top surface, where the bottom surface of the optical filter array is located proximal to the top surface of the plurality of sets optical sensors and each optical filter of the optical filter array is configured to pass a target wavelength range of light to a set of optical sensors. The processor is configured to receive an output from each optical sensor in a set of optical sensors and determine a corrected filter response for the set of optical sensors using crosstalk from light transmitted through optical filters adjacent to the set of optical sensors.

    Polychromator systems and methods
    16.
    发明授权

    公开(公告)号:US11579459B2

    公开(公告)日:2023-02-14

    申请号:US16768506

    申请日:2018-05-02

    摘要: A polychromator system comprising: an optical element defining an aperture; a collimation mirror for receiving light via the aperture and reflecting substantially collimated light; at least a first dispersive optical component and a second dispersive optical component, each configured to disperse the substantially collimated light received from the collimation mirror by different amounts for different wavelengths and to provide cross-dispersed light having different wavelengths of light spaced along a first and second axis; and a focus mirror positioned to focus the cross-dispersed light onto a 2-D array detector to provide a plurality of aperture images of the aperture at a respective plurality of regions of the detector, each of the plurality of aperture images associated with a respective wavelength of the cross-dispersed light. Either one or both of the collimation mirror and the focus mirror is a freeform mirror having a reflective surface configured to mitigate effects of optical aberrations of the polychromator system over a plurality of the wavelengths of the cross-dispersed light along the first axis and the second axis and thereby optimise the resolution of the plurality of aperture images associated with the plurality of the wavelengths along the first axis and the second axis.

    Imaging apparatus, imaging method, and program

    公开(公告)号:US11570371B2

    公开(公告)日:2023-01-31

    申请号:US16633667

    申请日:2018-07-18

    摘要: The present technology relates to an imaging apparatus, an imaging method, and a program that perform appropriate exposure control, to thereby enable a desired object to be appropriately imaged.
    The present technology includes: an imaging unit including a plurality of pixels having different spectral characteristics; and an exposure control unit setting information associated with exposure control on the plurality of pixels depending on specification information for specifying a kind of a measurement target. Alternatively, the present technology includes: an imaging unit including a plurality of pixels having different spectral characteristics; and an exposure control unit setting information associated with exposure control on the plurality of pixels on the basis of a predicted output value of each of the plurality of pixels based on a spectral characteristic related to a measurement target. The present technology is applicable to an imaging apparatus which senses vegetation, for example.

    Spectral feature control apparatus
    19.
    发明授权

    公开(公告)号:US11561407B2

    公开(公告)日:2023-01-24

    申请号:US17034132

    申请日:2020-09-28

    申请人: Cymer, LLC

    发明人: Eric Anders Mason

    摘要: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

    Compact apparatus for high-speed chemical spectral signature measurement and method of using same

    公开(公告)号:US11506598B2

    公开(公告)日:2022-11-22

    申请号:US16699552

    申请日:2019-11-29

    摘要: A multiband IR adjunct (MIRA) sensor to spectroscopically determine the content and the concentration of chemical composition of a targeted object, includes a sensor housing, a first front optics in a first optical channel, a second front optics in the first optical channel, an acousto-optic tunable filter (AOTF), a photo detector (PD), a set of back optics in the first optical channel that focuses polarized narrow-band light beams received from the AOTF device onto the PD, the PD converting the polarized narrow-band light beams into an electrical signal, and a data acquisition unit signal-connected to the PD, the data acquisition unit collecting the electrical signals. Multiple optical channels can be provided within the housing to analyze UV/VIS/near infrared (NIR), short-wavelength infrared (SWIR), mid-wavelength infrared (MWIR), and LWIR wavelength ranges respectively.