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    Micro-electromechanical actuator and methods of use and fabrication
    211.
    发明授权
    Micro-electromechanical actuator and methods of use and fabrication 失效
    微机电致动器及其使用和制造方法

    公开(公告)号：US06897083B2

    公开(公告)日：2005-05-24

    申请号：US10460858

    申请日：2003-06-12

    Applicant: Donald J. Milligan

    Inventor： Donald J. Milligan

    IPC: B81B3/00 ,  H01L21/00

    CPC classification number: B81B3/0021 ,  B81B2201/038 ,  B81C99/0045

    Abstract: A micro-electromechanical actuator and related methods of use that use a pair of electrodes separated by a linkage. The linkage is biased to a neutral position wherein the electrodes are spaced apart from each other, but also allows at least one electrode to move toward the other electrode when an appropriate force, such as voltage from the power source, is applied to the electrodes. The linkage is sized and shaped to allow the electrodes to move together when a defined threshold voltage is applied by the power source, thereby allowing the micro-elecromechanical actuator to function as a manufacturing quality testing device or a micromechanical actuator in other applications. The actuator may be fabricated simultaneously with other micromechanical and micro-electromechanical components on the same substrate using conventional semi-conductor and micro-machining manufacturing equipment.

    Abstract translation: 一种微机电致动器及使用由连杆分开的一对电极的相关使用方法。 连杆被偏置到中性位置，其中电极彼此间隔开，但是当适当的力（例如来自电源的电压）被施加到电极时，还允许至少一个电极朝向另一个电极移动。 连接件的尺寸和形状被设计成允许电极在由电源施加的限定的阈值电压时一起移动，从而允许微电机械致动器在其它应用中用作制造质量测试装置或微机械致动器。 致动器可以使用传统的半导体和微加工制造设备与同一基板上的其它微机电和微机电部件同时制造。

    Electrostatic bimorph actuator
    213.
    发明申请
    Electrostatic bimorph actuator 有权
    静电双压电晶片致动器

    公开(公告)号：US20040227428A1

    公开(公告)日：2004-11-18

    申请号：US10868603

    申请日：2004-06-14

    Applicant: Microsoft Corporation

    Inventor： Michael J. Sinclair

    IPC: H02K005/16 ,  H02K007/08 ,  H02N001/00

    CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

    Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

    Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

    Micro electromechanical differential actuator
    215.
    发明申请
    Micro electromechanical differential actuator 失效
    微机电差速器

    公开(公告)号：US20040027225A1

    公开(公告)日：2004-02-12

    申请号：US10307367

    申请日：2002-12-02

    Inventor： Hsiao-Wen Lee ,  Wen-I Wu ,  Shih-Yi Wen ,  Wu-Cheng Kuo ,  Jui-Ping Weng

    IPC: H01H071/16

    CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/053 ,  G02B26/001 ,  G02B26/0808

    Abstract: A micro electromechanical differential actuator is comprised of a suspension arm structure and/or a bridge structure to make a two-degree-of-freedom and bi-directional motion. The actuator support base can make out-of-plane or in-plane vertical and horizontal motions. The invention is applicable in optical micro electromechanical devices such as optical switches, variable optical attenuators, optical tunable filters, modulators, tunable VCSEL's, grating modulators, micro displays, and RF switches.

    Abstract translation: 微机电差速器致动器由悬臂结构和/或桥结构构成，以实现两自由度和双向运动。 致动器支撑基座可以进行平面外或平面内垂直和水平运动。 本发明可应用于诸如光开关，可变光衰减器，光可调谐滤波器，调制器，可调VCSEL，光栅调制器，微显示器和RF开关等光学微机电器件。

    Electrostatically-controllable diffraction grating
    216.
    发明授权
    Electrostatically-controllable diffraction grating 有权
    静电可控衍射光栅

    公开(公告)号：US06664706B1

    公开(公告)日：2003-12-16

    申请号：US10015732

    申请日：2001-12-10

    Applicant: Elmer S. Hung ,  Erik R. Deutsch ,  Stephen D. Senturia

    Inventor： Elmer S. Hung ,  Erik R. Deutsch ,  Stephen D. Senturia

    IPC: H02N100

    CPC classification number: B81B3/0037 ,  B81B2201/038 ,  B81B2203/053 ,  H02N1/006

    Abstract: The invention provides an electrostatically-controllable diffraction grating including a plurality of electrically isolated and stationary electrodes disposed on a substrate. At least one row of a plurality of interconnected actuation elements is provided, with each actuation element suspended, by a corresponding mechanically constrained support region, over the substrate by a vertical actuation gap and including a conducting actuation region connected to the corresponding support region and disposed in a selected correspondence with at least one substrate electrode. A mirror element is provided, for at least one actuation element in at least one row of actuation elements, including an optically reflecting upper surface, and being vertically suspended over a corresponding actuation element by a mechanically constrained mirror support region that is connected to the corresponding actuation element and that defines a vertical mirror gap. A mirror deflection region connected to the mirror support region and is free to be deflected through the mirror gap. The mirror gap is less than the actuation gap of a corresponding actuation element and is selected to produce controlled and stable displacement of the actuation region of a corresponding actuation element through a displacement range to a specified point in the actuation gap when an actuation voltage is applied between an actuation region and a corresponding stationary electrode. This enables diffraction of a beam of light incident on the grating as the light beam is reflected from the upper surfaces of the mirror elements.

    Abstract translation: 本发明提供了一种静电可控衍射光栅，其包括设置在基板上的多个电隔离和固定电极。 提供多个互连致动元件的至少一排，其中每个致动元件由对应的机械约束的支撑区域通过垂直致动间隙悬挂在衬底上，并且包括连接到对应的支撑区域的导电致动区域并且被布置 与至少一个衬底电极选择对应。 为至少一行致动元件中的至少一个致动元件设置一个镜元件，其包括光反射上表面，并且通过机械约束的反射镜支撑区域垂直悬挂在相应的致动元件上，该区域连接到相应的 致动元件并限定垂直反射镜间隙。 连接到镜支撑区域的镜面偏转区域，并且可自由地偏转穿过反射镜间隙。 反射镜间隙小于相应的致动元件的致动间隙，并且被选择为当施加致动电压时，相应的致动元件的致动区域通过位移范围到致动间隙中的指定点的受控且稳定的位移 在致动区域和相应的固定电极之间。 当光束从镜元件的上表面反射时，这使得入射在光栅上的光束的衍射成为可能。

    Micro-electromechanical actuator and methods of use and fabrication
    217.
    发明申请
    Micro-electromechanical actuator and methods of use and fabrication 失效
    微机电致动器及其使用和制造方法

    公开(公告)号：US20030209768A1

    公开(公告)日：2003-11-13

    申请号：US10460858

    申请日：2003-06-12

    Inventor： Donald J. Milligan

    IPC: H01L027/14

    CPC classification number: B81B3/0021 ,  B81B2201/038 ,  B81C99/0045

    Abstract: A micro-electromechanical actuator and related methods of use that use a pair of electrodes separated by a linkage. The linkage is biased to a neutral position wherein the electrodes are spaced apart from each other, but also allows at least one electrode to move toward the other electrode when an appropriate force, such as voltage from the power source, is applied to the electrodes. The linkage is sized and shaped to allow the electrodes to move together when a defined threshold voltage is applied by the power source, thereby allowing the micro-elecromechanical actuator to function as a manufacturing quality testing device or a micromechanical actuator in other applications. The actuator may be fabricated simultaneously with other micromechanical and micro-electromechanical components on the same substrate using conventional semi-conductor and micro-machining manufacturing equipment.

    Abstract translation: 一种微机电致动器及使用由连杆分开的一对电极的相关使用方法。 连杆被偏置到中性位置，其中电极彼此间隔开，但是当适当的力（例如来自电源的电压）被施加到电极时，还允许至少一个电极朝向另一个电极移动。 连接件的尺寸和形状被设计成允许电极在由电源施加的限定的阈值电压时一起移动，从而允许微电机械致动器在其它应用中用作制造质量测试装置或微机械致动器。 致动器可以使用传统的半导体和微加工制造设备与同一基板上的其它微机电和微机电部件同时制造。

    Micro-electromechanical actuator and methods of use
    218.
    发明授权
    Micro-electromechanical actuator and methods of use 有权
    微机电致动器及其使用方法

    公开(公告)号：US06635940B1

    公开(公告)日：2003-10-21

    申请号：US10128782

    申请日：2002-04-23

    Applicant: Donald J. Milligan

    Inventor： Donald J. Milligan

    IPC: H01L2982

    CPC classification number: B81B3/0021 ,  B81B2201/038 ,  B81C99/0045

    Abstract: A micro-electromechanical actuator and related methods of use that use a pair of electrodes separated by a linkage. The linkage is biased to a neutral position wherein the electrodes are spaced apart from each other, but also allows at least one electrode to move toward the other electrode when an appropriate force, such as voltage from the power source, is applied to the electrodes. The linkage is sized and shaped to allow the electrodes to move together when a defined threshold voltage is applied by the power source, thereby allowing the micro-electromechanical actuator to function as a manufacturing quality testing device or a micromechanical actuator in other applications. The actuator may be fabricated simultaneously with other micromechanical and micro-electromechanical components on the same substrate using conventional semi-conductor and micro-machining manufacturing equipment.

    Abstract translation: 一种微机电致动器及使用由连杆分开的一对电极的相关使用方法。 连杆被偏置到中性位置，其中电极彼此间隔开，但是当适当的力（例如来自电源的电压）被施加到电极时，还允许至少一个电极朝向另一个电极移动。 连接件的尺寸和形状被设计成允许电极在通过电源施加限定的阈值电压时一起移动，从而允许微机电致动器在其它应用中用作制造质量测试装置或微机械致动器。 致动器可以使用传统的半导体和微加工制造设备与同一基板上的其它微机电和微机电部件同时制造。

    Systems with high density packing of micromachines
    219.
    发明申请
    Systems with high density packing of micromachines 失效

    公开(公告)号：US20030025168A1

    公开(公告)日：2003-02-06

    申请号：US09923000

    申请日：2001-08-03

    Inventor： Peter G. Hartwell ,  Robert G. Walmsley

    IPC: H01L031/113

    CPC classification number: B81B7/04 ,  B81B2201/038

    Abstract: Micromachine systems are provided. An embodiment of such a micromachine system includes a substrate that defines a trench. First and second microelectromechanical devices are arranged at least partially within the trench. Each of the microelectromechanical devices incorporates a first portion that is configured to move relative to the substrate. Methods also are provided.

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