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    Plate, Transducer and Methods for Making and Operating a Transducer
    233.
    发明申请
    Plate, Transducer and Methods for Making and Operating a Transducer 审中-公开

    公开(公告)号：US20160094155A1

    公开(公告)日：2016-03-31

    申请号：US14962949

    申请日：2015-12-08

    Applicant: Infineon Technologies AG

    Inventor： Alfons Dehe

    IPC: H02N1/08

    CPC classification number: H02N99/00 ,  G01N21/956 ,  H01J37/26 ,  H02N1/08 ,  H04R7/10 ,  H04R19/04 ,  H04R31/003 ,  Y10T428/24281

    Abstract: A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.

    SINGLE DIAPHRAGM TRANSDUCER STRUCTURE
    234.
    发明申请
    SINGLE DIAPHRAGM TRANSDUCER STRUCTURE 有权
    单透镜传感器结构

    公开(公告)号：US20150253208A1

    公开(公告)日：2015-09-10

    申请号：US14198609

    申请日：2014-03-06

    Applicant: Infineon Technologies AG

    Inventor： Alfons Dehe ,  Christoph Glacer

    IPC: G01L1/14

    CPC classification number: G01L1/14 ,  G01L9/0042 ,  G01L9/0073 ,  G01R29/12

    Abstract: A transducer structure including a carrier with an opening and a suspended structure mounted on the carrier which extends at least partially over the opening in the carrier is disclosed. The transducer structure may further include configuring the suspended structure to provide an electrostatic field between the suspended structure and the carrier by changing a distance between the suspended structure and the carrier. Alternatively, the suspended structure may be configured to change the distance between the suspended structure and the carrier in response to an electrostatic force provided between the suspended structure and the carrier.

    Abstract translation: 一种传感器结构，其包括具有开口的载体和安装在载体上的悬挂结构，其至少部分地延伸在载体中的开口上。 换能器结构还可以包括配置悬挂结构，以通过改变悬挂结构和载体之间的距离来在悬挂结构和载体之间提供静电场。 或者，悬挂结构可以被配置为响应悬挂结构和载体之间提供的静电力而改变悬挂结构和载体之间的距离。

    Method for Manufacturing a MEMS Device and MEMS Device
    235.
    发明申请
    Method for Manufacturing a MEMS Device and MEMS Device 有权
    MEMS器件和MEMS器件的制造方法

    公开(公告)号：US20150054097A1

    公开(公告)日：2015-02-26

    申请号：US14010360

    申请日：2013-08-26

    Applicant: Infineon Technologies AG

    Inventor： Alfons Dehe ,  Christoph Glacer ,  Soenke Pirk

    IPC: B81C1/00 ,  B81B7/00

    CPC classification number: B81C1/00539 ,  B81B7/0009 ,  B81B2201/0257 ,  B81B2203/0315 ,  B81C1/00476

    Abstract: A method for manufacturing a MEMS device includes providing a cavity within a layer adjacent to a sacrificial layer. The cavity extends to the sacrificial layer and includes a capillary slot protruding into the layer. The sacrificial layer is removed by exposing the sacrificial layer to an etching agent that is introduced through the cavity.

    Abstract translation: 一种用于制造MEMS器件的方法包括在与牺牲层相邻的层内提供空腔。 空腔延伸到牺牲层并且包括突出到该层中的毛细槽。 通过将牺牲层暴露于通过空腔引入的蚀刻剂来去除牺牲层。

    MEMS Device
    237.
    发明申请
    MEMS Device 有权
    MEMS器件

    公开(公告)号：US20150021722A1

    公开(公告)日：2015-01-22

    申请号：US13947823

    申请日：2013-07-22

    Applicant: Infineon Technologies AG

    Inventor： Alfons Dehe ,  Mohsin Nawaz

    IPC: H01L29/84 ,  H01L21/306

    CPC classification number: H01L29/84 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0136 ,  B81B2203/053 ,  H01L21/30604 ,  H04R19/005 ,  H04R2201/003

    Abstract: A MEMS device includes a membrane comprising a first plurality of fingers. A counter electrode arrangement includes a second plurality of fingers disposed in a interdigitated relationship with the first plurality of fingers of the membrane. A deflector is configured to deflect the membrane such that the first and second plurality of fingers are displaced in a position excluding maximum overlapping of surfaces of the fingers.

    Abstract translation: MEMS器件包括包括第一多个指状物的膜。 对电极装置包括与膜的第一多个指状物以交叉关系设置的第二多个指状物。 偏转器被配置成偏转膜，使得第一和第二多个指状物在除了指状物的表面的最大重叠之外的位置移位。

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