System for Tomography and/or Topography Measurements of a Layered Objects
    22.
    发明申请
    System for Tomography and/or Topography Measurements of a Layered Objects 审中-公开
    分层对象的层析成像和/或地形测量系统

    公开(公告)号:US20170074644A1

    公开(公告)日:2017-03-16

    申请号:US15311280

    申请日:2015-05-14

    Abstract: A system (10) for analyzing an object (11) includes a light source (12) producing multiple light components, each of different wavelength and a respective amplitude, phase and polarization. An optical element (13) directs the light components on to the object to create known 2D patterns at different image planes displaced from the optical element by distances that are known functions of the wavelength of the light component. A 2D imager (20) images the 2D patterns and produces a plurality of full view 2D wavelength dependent patterns each corresponding to a known distance from the optical element and each having variable image contrast dependent on displacement of a surface of the object from the image plane, maximal image contrast being achieved when the surface of the object and image plane are coincident. A processing unit (25) determines the object surface based on the variable image contrast of each image.

    Abstract translation: 用于分析物体(11)的系统(10)包括产生多个光分量的光源(12),每个光分量具有不同的波长和相应的振幅,相位和极化。 光学元件(13)将光分量引导到物体上,以在与光学元件偏移的不同图像平面上产生已知的2D图案,该距离是光分量的波长的已知功能。 2D成像器(20)对2D图案进行成像,并且产生多个全视图2D波长相关图案,每个图案对应于从光学元件的已知距离,并且每个具有可变图像对比度,取决于物体表面与图像平面的位移 当物体和图像平面的表面一致时,实现最大图像对比度。 处理单元(25)基于每个图像的可变图像对比度确定对象表面。

    Method for Analyzing an Object Using a Combination of Long and Short Coherence Interferometry
    23.
    发明申请
    Method for Analyzing an Object Using a Combination of Long and Short Coherence Interferometry 审中-公开
    使用长和短相干干涉测量的组合分析对象的方法

    公开(公告)号:US20170038191A1

    公开(公告)日:2017-02-09

    申请号:US15304816

    申请日:2015-04-29

    CPC classification number: G01B9/02047 G01B9/0209 G01B9/02091

    Abstract: A method for high dynamic range and high accuracy interferometry measurements is described. The method uses a broadband light source for generating light, an interferometer, a phase shifting device, an imaging optical system and a detector array for collecting and measuring the reflected light from an object. The detected light is processed by a processor unit to obtain the object's surface.

    Abstract translation: 描述了用于高动态范围和高精度干涉测量的方法。 该方法使用用于产生光的宽带光源,干涉仪,相移装置,成像光学系统和用于收集和测量来自物体的反射光的检测器阵列。 检测到的光被处理器单元处理以获得物体的表面。

    APPARATUS AND METHODS FOR CALIBRATING OPTICAL MEASUREMENTS

    公开(公告)号:US20220034716A1

    公开(公告)日:2022-02-03

    申请号:US17276265

    申请日:2019-07-04

    Abstract: Apparatus and methods are described for calibrating an optical system that is used for measuring optical properties of a portion of a subjects body. During a calibration stage, a front surface of a calibration object (300) is illuminated, light reflected from a plurality of points on the calibration object (300) is detected, and intensities of the light reflected from the plurality of points on the calibration object (300) are measured. During a measurement stage, the portion of the subjects body is illuminated, and light reflected from the portion of the subjects body is detected. Measurements performed upon the light that was reflected from the portion of the subjects body are calibrated, using the measured intensities of the light reflected from the plurality of points on the calibration object (300). Other applications are also described.

    Method for analyzing an object
    30.
    发明授权

    公开(公告)号:US10415954B2

    公开(公告)日:2019-09-17

    申请号:US16037680

    申请日:2018-07-17

    Abstract: Apparatus and methods are described for determining tomographic and/or topographic data relating to an object. The object is illuminated with at least one wave packet from light generated by a multi-spectral light source. The wave packet is split into two split wave packets, and an optical path difference (OPD) is introduced between the two split wave packets, that is smaller than the coherence length of the wave packet. The two split wave packets are combined to generate a 2D image of the illuminated object, and the data relating to the object is determined by processing the 2D image using long coherence phase shift interferometry algorithms, by analyzing the 2D image as if the 2D image was generated using monochromatic light having a wavelength that is equal to a mean wavelength of the wave packet. Other applications are also described.

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