PIEZOELECTRIC THIN-FILM RESONATOR AND METHOD FOR PRODUCING THE SAME
    21.
    发明申请
    PIEZOELECTRIC THIN-FILM RESONATOR AND METHOD FOR PRODUCING THE SAME 有权
    压电薄膜共振器及其制造方法

    公开(公告)号:US20090000091A1

    公开(公告)日:2009-01-01

    申请号:US12203412

    申请日:2008-09-03

    IPC分类号: H01L41/22

    摘要: A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.

    摘要翻译: 一种压电薄膜谐振器的制造方法,其特征在于,在基板上形成牺牲层,对牺牲层进行等离子体处理,使牺牲层的端面部的表面粗糙度(Ra)为5nm以下, 形成带状电介质膜,以连续地设置在基板的表面和牺牲层的端面部分和主表面上,形成包括下电极,上电极和 设置在其间的压电薄膜,使得下电极的一部分和上电极的一部分在电介质膜上的区域彼此面对,该区域设置在牺牲层的上部,并且去除牺牲层 以在衬底和电介质膜之间形成气隙。

    Piezoelectric device
    22.
    发明授权
    Piezoelectric device 有权
    压电元件

    公开(公告)号:US07436272B2

    公开(公告)日:2008-10-14

    申请号:US11641890

    申请日:2006-12-20

    IPC分类号: H03H9/00

    摘要: A pizoelectric filter capable of improving the shielding property and increasing the heat releasing property is provided. The piezoelectric device includes a cover and piezoelectric device chips which are stacked and sealed together. The piezoelectric device also includes first external electrodes exposed at an upper surface of the cover and a grounded second external electrode exposed at the upper surface and a side surface of the cover. Electroconductive bonding materials are disposed between the cover and the piezoelectric device chips and all around an outer edge which connects the cover to the piezoelectric device chips so as to form a seal. The electroconductive bonding materials are also connected to the grounded second external electrode.

    摘要翻译: 提供了能够提高屏蔽性和提高散热性能的真空电容滤波器。 压电装置包括层叠并密封在一起的盖和压电装置芯片。 压电装置还包括在盖的上表面处暴露的第一外部电极和暴露在盖的上表面和侧表面处的接地的第二外部电极。 导电接合材料设置在盖和压电元件芯片之间,并且全部围绕将盖与压电元件芯片连接以形成密封件的外边缘。 导电接合材料也连接到接地的第二外部电极。

    Piezoelectric thin film resonator
    23.
    发明授权
    Piezoelectric thin film resonator 有权
    压电薄膜谐振器

    公开(公告)号:US07327209B2

    公开(公告)日:2008-02-05

    申请号:US11715359

    申请日:2007-03-08

    IPC分类号: H03H9/15 H03H9/54 H03H9/70

    CPC分类号: H03H9/173 H03H9/02133

    摘要: A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.

    摘要翻译: 一种压电薄膜谐振器,其确保膜的强度而不降低谐振特性,并且可以在安装时容易地处理。 压电薄膜谐振器具有基板,薄膜构件和增强膜。 薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分,其间设置有由该支撑部分支撑的空间。 浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。 增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

    Piezoelectric thin film resonator
    24.
    发明申请
    Piezoelectric thin film resonator 有权
    压电薄膜谐振器

    公开(公告)号:US20070152775A1

    公开(公告)日:2007-07-05

    申请号:US11715359

    申请日:2007-03-08

    IPC分类号: H03H9/70 H03H9/54 H03H9/58

    CPC分类号: H03H9/173 H03H9/02133

    摘要: A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.

    摘要翻译: 一种压电薄膜谐振器,其确保膜的强度而不降低谐振特性,并且可以在安装时容易地处理。 压电薄膜谐振器具有基板,薄膜构件和增强膜。 薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分,其间设置有由该支撑部分支撑的空间。 浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。 增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

    Piezoelectric thin film resonator and manufacturing method thereof
    25.
    发明申请
    Piezoelectric thin film resonator and manufacturing method thereof 审中-公开
    压电薄膜谐振器及其制造方法

    公开(公告)号:US20070152540A1

    公开(公告)日:2007-07-05

    申请号:US11714870

    申请日:2007-03-07

    IPC分类号: H01L41/00

    摘要: A piezoelectric thin film resonator which can reduce variations in resonant frequency and resonant resistance by uniformly planarizing a structural film, and a method of manufacturing the piezoelectric thin film resonator. The piezoelectric thin film resonator has a substrate having at least one flat major surface; a dielectric film having two support portions supported by the major surface of the substrate and a floating portion which is connected to the support portions and which is disposed over the major surface of the substrate with an airspace layer provided therebetween; and a vibration portion which is formed of a pair of electrodes and a piezoelectric thin film provided therebetween and which is provided on the floating portion of the dielectric film at a side opposite to the airspace layer. A surface of the dielectric film at a side opposite to the substrate is planarized by a plasma treatment using an inert gas or a gas containing an element forming a dielectric film.

    摘要翻译: 一种通过均匀平坦化结构膜可以减小谐振频率和谐振电阻的变化的压电薄膜谐振器,以及制造压电薄膜谐振器的方法。 压电薄膜谐振器具有至少一个平坦主表面的基板; 具有由基板的主表面支撑的两个支撑部分的电介质膜和与支撑部分连接并且设置在基板的主表面上方的浮动部分,其间设置有空间层; 以及由一对电极和设置在它们之间的压电薄膜形成的振动部分,并且设置在与空气空间层相对的一侧的电介质膜的浮动部分上。 通过使用惰性气体或含有形成电介质膜的元素的气体进行等离子体处理,在与基板相对的一侧的电介质膜的表面平坦化。

    IMAGE FORMING METHOD
    27.
    发明申请

    公开(公告)号:US20220126605A1

    公开(公告)日:2022-04-28

    申请号:US17505697

    申请日:2021-10-20

    IPC分类号: B41J11/00

    摘要: An image forming method includes discharging ink containing water, a coloring material, a polymerization initiator, and a polymerizable compound to a recording medium by a line head to obtain an image, exposing the image to active energy radiation, applying a processing fluid to the image, and drying the image with heat, wherein the time interval between when the ink is discharged in the discharging from the line head to the recording medium passing under a bottom portion of the line head and when the recording medium is exposed to the active energy radiation in the exposing is from 0.5 to 15 seconds.