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公开(公告)号:US20090000091A1
公开(公告)日:2009-01-01
申请号:US12203412
申请日:2008-09-03
申请人: Hidetoshi FUJII , Ryuichi KUBO
发明人: Hidetoshi FUJII , Ryuichi KUBO
IPC分类号: H01L41/22
CPC分类号: H03H3/02 , H03H9/173 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要: A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.
摘要翻译: 一种压电薄膜谐振器的制造方法,其特征在于,在基板上形成牺牲层,对牺牲层进行等离子体处理,使牺牲层的端面部的表面粗糙度(Ra)为5nm以下, 形成带状电介质膜,以连续地设置在基板的表面和牺牲层的端面部分和主表面上,形成包括下电极,上电极和 设置在其间的压电薄膜,使得下电极的一部分和上电极的一部分在电介质膜上的区域彼此面对,该区域设置在牺牲层的上部,并且去除牺牲层 以在衬底和电介质膜之间形成气隙。
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公开(公告)号:US07436272B2
公开(公告)日:2008-10-14
申请号:US11641890
申请日:2006-12-20
申请人: Hidetoshi Fujii , Masaki Takeuchi
发明人: Hidetoshi Fujii , Masaki Takeuchi
IPC分类号: H03H9/00
CPC分类号: H03H9/105 , B81B2201/0271 , H03H3/02 , H03H9/02086 , H03H9/173
摘要: A pizoelectric filter capable of improving the shielding property and increasing the heat releasing property is provided. The piezoelectric device includes a cover and piezoelectric device chips which are stacked and sealed together. The piezoelectric device also includes first external electrodes exposed at an upper surface of the cover and a grounded second external electrode exposed at the upper surface and a side surface of the cover. Electroconductive bonding materials are disposed between the cover and the piezoelectric device chips and all around an outer edge which connects the cover to the piezoelectric device chips so as to form a seal. The electroconductive bonding materials are also connected to the grounded second external electrode.
摘要翻译: 提供了能够提高屏蔽性和提高散热性能的真空电容滤波器。 压电装置包括层叠并密封在一起的盖和压电装置芯片。 压电装置还包括在盖的上表面处暴露的第一外部电极和暴露在盖的上表面和侧表面处的接地的第二外部电极。 导电接合材料设置在盖和压电元件芯片之间,并且全部围绕将盖与压电元件芯片连接以形成密封件的外边缘。 导电接合材料也连接到接地的第二外部电极。
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公开(公告)号:US07327209B2
公开(公告)日:2008-02-05
申请号:US11715359
申请日:2007-03-08
申请人: Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
发明人: Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
CPC分类号: H03H9/173 , H03H9/02133
摘要: A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.
摘要翻译: 一种压电薄膜谐振器,其确保膜的强度而不降低谐振特性,并且可以在安装时容易地处理。 压电薄膜谐振器具有基板,薄膜构件和增强膜。 薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分,其间设置有由该支撑部分支撑的空间。 浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。 增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。
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公开(公告)号:US20070152775A1
公开(公告)日:2007-07-05
申请号:US11715359
申请日:2007-03-08
申请人: Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
发明人: Hidetoshi Fujii , Ryuichi Kubo , Hajime Yamada
CPC分类号: H03H9/173 , H03H9/02133
摘要: A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.
摘要翻译: 一种压电薄膜谐振器,其确保膜的强度而不降低谐振特性,并且可以在安装时容易地处理。 压电薄膜谐振器具有基板,薄膜构件和增强膜。 薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分,其间设置有由该支撑部分支撑的空间。 浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。 增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。
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公开(公告)号:US20070152540A1
公开(公告)日:2007-07-05
申请号:US11714870
申请日:2007-03-07
申请人: Hidetoshi Fujii , Ryuichi Kubo
发明人: Hidetoshi Fujii , Ryuichi Kubo
IPC分类号: H01L41/00
CPC分类号: H03H3/04 , H03H9/173 , H03H2003/021 , Y10T29/42 , Y10T29/49005 , Y10T29/49128 , Y10T29/49155 , Y10T29/49798
摘要: A piezoelectric thin film resonator which can reduce variations in resonant frequency and resonant resistance by uniformly planarizing a structural film, and a method of manufacturing the piezoelectric thin film resonator. The piezoelectric thin film resonator has a substrate having at least one flat major surface; a dielectric film having two support portions supported by the major surface of the substrate and a floating portion which is connected to the support portions and which is disposed over the major surface of the substrate with an airspace layer provided therebetween; and a vibration portion which is formed of a pair of electrodes and a piezoelectric thin film provided therebetween and which is provided on the floating portion of the dielectric film at a side opposite to the airspace layer. A surface of the dielectric film at a side opposite to the substrate is planarized by a plasma treatment using an inert gas or a gas containing an element forming a dielectric film.
摘要翻译: 一种通过均匀平坦化结构膜可以减小谐振频率和谐振电阻的变化的压电薄膜谐振器,以及制造压电薄膜谐振器的方法。 压电薄膜谐振器具有至少一个平坦主表面的基板; 具有由基板的主表面支撑的两个支撑部分的电介质膜和与支撑部分连接并且设置在基板的主表面上方的浮动部分,其间设置有空间层; 以及由一对电极和设置在它们之间的压电薄膜形成的振动部分,并且设置在与空气空间层相对的一侧的电介质膜的浮动部分上。 通过使用惰性气体或含有形成电介质膜的元素的气体进行等离子体处理,在与基板相对的一侧的电介质膜的表面平坦化。
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公开(公告)号:US20050088485A1
公开(公告)日:2005-04-28
申请号:US10968067
申请日:2004-10-20
CPC分类号: B41J2/1606 , B41J2/1433
摘要: An ink-jet printer head is characterized by comprising an organic film coated on the surface of the nozzle plate for discharging ink, in which solid particles having abrasion resistance are dispersed, and a water-repellent film on the surface of the organic film, in which the chains of fluorocarbon polymer is grown. The head shows improved durability of the chains of the fluorocarbon polymer on the nozzle plate during cleaning of the nozzle surface.
摘要翻译: 喷墨打印头的特征在于包括涂布在喷嘴板的表面上的有机膜,用于排出其中分散有耐磨性的固体颗粒和在有机膜的表面上的防水膜, 其中碳氟聚合物链是生长的。 头部在清洁喷嘴表面期间显示了在喷嘴板上碳氟聚合物链的耐久性得到改善。
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公开(公告)号:US20220126605A1
公开(公告)日:2022-04-28
申请号:US17505697
申请日:2021-10-20
申请人: Takuya Saiga , Hidetoshi Fujii , Shigeyuki Harada , Yuya Hirokawa
发明人: Takuya Saiga , Hidetoshi Fujii , Shigeyuki Harada , Yuya Hirokawa
IPC分类号: B41J11/00
摘要: An image forming method includes discharging ink containing water, a coloring material, a polymerization initiator, and a polymerizable compound to a recording medium by a line head to obtain an image, exposing the image to active energy radiation, applying a processing fluid to the image, and drying the image with heat, wherein the time interval between when the ink is discharged in the discharging from the line head to the recording medium passing under a bottom portion of the line head and when the recording medium is exposed to the active energy radiation in the exposing is from 0.5 to 15 seconds.
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公开(公告)号:US20210283937A1
公开(公告)日:2021-09-16
申请号:US17185755
申请日:2021-02-25
申请人: Hidetoshi FUJII
发明人: Hidetoshi FUJII
IPC分类号: B41M7/00 , B33Y30/00 , B29C64/255 , B29C64/264 , B41M5/00 , B41J11/00 , B41J2/175 , C09D11/107
摘要: An inkjet printing method is provided that includes irradiating a curable composition with ultraviolet rays emitted from a light-emitting diode having a peak illuminance in a wavelength range of from 265 nm through 300 nm to cure the curable composition. The curable composition contains water, a polymerizable compound, and a water-soluble polymerization initiator having local absorption maximum in a wavelength range of 300 nm or shorter. A mass content of the water is higher than a mass content of the polymerizable compound and the mass content of the polymerizable compound is higher than a mass content of the water-soluble polymerization initiator.
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公开(公告)号:US20200270469A1
公开(公告)日:2020-08-27
申请号:US16774636
申请日:2020-01-28
申请人: Shigeyuki HARADA , Hidetoshi FUJII
发明人: Shigeyuki HARADA , Hidetoshi FUJII
IPC分类号: C09D11/101 , C07C271/22 , C07C69/78 , B41J2/175 , B41M5/00
摘要: An active-energy-ray-polymerizable initiator having a structure represented by the following general formula (1) is provided. In general formula (1), L1 represents —C(═O)—O— (binding to L2 side) or —O—, L2 represents —O(CH2)p-(binding to L1 side), —(OC2H4)n-(binding to L1 side), or —(OC3H6)m-(binding to L1 side), where p represents an integer of 2 to 16, n represents an integer of 2 to 12, and m represents 2 or 3, L3 represents a direct binding or —NH—, L4 represents —OC2H4-(binding to L3 side) or —(OC2H4)2-(binding to L3 side), and R represents —H or —CH3.
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公开(公告)号:US10689536B2
公开(公告)日:2020-06-23
申请号:US15051869
申请日:2016-02-24
IPC分类号: C09D11/38 , C09D11/102 , C09D11/322 , B41M5/00
摘要: An ink is provided. The ink includes a colorant, an organic solvent, a resin particle including an anionic urethane resin, and an organic amine compound having a boiling point in the range of from 120° C. to 200° C. and a molecular weight of 100 or less, and water, and the mass ratio of the organic amine compound to the resin particle is in the range of from 0.01 to 1.00.
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