公开(公告)号：US07327209B2

公开(公告)日：2008-02-05

申请号：US11715359

申请日：2007-03-08

申请人： Hidetoshi Fujii ,  Ryuichi Kubo ,  Hajime Yamada

发明人： Hidetoshi Fujii ,  Ryuichi Kubo ,  Hajime Yamada

IPC分类号： H03H9/15 ,  H03H9/54 ,  H03H9/70

CPC分类号： H03H9/173 ,  H03H9/02133

摘要： A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.

摘要翻译： 一种压电薄膜谐振器，其确保膜的强度而不降低谐振特性，并且可以在安装时容易地处理。 压电薄膜谐振器具有基板，薄膜构件和增强膜。 薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分，其间设置有由该支撑部分支撑的空间。 浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。 增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

公开(公告)号：US20070152775A1

公开(公告)日：2007-07-05

申请号：US11715359

申请日：2007-03-08

申请人： Hidetoshi Fujii ,  Ryuichi Kubo ,  Hajime Yamada

发明人： Hidetoshi Fujii ,  Ryuichi Kubo ,  Hajime Yamada

IPC分类号： H03H9/70 ,  H03H9/54 ,  H03H9/58

CPC分类号： H03H9/173 ,  H03H9/02133

摘要： A piezoelectric thin film resonator that ensures the strength of a membrane without degrading the resonant properties and which can be easily handled in mounting. The piezoelectric thin film resonator has a substrate, a thin film member, and reinforcing films. The thin film member has at least two support portions supported by the substrate and a floating portion disposed over the substrate with a space provided therebetween and supported by the support portions. The floating portion includes a pair of excitation electrodes facing each other and a piezoelectric thin film provided therebetween. The reinforcing films are formed in the vicinities of the boundaries between the floating portion and the support portions of the thin film member.

摘要翻译： 一种压电薄膜谐振器，其确保膜的强度而不降低谐振特性，并且可以在安装时容易地处理。 压电薄膜谐振器具有基板，薄膜构件和增强膜。 薄膜构件具有由基板支撑的至少两个支撑部分和设置在基板上方的浮动部分，其间设置有由该支撑部分支撑的空间。 浮动部包括彼此面对的一对激励电极和设置在它们之间的压电薄膜。 增强膜形成在浮动部分和薄膜构件的支撑部分之间的边界附近。

公开(公告)号：US07259032B2

公开(公告)日：2007-08-21

申请号：US10713253

申请日：2003-11-17

申请人： Koji Murata ,  Takashi Iwamoto ,  Hiroki Horiguchi ,  Ryuichi Kubo ,  Hidetoshi Fujii ,  Naoko Aizawa

发明人： Koji Murata ,  Takashi Iwamoto ,  Hiroki Horiguchi ,  Ryuichi Kubo ,  Hidetoshi Fujii ,  Naoko Aizawa

IPC分类号： H01L21/00

CPC分类号： H03H9/0557 ,  H01L24/97 ,  H01L2221/68345 ,  H01L2224/05568 ,  H01L2224/16 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01041 ,  H01L2924/01042 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/01051 ,  H01L2924/01073 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/09701 ,  H01L2924/15787 ,  H01L2924/163 ,  H01L2924/3025 ,  H03H3/02 ,  H03H3/08 ,  H03H9/059 ,  H03H9/1085 ,  H03H9/564 ,  H01L2224/85 ,  H01L2924/00 ,  H01L2224/05599

摘要： A method for manufacturing an electronic device includes the steps of forming a first resist pattern on a primary surface of a SAW element, the first resist pattern having openings at positions corresponding to those at which bumps and a sealing frame are to be formed, sequentially forming metals over the first resist pattern, the metals being formed into adhesion layers, barrier metal layers, and solder layers, removing the first resist pattern on the SAW element such that the bumps and the sealing frame are simultaneously formed. When the bumps and the sealing frame of the SAW element are bonded to bond electrodes of the bond substrate, the solder layers are melted and alloyed by heating.

摘要翻译： 一种制造电子器件的方法包括以下步骤：在SAW元件的主表面上形成第一抗蚀剂图案，第一抗蚀剂图案在与要形成凸块和密封框的位置相对应的位置处具有开口，顺序地形成 第一抗蚀剂图案上的金属，金属形成粘合层，阻挡金属层和焊料层，去除SAW元件上的第一抗蚀剂图案，使得凸块和密封框架同时形成。 当SAW元件的凸起和密封框架结合到接合衬底的接合电极时，焊料层通过加热而熔化并合金化。

公开(公告)号：US08123966B2

公开(公告)日：2012-02-28

申请号：US11956699

申请日：2007-12-14

申请人： Ryuichi Kubo ,  Hidetoshi Fujii ,  Naoko Aizawa

发明人： Ryuichi Kubo ,  Hidetoshi Fujii ,  Naoko Aizawa

IPC分类号： B44C1/22

CPC分类号： H03H9/02133 ,  H03H3/02 ,  H03H3/08 ,  H03H9/0523 ,  H03H9/105 ,  H03H9/1092 ,  H03H9/174 ,  H03H9/588

摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.

摘要翻译： 提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。 响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。 压电元件包括​​焊盘，焊盘输入并输出输入和输出信号。 作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。 外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

公开(公告)号：US07436102B2

公开(公告)日：2008-10-14

申请号：US11270259

申请日：2005-11-10

申请人： Hidetoshi Fujii ,  Ryuichi Kubo

发明人： Hidetoshi Fujii ,  Ryuichi Kubo

IPC分类号： H01L41/08

CPC分类号： H03H3/02 ,  H03H9/173 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49155

摘要： A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.

摘要翻译： 一种压电薄膜谐振器的制造方法，其特征在于，在基板上形成牺牲层，对牺牲层进行等离子体处理，使牺牲层的端面部的表面粗糙度（Ra）为5nm以下， 形成带状电介质膜，以连续地设置在基板的表面和牺牲层的端面部分和主表面上，形成包括下电极，上电极和 设置在其间的压电薄膜，使得下电极的一部分和上电极的一部分在电介质膜上的区域彼此面对，该区域设置在牺牲层的上部，并且去除牺牲层 以在衬底和电介质膜之间形成气隙。

公开(公告)号：US20070013268A1

公开(公告)日：2007-01-18

申请号：US10558592

申请日：2004-04-07

申请人： Ryuichi Kubo ,  Hidetoshi Fujii ,  Naoko Aizawa

发明人： Ryuichi Kubo ,  Hidetoshi Fujii ,  Naoko Aizawa

IPC分类号： H01L41/00

CPC分类号： H03H9/02133 ,  H03H3/02 ,  H03H3/08 ,  H03H9/0523 ,  H03H9/105 ,  H03H9/1092 ,  H03H9/174 ,  H03H9/588

摘要： A piezoelectric electronic component for use in a cellular phone or the like and capable of achieving reductions in size and profile is provided. A piezoelectric element oscillating in response to application of an input signal and outputting an output signal corresponding to the oscillations is provided on a substrate. The piezoelectric element includes a pad, the pad inputting and outputting the input and output signals. A shell member serving as a sealing member and having an insulation film covering the piezoelectric element is provided on the substrate, the shell member being remote from the piezoelectric element. The shell member includes a through hole above the pad, and the through hole is occluded with an electrode.

摘要翻译： 提供了一种用于蜂窝电话等并且能够实现尺寸和轮廓减小的压电电子部件。 响应于施加输入信号而振荡并输出对应于振荡的输出信号的压电元件设置在基板上。 压电元件包括​​焊盘，焊盘输入并输出输入和输出信号。 作为密封构件的壳体构件，具有覆盖压电元件的绝缘膜，设置在基板上，壳体构件远离压电元件。 外壳构件包括在焊盘上方的通孔，并且通孔被电极吸住。

公开(公告)号：US08726475B2

公开(公告)日：2014-05-20

申请号：US12203412

申请日：2008-09-03

申请人： Hidetoshi Fujii ,  Ryuichi Kubo

发明人： Hidetoshi Fujii ,  Ryuichi Kubo

IPC分类号： H03H3/02 ,  H03H3/08

CPC分类号： H03H3/02 ,  H03H9/173 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49155

摘要： A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.

摘要翻译： 一种压电薄膜谐振器的制造方法，其特征在于，在基板上形成牺牲层，对牺牲层进行等离子体处理，使牺牲层的端面部的表面粗糙度（Ra）为5nm以下， 形成带状电介质膜，以连续地设置在基板的表面和牺牲层的端面部分和主表面上，形成包括下电极，上电极和 设置在其间的压电薄膜，使得下电极的一部分和上电极的一部分在电介质膜上的区域彼此面对，该区域设置在牺牲层的上部，并且去除牺牲层 以在衬底和电介质膜之间形成气隙。

公开(公告)号：US20080178444A1

公开(公告)日：2008-07-31

申请号：US12053883

申请日：2008-03-24

申请人： Hidetoshi Fujii ,  Ryuichi Kubo

发明人： Hidetoshi Fujii ,  Ryuichi Kubo

IPC分类号： H01L41/22

CPC分类号： H03H3/04 ,  H03H9/173 ,  H03H2003/021 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49798

摘要： A piezoelectric thin film resonator which can reduce variations in resonant frequency and resonant resistance by uniformly planarizing a structural film, and a method of manufacturing the piezoelectric thin film resonator. The piezoelectric thin film resonator has a substrate having at least one flat major surface; a dielectric film having two support portions supported by the major surface of the substrate and a floating portion which is connected to the support portions and which is disposed over the major surface of the substrate with an airspace layer provided therebetween; and a vibration portion which is formed of a pair of electrodes and a piezoelectric thin film provided therebetween and which is provided on the floating portion of the dielectric film at a side opposite to the airspace layer. A surface of the dielectric film at a side opposite to the substrate is planarized by a plasma treatment using an inert gas or a gas containing an element forming a dielectric film.

摘要翻译： 一种通过均匀平坦化结构膜可以减小谐振频率和谐振电阻的变化的压电薄膜谐振器，以及制造压电薄膜谐振器的方法。 压电薄膜谐振器具有至少一个平坦主表面的基板; 具有由基板的主表面支撑的两个支撑部分的电介质膜和与支撑部分连接并且设置在基板的主表面上方的浮动部分，其间设置有空间层; 以及由一对电极和设置在它们之间的压电薄膜形成的振动部分，并且设置在与空气空间层相对的一侧的电介质膜的浮动部分上。 通过使用惰性气体或含有形成电介质膜的元素的气体进行等离子体处理，在与基板相对的一侧的电介质膜的表面平坦化。

公开(公告)号：US08776334B2

公开(公告)日：2014-07-15

申请号：US12053883

申请日：2008-03-24

申请人： Hidetoshi Fujii ,  Ryuichi Kubo

发明人： Hidetoshi Fujii ,  Ryuichi Kubo

IPC分类号： H01L41/22 ,  H01L41/083

CPC分类号： H03H3/04 ,  H03H9/173 ,  H03H2003/021 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49798

摘要： A method of manufacturing a piezoelectric thin film resonator which can reduce variations in resonant frequency and resonant resistance by uniformly planarizing a structural film. The method of manufacturing the piezoelectric thin film resonator includes the steps of forming sacrifice layer patterns on an upper surface of a mother substrate; forming a dielectric film on the sacrifice layer patterns; processing a surface of the dielectric film by a plasma treatment; forming vibration portions on the dielectric film, the vibration portions each being composed of two excitation electrodes and a piezoelectric thin film provided therebetween; etching the sacrifice layer patterns; and cutting the mother substrate into separate piezoelectric thin film resonators.

摘要翻译： 一种压电薄膜谐振器的制造方法，其通过均匀平坦化结构膜可以减小谐振频率和谐振电阻的变化。 制造压电薄膜谐振器的方法包括以下步骤：在母基板的上表面上形成牺牲层图案; 在牺牲层图案上形成介电膜; 通过等离子体处理来处理电介质膜的表面; 在所述电介质膜上形成振动部，所述振动部分由两个激励电极和设置在其间的压电薄膜构成; 蚀刻牺牲层图案; 并将母基板切割成分离的压电薄膜谐振器。

公开(公告)号：US20070152540A1

公开(公告)日：2007-07-05

申请号：US11714870

申请日：2007-03-07

申请人： Hidetoshi Fujii ,  Ryuichi Kubo

发明人： Hidetoshi Fujii ,  Ryuichi Kubo

IPC分类号： H01L41/00

CPC分类号： H03H3/04 ,  H03H9/173 ,  H03H2003/021 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49798

摘要： A piezoelectric thin film resonator which can reduce variations in resonant frequency and resonant resistance by uniformly planarizing a structural film, and a method of manufacturing the piezoelectric thin film resonator. The piezoelectric thin film resonator has a substrate having at least one flat major surface; a dielectric film having two support portions supported by the major surface of the substrate and a floating portion which is connected to the support portions and which is disposed over the major surface of the substrate with an airspace layer provided therebetween; and a vibration portion which is formed of a pair of electrodes and a piezoelectric thin film provided therebetween and which is provided on the floating portion of the dielectric film at a side opposite to the airspace layer. A surface of the dielectric film at a side opposite to the substrate is planarized by a plasma treatment using an inert gas or a gas containing an element forming a dielectric film.

摘要翻译： 一种通过均匀平坦化结构膜可以减小谐振频率和谐振电阻的变化的压电薄膜谐振器，以及制造压电薄膜谐振器的方法。 压电薄膜谐振器具有至少一个平坦主表面的基板; 具有由基板的主表面支撑的两个支撑部分的电介质膜和与支撑部分连接并且设置在基板的主表面上方的浮动部分，其间设置有空间层; 以及由一对电极和设置在它们之间的压电薄膜形成的振动部分，并且设置在与空气空间层相对的一侧的电介质膜的浮动部分上。 通过使用惰性气体或含有形成电介质膜的元素的气体进行等离子体处理，在与基板相对的一侧的电介质膜的表面平坦化。