摘要:
A structure for suppressing localized metal precipitate formation (LMPF) in semiconductor processing. For each metal wire that is exposed to the manufacturing environment and is electrically coupled to an N region, at least one P+ region is formed electrically coupled to the same metal wire. As a result, few excess electrons are available to combine with metal ions to form localized metal precipitate at the metal wire. A monitoring ramp terminal can be formed around and electrically disconnected from the metal wire. By applying a voltage difference to the metal wire and the monitoring ramp terminal and measuring the resulting current flowing through the metal wire and the monitoring ramp terminal, it can be determined whether localized metal precipitate is formed at the metal wire.
摘要:
A structure for suppressing localized metal precipitate formation (LMPF) in semiconductor processing. For each metal wire that is exposed to the manufacturing environment and is electrically coupled to an N region, at least one P+ region is formed electrically coupled to the same metal wire. As a result, few excess electrons are available to combine with metal ions to form localized metal precipitate at the metal wire. A monitoring ramp terminal can be formed around and electrically disconnected from the metal wire. By applying a voltage difference to the metal wire and the monitoring ramp terminal and measuring the resulting current flowing through the metal wire and the monitoring ramp terminal, it can be determined whether localized metal precipitate is formed at the metal wire.
摘要:
A method is disclosed of determining allowable antenna limits for semiconductor-on-insulator (SOI) technology. In one embodiment, the method may include: determining antenna area on a gate; determining antenna area on a source/drain; determining a total gate insulator area between gate and source/drain nets; and calculating allowable antenna area as a function of the total gate insulator area between the nets such that a larger total antenna area is allowed for larger total gate insulator area between the nets.
摘要:
Method embodiments herein determine a connection order in which connections will be made to connect active devices to antennas within a given circuit design. The method also evaluates the possibilities that these connections to the antennas will cause charging damage in the devices that are connected to the antennas. Such possibilities are based on the connection order, the size of the antennas, and the likelihood that charges will flow from the antennas through insulators of the devices. If a significant possibility for damage exists, the method can reduce the size of the antenna.
摘要:
A method and apparatus for determining the complete coverage of a passivating material on the final conductive interconnection of a wafer containing integrated circuits. A test structure with the dimensions of the final interconnections of the integrated circuits is formed during manufacture of the integrated circuits and used to determine complete coverage of the wafer by creating an opening in the passivating material at the test structure, the size of the opening being indicative of the complete coverage of the wafer.
摘要:
A dynamic bus system with a central precharge device is disclosed that utilizes a controller circuit with a one-shot generator and write synchronizing circuits in combination with logic output modules having pull-up/down devices. The issuance of the output enable (OE) signals is interlocked with the turn-off of the precharge. Thus, data is written to the dynamic bus only when the precharge device is inactive, avoiding bus collisions. The resulting circuitry not only ensures the precharging of the bus before the data write to the bus, but will allow the synchronized OE signals to be issued during the same clock phase as the precharge signal.