公开(公告)号：US08851113B2

公开(公告)日：2014-10-07

申请号：US13431946

申请日：2012-03-27

Applicant: Mark Taskar ,  Iqbal Shareef

Inventor： Mark Taskar ,  Iqbal Shareef

IPC: F16K11/20

CPC classification number: B01F3/026 ,  Y10T137/0318 ,  Y10T137/87249 ,  Y10T137/87281 ,  Y10T137/87652 ,  Y10T137/87885

Abstract: Methods and apparatus for shared gas panel for supplying a process gas to a plurality of process modules are disclosed. The shared gas panel includes a plurality of mixing valves and at least two mixing manifolds for a given mixing valve to service at least two process modules. The mixing manifolds are disposed on a given plane and staggered to save space. Components of the shared gas panel are also stacked vertically in order to reduce volume of the shared gas panel enclosure. Components are optimized such that the two mixing manifolds coupled to the given mixing valve receive equal mass flow to eliminate matching issues.

Abstract translation: 公开了用于向多个处理模块提供处理气体的共用气体面板的方法和装置。 共用气体面板包括多个混合阀和用于给定混合阀的至少两个混合歧管，以用于至少两个过程模块。 混合歧管布置在给定的平面上并交错以节省空间。 共用气体面板的组件也垂直堆叠，以减少共用气体面板外壳的体积。 优化组件使得耦合到给定混合阀的两个混合歧管获得相等的质量流量以消除匹配问题。

公开(公告)号：US08794267B2

公开(公告)日：2014-08-05

申请号：US12810756

申请日：2008-12-17

Applicant: Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

Inventor： Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

IPC: F16K11/10

CPC classification number: H01L21/67069 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/877 ,  Y10T137/87885

Abstract: In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

Abstract translation: 在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个多个MFC流体连接的混合歧管，多个混合歧管出口位于 混合歧管 以及与多个混合歧管出口中的每一个流体连接的隔离装置。

公开(公告)号：US20120318362A1

公开(公告)日：2012-12-20

申请号：US13220890

申请日：2011-08-30

Applicant: Mark Taskar ,  Iqbal Shareef

Inventor： Mark Taskar ,  Iqbal Shareef

IPC: F15D1/00

CPC classification number: F17D1/00 ,  B08B15/002 ,  B08B15/04 ,  F17C1/00 ,  F17C2221/031 ,  G01M3/22 ,  Y10T137/0318 ,  Y10T137/6851 ,  Y10T137/7736 ,  Y10T137/7761 ,  Y10T137/86107

Abstract: A method and apparatus is provided for decreasing the scrubber exhaust from gas panels, lower the cost of operation, lower the facilitation cost and power consumption by increasing the air velocity in areas of high potential risk of ignition. The apparatus includes a supply of compressed dry air (CDA) through the tubing with individual dispersion nozzles. The CDA dispersion nozzles can be installed at various key locations in order to provide additional ventilation turbulence and reduce potential dead zones inside the gas panel. Aspects of the invention help to save the energy and protect the environment by reducing the power consumption. In addition human safety shall be improved by minimizing the potential risk of ignition.

Abstract translation: 提供一种方法和装置，用于减少来自气体面板的洗涤器排气，降低操作成本，通过在高潜在的点火风险区域中增加空气速度来降低便利成本和功率消耗。 该设备包括通过具有各个分散喷嘴的管道供应压缩干燥空气（CDA）。 CDA分散喷嘴可以安装在各种关键位置，以便提供额外的通风湍流并减少气体面板内的潜在死区。 本发明的方面有助于通过降低功耗来节省能源和保护环境。 另外，通过最小化潜在的点火风险，可以改善人身安全。

公开(公告)号：US08202393B2

公开(公告)日：2012-06-19

申请号：US12230089

申请日：2008-08-22

Applicant: Harry P. Wong ,  Vernon Wong ,  Christopher Charles Griffin ,  Mark Taskar

Inventor： Harry P. Wong ,  Vernon Wong ,  Christopher Charles Griffin ,  Mark Taskar

IPC: H01L21/00 ,  C23C16/00 ,  C23C14/00

CPC classification number: C23C16/45523 ,  C23C16/4412 ,  C23C16/45561 ,  C23C16/5096 ,  H01J37/3244 ,  H01J37/32449

Abstract: A gas distribution system for supplying a gas mixture to a plasma process chamber is provided. A first valve arrangement is connected to upstream ends of a first gas line and a second gas line. A second valve arrangement is connected to downstream ends of the first gas line and the second gas line. A first gas distribution outlet line is connected between a gas supply and the first valve arrangement and a first chamber inlet line connected between the second valve arrangement and the plasma process chamber. A first evacuation line is connected to the first gas line at a location between the first valve arrangement and the second valve arrangement. A second evacuation line is connected to the second gas line at a location between the first valve arrangement and the second valve arrangement. The first evacuation line and second evacuation line are in fluid communication with a vacuum line. A controller is operable to actuate the first valve arrangement and second valve arrangement to selectively flow the gas mixture from the gas supply to the plasma process chamber through the first gas line while the second gas is selectively evacuated by the vacuum line; or to selectively flow the gas mixture from the gas supply to the plasma process chamber through the second gas line while the first gas line is selectively evacuated by the vacuum line.

Abstract translation: 提供了一种用于将气体混合物供应到等离子体处理室的气体分配系统。 第一阀装置连接到第一气体管线和第二气体管线的上游端。 第二阀装置连接到第一气体管线和第二气体管线的下游端。 第一气体分配出口管线连接在气体供应源和第一阀装置之间，连接在第二阀装置和等离子体处理室之间的第一室入口管线。 在第一阀装置和第二阀装置之间的位置处，第一排气管线连接到第一气体管线。 在第一阀装置和第二阀装置之间的位置处，第二排气管线连接到第二气体管线。 第一排气管线和第二排气管线与真空管线流体连通。 控制器可操作以致动第一阀装置和第二阀装置，以选择性地将气体混合物从气体供应通过第一气体管道流动到等离子体处理室，同时第二气体被真空管线选择性地抽真空; 或者通过第二气体管线将气体混合物从气体供给选择性地流动到等离子体处理室，同时第一气体管线被真空管线选择性抽真空。

公开(公告)号：US20110005601A1

公开(公告)日：2011-01-13

申请号：US12810756

申请日：2008-12-17

Applicant: Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

Inventor： Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

IPC: F15D1/00

CPC classification number: H01L21/67069 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/877 ,  Y10T137/87885

Abstract: In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

Abstract translation: 在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个多个MFC流体连接的混合歧管，多个混合歧管出口位于 混合歧管 以及与多个混合歧管出口中的每一个流体连接的隔离装置。

公开(公告)号：US20080302434A1

公开(公告)日：2008-12-11

申请号：US11761326

申请日：2007-06-11

Applicant: Mark Taskar

Inventor： Mark Taskar

IPC: F17D1/04

CPC classification number: F16K27/003 ,  Y10T137/87249 ,  Y10T137/87885

Abstract: A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.

Abstract translation: 一种具有气体面板的柔性气体输送装置，其具有第一部分和第二部分，所述第一延伸部分具有第一部分和第二部分，所述第一部分位于混合阀和所述基底之间，所述第一部分具有与泵/清洗歧管流体连通的出口， 延伸块具有第一部分和第二部分，所述第一部分位于清洗阀和所述基板之间，所述基板具有与混合歧管流体连通的排出口，其中所述第一和第二延伸块的第二部分从气体向外延伸 面板。