ATOMIC LAYER DEPOSITION APPARATUS
    21.
    发明申请
    ATOMIC LAYER DEPOSITION APPARATUS 审中-公开
    原子层沉积装置

    公开(公告)号:US20150184295A1

    公开(公告)日:2015-07-02

    申请号:US14407963

    申请日:2013-06-19

    Inventor: In Kwon Jeong

    CPC classification number: C23C16/45565 C23C16/45551

    Abstract: An apparatus for depositing atomic layers coats first and second reaction layers alternately on a substrate by repeating injection of source precursor and purge gas from a showerhead with the showerhead moving forward and injection of reactant precursor and the purge gas from the showerhead with the showerhead moving backward. The precursors and purge gas injected are exhausted in real time through the showerhead. Mixing of the source and reactant precursors is prevented by the alternate injections of the source and reactant precursors. Throughput is improved by the simultaneous injections of the precursor and the purge gas. By minimizing a moving distance of the showerhead, a footprint is reduced and the apparatus can be used for large size substrates. It is also possible to deposit the atomic layers selectively on a specific selected region.

    Abstract translation: 用于沉积原子层的装置在第一和第二反应层上交替地涂覆在基底上,通过重复地从喷头喷射源前体和吹扫气体,喷头向前移动并且喷射反应物前体和吹扫气体与喷淋头一起向后移动 。 喷射的前体和吹扫气体通过喷头实时耗尽。 通过交替注射源和反应物前体来防止源和反应物前体的混合。 通过同时注射前体和吹扫气体来提高吞吐量。 通过最小化喷头的移动距离,减少了占地面积,并且该装置可用于大尺寸基板。 还可以将原子层选择性地沉积在特定的选定区域上。

    THERMALLY INSULATIVE COMPOSITIONS FOR A SOLAR PANEL COATING

    公开(公告)号:US20240250191A1

    公开(公告)日:2024-07-25

    申请号:US18158901

    申请日:2023-01-24

    Applicant: Nanotech Inc.

    CPC classification number: H01L31/02168 C09D7/61 H01L31/0481

    Abstract: Compositions of matter for coating a solar panel are provided to increase the solar panel's efficiency. The solar panel coating may be applied to the outermost transparent layer of the solar panel that is exposed to the ambient environment, or in some instances, may be integrated with the outermost transparent layer. The solar panel coating allows enough light to pass through and reach the solar cells while also reducing heat transfer to the solar panel, thereby slowing the rate at which the solar panel heats up. The solar panel coating reduces heat transfer and promotes cooling of the solar panel at least in part by increasing emissivity of the solar panel's surface. The solar panel coating therefore elevates the solar panel's performance while adding minimal thickness to the solar panel.

    BED ASSEMBLY
    30.
    发明申请

    公开(公告)号:US20210275373A1

    公开(公告)日:2021-09-09

    申请号:US16809407

    申请日:2020-03-04

    Inventor: James Tang

    Abstract: A bed assembly includes a bed having a head end, a foot end and a frame which is connected between the head end and the foot end. A water-proof pad is located between the head end and the foot end. The water-proof pad can be tightened, loosened and movable up and down. A bed board unit is pivotably connected to two sides of the frame so that the bed board unit is opened and closed when needed. An inflatable tub or bedpan is located beneath the bed so that when the bed board unit is opened, the patient can use the inflatable tub or the bedpan and does not have to be removed from the bed.

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