Piezoelectric Accelerometer with Wake Function

    公开(公告)号:US20220308084A1

    公开(公告)日:2022-09-29

    申请号:US17807319

    申请日:2022-06-16

    IPC分类号: G01P15/09 H04R19/04 G01P1/00

    摘要: A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

    Acoustic Transducer with Gap-Controlling Geometry and Method of Manufacturing an Acoustic Transducer

    公开(公告)号:US20220248145A1

    公开(公告)日:2022-08-04

    申请号:US17675850

    申请日:2022-02-18

    摘要: A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.

    PIEZOELECTRIC MEMS MICROPHONE
    29.
    发明申请

    公开(公告)号:US20210273152A1

    公开(公告)日:2021-09-02

    申请号:US17180193

    申请日:2021-02-19

    摘要: A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.

    Piezoelectric MEMS microphone
    30.
    发明授权

    公开(公告)号:US10964880B2

    公开(公告)日:2021-03-30

    申请号:US16196922

    申请日:2018-11-20

    摘要: A microphone including a casing having a front wall, a back wall, and a side wall joining the front wall to the back wall, a transducer mounted to the front wall, the transducer including a substrate and a transducing element, the transducing element having a transducer acoustic compliance dependent on the transducing element dimensions, a back cavity cooperatively defined between the back wall, the side wall, and the transducer, the back cavity having a back cavity acoustic compliance. The transducing element is dimensioned such that the transducing element length matches a predetermined resonant frequency and the transducing element width, thickness, and elasticity produces a transducer acoustic compliance within a given range of the back cavity acoustic compliance.