公开(公告)号：US5554859A

公开(公告)日：1996-09-10

申请号：US557678

申请日：1995-11-13

申请人： Takeo Tsukamoto ,  Nobuo Watanabe ,  Toshihiko Takeda ,  Masahiko Okunuki

发明人： Takeo Tsukamoto ,  Nobuo Watanabe ,  Toshihiko Takeda ,  Masahiko Okunuki

IPC分类号： H01J1/308 ,  H01J9/02 ,  H01L29/06 ,  H01L29/12

CPC分类号： H01J1/308 ,  H01J9/022

摘要： This is an electron emission with a semiconductor substrate having a p-type semiconductor layer whose impurity concentration falls within a concentration range for causing an avalanche breakdown in a least a portion of a surface of the semiconductor layer. A Schottky electrode is connected to the semiconductor layer. There are a means for applying a reverse bias voltage between the Schottky electrode and the p-type semiconductor layer to cause the Schotty electrode to emit electrons, and a lead electrode, formed at a proper position, for externally guiding the emitted electrons. At least a portion of the Schottky electrode is formed of a thin film of a material selected from metals of Group 1A, Group 2A, Group 3A, and lanthanoids, metal silicides of Group 1A, Group 2A, Group Group 3A, and lanthanoids, and metal borides of Group 1A, Group 2A, Group 3A, and lanthanoids, and metal carbides of Group 4A. A film thickness of the Schotty electrode is set to be not more than 100 .ANG..

摘要翻译： 这是具有半导体衬底的电子发射，其半导体衬底具有p型半导体层，其杂质浓度落在半导体层的表面的至少一部分中引起雪崩击穿的浓度范围内。 肖特基电极连接到半导体层。 存在在肖特基电极和p型半导体层之间施加反向偏置电压以使Schotty电极发射电子的装置和形成在适当位置的引线电极，用于外部引导发射的电子。 肖特基电极的至少一部分由选自组1A，组2A，组3A和镧系元素的金属的薄膜，组1A，组2A，组3A和镧系元素的金属硅化物形成，以及 第1A组，第2A组，第3A组和镧系金属硼化物，以及4A组金属碳化物。 将Schotty电极的膜厚设定为不超过100。

公开(公告)号：US5107311A

公开(公告)日：1992-04-21

申请号：US560769

申请日：1990-07-31

申请人： Takeo Tsukamoto ,  Nobuo Watanabe ,  Masahiko Okunuki

发明人： Takeo Tsukamoto ,  Nobuo Watanabe ,  Masahiko Okunuki

IPC分类号： H01L33/00 ,  H01L33/24 ,  H01L33/30

CPC分类号： H01L33/24 ,  H01L33/0008 ,  H01L33/0033 ,  H01L33/0054 ,  H01L33/305

摘要： A semiconductor light emitting device comprises a substrate, an n-type semiconductor layer formed on the substrate, a p-type semiconductor layer formed on a portion of a surface of the n-type semiconductor layer, an electrode for applying a reverse biasing voltage to the PN junction to cause an avalanche breakdown and an area formed in a portion of the PN junction. The p-type semiconductor layers forms a planar type PN junction with the n-type semiconductor layer. The area formed in a portion of the PN junction has a lower break down voltage than that of other area.

公开(公告)号：US20100329429A1

公开(公告)日：2010-12-30

申请号：US12875745

申请日：2010-09-03

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： H01J35/06 ,  H01J35/00

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多个X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）穿过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从X 将壁部分（25）的射线提取窗口（27）进入大气。

公开(公告)号：US4999083A

公开(公告)日：1991-03-12

申请号：US415766

申请日：1989-10-02

申请人： Nobuo Watanabe ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Haruhito Ono ,  Masahiko Okunuki

发明人： Nobuo Watanabe ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Haruhito Ono ,  Masahiko Okunuki

IPC分类号： H01L21/302 ,  C23F1/02 ,  H01L21/306

CPC分类号： C23F1/02 ,  H01L21/30604

摘要： A fine working method of a crystalline material comprises forming an ion injection region in a crystalline material by irradiating a focused ion beam on a crystalline material and subsequently removing a predetermined region of the ion injection region by applying a chemical etching treatment. The method includes performing ion injection where no removal of the predetermined region occurs even if the crystalline material is exposed to an etchant. The predetermined region is removed by injecting an etchant into the ion injection region.

公开(公告)号：US20110085641A1

公开(公告)日：2011-04-14

申请号：US12971849

申请日：2010-12-17

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： G01N23/04 ,  H01J35/00 ,  H01J35/12 ,  H01J35/30 ,  H01J35/08

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi-X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi-electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi-X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）通过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从 壁部分（25）的X射线提取窗口（27）进入大气。

公开(公告)号：US5285079A

公开(公告)日：1994-02-08

申请号：US48946

申请日：1993-04-20

申请人： Takeo Tsukamoto ,  Nobuo Watanabe ,  Masahiko Okunuki

发明人： Takeo Tsukamoto ,  Nobuo Watanabe ,  Masahiko Okunuki

IPC分类号： H01J1/308 ,  H01L29/161 ,  H01J1/14 ,  H01L29/205 ,  H01L29/225

CPC分类号： H01J1/308

摘要： An electron emitting device is provided for use in a flat display, an electron beam drawing apparatus, a CRT display and so on. The electron emitting device comprises a first layer having a first bandgap, a second layer formed on the first layer and having the first bandgap, a third layer formed on the second layer and having a second bandgap, which is narrower than the first bandgap, and a fourth layer formed on the third layer and having an electron emitting surface. According to this structure, a high electron emission efficiency can be obtained.

摘要翻译： 电子发射装置用于平板显示器，电子束描绘装置，CRT显示器等。 电子发射器件包括具有第一带隙的第一层，形成在第一层上并具有第一带隙的第二层，形成在第二层上并具有比第一带隙窄的第二带隙的第三层，以及 形成在第三层上并具有电子发射表面的第四层。 根据该结构，可以获得高电子发射效率。

公开(公告)号：US08861682B2

公开(公告)日：2014-10-14

申请号：US13370478

申请日：2012-02-10

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： H01J35/06 ,  H01J35/18 ,  H01J35/16 ,  H01J35/08

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi-X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi-electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi-X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）通过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从 壁部分（25）的X射线提取窗口（27）进入大气。

公开(公告)号：US20120140895A1

公开(公告)日：2012-06-07

申请号：US13370478

申请日：2012-02-10

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： H01J35/16

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi-X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi-electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi-X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）通过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从 壁部分（25）的X射线提取窗口（27）进入大气。

公开(公告)号：US07889844B2

公开(公告)日：2011-02-15

申请号：US12875745

申请日：2010-09-03

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： H01J35/00

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多个X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）穿过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从X 将壁部分（25）的射线提取窗口（27）进入大气。

公开(公告)号：US20090316860A1

公开(公告)日：2009-12-24

申请号：US12281453

申请日：2007-03-02

申请人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

发明人： Masahiko Okunuki ,  Osamu Tsujii ,  Takeo Tsukamoto

IPC分类号： H01J35/06 ,  H01J35/08

CPC分类号： H01J35/065 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/087 ,  H01J2235/166 ,  H01J2235/168

摘要： A compact apparatus can form multi X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements (15) of a multi electron beam generating unit (12) receive the lens effect of a lens electrode (19). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion (13) of an anode electrode (20). The multi X-ray beams (x) generated by the transmission-type target portion (13) pass through an X-ray shielding plate (23) and X-ray extraction portions (24) in a vacuum chamber and are extracted from the X-ray extraction windows (27) of a wall portion (25) into the atmosphere.

摘要翻译： 紧凑的装置可以形成具有良好可控性的多个X射线束。 从多电子束产生单元（12）的电子发射元件（15）发射的电子束（e）接收透镜电极（19）的透镜效应。 通过阳极电极（20）的透射型目标部分（13）的部分将所得的电子束加速到最终的电位。 由透射型目标部分（13）产生的多个X射线束（x）穿过真空室中的X射线屏蔽板（23）和X射线提取部分（24），并从X 将壁部分（25）的射线提取窗口（27）进入大气。