Coil actuated pressure sensor and deformable substrate

    公开(公告)号:US10955306B2

    公开(公告)日:2021-03-23

    申请号:US16390355

    申请日:2019-04-22

    Abstract: A pressure sensor comprises a deformable substrate, at least one coil supported by the substrate and responsive to a changing coil drive signal to produce a changing magnetic field, a fluid chamber having a first wall formed by the substrate and a second wall formed by a conductive material and positioned proximate to the at least one coil so that the changing magnetic field produces eddy currents within the conductive material that generate a reflected magnetic field, and at least one magnetic field sensing element configured to detect the reflected magnetic field and produce a signal responsive to a distance between the magnetic field sensing element and the second wall. The substrate is deformable by fluid pressure within the fluid chamber and the deformation of the substrate changes the distance between the magnetic field sensing element and the second wall.

    COIL ACTUATED PRESSURE SENSOR AND DEFLECTABLE SUBSTRATE

    公开(公告)号:US20200284676A1

    公开(公告)日:2020-09-10

    申请号:US16295131

    申请日:2019-03-07

    Abstract: A pressure sensor includes a conductive substrate having a cavity which forms a thin portion that can be deformed by a pressure differential. A magnetic field sensor has at least one coil responsive to a changing coil drive signal and positioned proximate to the thin portion of the substrate that induces eddy currents in the thin portion that generate a reflected magnetic field. Magnetic field sensing elements detect the reflected magnetic field and generate a magnetic field signal. The magnetic field sensor is positioned so that deformation of the thin portion of the substrate causes a distance between the thin portion of the substrate and the magnetic field sensor to change.

    Magnetic Field Sensor For Measuring An Amplitude And A Direction Of A Magnetic Field Using One Or More Magnetoresistance Elements Having Reference Layers With The Same Magnetic Direction

    公开(公告)号:US20200116799A1

    公开(公告)日:2020-04-16

    申请号:US16157313

    申请日:2018-10-11

    Abstract: A magnetic field sensor can include a substrate disposed in an x-y plane with x and y axes; one or more magnetoresistance elements, wherein magnetic directions of reference layers of each of the one or more magnetoresistance elements are parallel to the x axis; wherein the one or more magnetoresistance elements are operable to generate a magnetoresistance element signal; a first current conductor operable to generate a first AC magnetic field in an x-direction and a second current conductor operable to generate a second AC magnetic field in a y-direction; and a component determination circuit comprising at least two of: a first demodulator to demodulate the magnetoresistance element signal with a first clock signal with a first frequency, a second demodulator coupled to demodulate the magnetoresistance element signal with the first clock signal or with a second clock signal with a second frequency, or a low pass filter operable to filter the magnetoresistance element signal.

    Magnetic field sensor having magnetoresistance elements with opposite bias directions

    公开(公告)号:US10578684B2

    公开(公告)日:2020-03-03

    申请号:US15895418

    申请日:2018-02-13

    Abstract: A magnetic field sensor can include a substrate, a first magnetoresistance element disposed over the substrate and including a first maximum response axis and a first bias layer structure configured to generate a first bias magnetic field with a first magnetic direction between ninety degrees and sixty degrees relative to the first maximum response axis. The magnetic field sensor can also include a second magnetoresistance element disposed over the substrate and including a second maximum response axis parallel to the first maximum response axis and a second bias layer structure configured to generate a second bias magnetic field with a second magnetic direction parallel to the first magnetic direction and opposed to the first magnetic direction. The first and second magnetoresistance elements can each have a pair of electrical contacts for coupling to circuits.

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