ULTRASONIC TANK AND METHODS FOR UNIFORM GLASS SUBSTRATE ETCHING
    23.
    发明申请
    ULTRASONIC TANK AND METHODS FOR UNIFORM GLASS SUBSTRATE ETCHING 审中-公开
    超声波罐和均匀玻璃基板蚀刻的方法

    公开(公告)号:US20160035587A1

    公开(公告)日:2016-02-04

    申请号:US14810967

    申请日:2015-07-28

    Abstract: In some embodiments, an ultrasonic tank includes a container, an etching solution tank comprising a working area disposed within the container, and a plurality of ultrasonic transducers arranged about a perimeter of the etching solution tank in a configuration that provides a standard deviation of ultrasonic power within the working area of less than about 0.35.

    Abstract translation: 在一些实施例中,超声波箱包括容器,包括设置在容器内的工作区域的蚀刻溶液罐以及提供超声波功率的标准偏差的构造的围绕蚀刻溶液罐的周边布置的多个超声换能器 在工作区内小于0.35左右。

    Sacrificial Cover Layers for Laser Drilling Substrates and Methods Thereof
    24.
    发明申请
    Sacrificial Cover Layers for Laser Drilling Substrates and Methods Thereof 有权
    激光钻孔基板牺牲盖层及其方法

    公开(公告)号:US20140147623A1

    公开(公告)日:2014-05-29

    申请号:US14092536

    申请日:2013-11-27

    Abstract: A method for forming a plurality of precision holes in a substrate by drilling, including affixing a sacrificial cover layer to a surface of the substrate, positioning a laser beam in a predetermined location relative to the substrate and corresponding to a desired location of one of the plurality of precision holes, forming a through hole in the sacrificial cover layer by repeatedly pulsing a laser beam at the predetermined location, and pulsing the laser beam into the through hole formed in the sacrificial cover layer. A work piece having precision holes including a substrate having the precision holes formed therein, wherein a longitudinal axis of each precision hole extends in a thickness direction of the substrate, and a sacrificial cover layer detachably affixed to a surface of the substrate, such that the sacrificial cover layer reduces irregularities of the precision holes.

    Abstract translation: 一种用于通过钻孔在基板中形成多个精密孔的方法,包括将牺牲覆盖层固定到基板的表面,将激光束相对于基板定位在预定位置,并且对应于 多个精密孔,通过在预定位置重复地激励激光束在牺牲覆盖层中形成通孔,并将激光束脉冲到形成在牺牲覆盖层中的通孔中。 一种具有精密孔的工件,包括其中形成有精密孔的基板,其中每个精密孔的纵轴在基板的厚度方向上延伸,并且牺牲盖层可拆卸地固定到基板的表面,使得 牺牲覆盖层减少精密孔的不规则性。

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