公开(公告)号：US06540594B2

公开(公告)日：2003-04-01

申请号：US10071745

申请日：2002-02-08

申请人： Steven M. Zuniga ,  Manoocher Birang ,  Hung Chen ,  Sen-Hou Ko

发明人： Steven M. Zuniga ,  Manoocher Birang ,  Hung Chen ,  Sen-Hou Ko

IPC分类号： B24B500

CPC分类号： B24B37/30 ,  B24B37/32

摘要： A carrier head for a chemical mechanical polishing apparatus. The carrier head includes a housing, a base, a loading mechanism, a gimbal mechanism, and a substrate backing assembly. The substrate backing assembly includes a support structure positioned below the base, a substantially horizontal, annular flexure connecting the support structure to the base, and a flexible membrane connected to the support structure. The flexible membrane has a mounting surface for a substrate, and extends beneath the base to define a chamber.

公开(公告)号：US06277009B1

公开(公告)日：2001-08-21

申请号：US09478943

申请日：2000-01-06

申请人： Hung Chen ,  Steven M. Zuniga

发明人： Hung Chen ,  Steven M. Zuniga

IPC分类号： B24B722

CPC分类号： B24B37/30 ,  B24B37/32

摘要： A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane, the lower surface of which provides a substrate-receiving surface. The carrier head includes a compliant backing member with a plurality of cells which contact an upper surface of the flexible membrane to improve vacuum-chucking of the substrate.

摘要翻译： 用于化学机械抛光装置的载体头包括柔性膜，其下表面提供基板接收表面。 承载头包括具有多个单元的柔性背衬构件，所述多个单元接触柔性膜的上表面以改善基板的真空吸附。

公开(公告)号：US20130283556A1

公开(公告)日：2013-10-31

申请号：US13456796

申请日：2012-04-26

申请人： Hui Chen ,  Hung Chen ,  Jim Atkinson ,  David D. Huo

发明人： Hui Chen ,  Hung Chen ,  Jim Atkinson ,  David D. Huo

IPC分类号： A46B15/00 ,  A46D3/04 ,  A46B9/08

CPC分类号： A46B3/005 ,  A46B13/001 ,  H01L21/02096

摘要： In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes a scrubber brush having a body of open-cell foam including an interior surface, a sleeve received in contact with the scrubber brush, the sleeve including peripherally-spaced, longitudinal walls and reinforcing segments interconnecting adjacent ones of the longitudinal walls and forming elongated pockets along the length, the sleeve having raised ribs extending along the length, and a mandrel having recesses formed on an outer surface, the mandrel being coupled to the sleeve by receiving the raised ribs within the recesses. Scrubber brush subassemblies, high stiffness mandrels, and methods of assembly are provided, as are numerous other aspects.

摘要翻译： 在一个方面，提供了洗涤器刷组件。 洗涤器刷组件包括洗涤器刷，其具有包括内表面的开孔泡沫体，与洗涤器刷接触的套筒，套筒包括周向间隔开的纵向壁和将邻近的纵向壁相互连接的加强段 以及沿所述长度形成细长的袋，所述套筒具有沿所述长度延伸的凸肋，以及具有形成在外表面上的凹部的心轴，所述心轴通过容纳所述凹部内的所述凸肋而联接到所述套筒。 提供了洗涤刷组件，高刚度心轴和组装方法，以及许多其它方面。

公开(公告)号：US20130122782A1

公开(公告)日：2013-05-16

申请号：US13459071

申请日：2012-04-27

申请人： Shou-Sung Chang ,  Hung Chen ,  Lakshmanan Karuppiah ,  Paul D. Butterfield ,  Erik S. Rondum

发明人： Shou-Sung Chang ,  Hung Chen ,  Lakshmanan Karuppiah ,  Paul D. Butterfield ,  Erik S. Rondum

IPC分类号： B24B49/16

CPC分类号： B24B37/013 ,  B24B49/16

摘要： Methods, apparatus, and systems for polishing a substrate are provided. The invention includes an upper platen; a torque/strain measurement instrument coupled to the upper platen; and a lower platen coupled to the torque/strain measurement instrument and adapted to drive the upper platen to rotate through the torque/strain measurement instrument. In other embodiments, the invention includes an upper carriage; a side force measurement instrument coupled to the upper carriage; and a lower carriage coupled to the side force measurement instrument and adapted to support a polishing head. Numerous additional aspects are disclosed.

摘要翻译： 提供了用于抛光衬底的方法，装置和系统。 本发明包括上压板; 耦合到上压板的扭矩/应变测量仪器; 以及耦合到扭矩/应变测量仪器并适于驱动上压板旋转通过扭矩/应变测量仪器的下压板。 在其他实施例中，本发明包括一个上部托架; 耦合到上部托架的侧向力测量仪器; 以及耦合到所述侧向力测量仪器并适于支撑抛光头的下托架。 公开了许多附加方面。

公开(公告)号：US20070272356A1

公开(公告)日：2007-11-29

申请号：US11837412

申请日：2007-08-10

申请人： Hung Chen ,  Jeonghoon Oh ,  Tsz-Sin Siu ,  Thomas Brezoczky ,  Steven Zuniga

发明人： Hung Chen ,  Jeonghoon Oh ,  Tsz-Sin Siu ,  Thomas Brezoczky ,  Steven Zuniga

IPC分类号： C23F1/00

CPC分类号： B24B37/30

摘要： A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.

摘要翻译： 用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。 柔性膜包括具有提供基板接收表面的外表面的中心部分，将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。 翼片将柔性膜和基部之间的体积分成多个室，并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

公开(公告)号：US20070202785A1

公开(公告)日：2007-08-30

申请号：US11614940

申请日：2006-12-21

申请人： Jeonghoon Oh ,  Tsz-Sin Siu ,  Hung Chen ,  Andrew Nagengast ,  Steven Zuniga ,  Thomas Brezoczky

发明人： Jeonghoon Oh ,  Tsz-Sin Siu ,  Hung Chen ,  Andrew Nagengast ,  Steven Zuniga ,  Thomas Brezoczky

IPC分类号： B24B41/06

CPC分类号： B24B37/30 ,  B24B41/06 ,  B29C33/424 ,  B29C35/02 ,  B29K2023/00 ,  B29K2083/00 ,  B29K2995/0074 ,  B29L2031/755

摘要： A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.

摘要翻译： 用于载体头部的柔性膜具有大致圆形的主要部分，具有下表面，用于连接到基座组件的环形外部部分和从主体部分在与下表面相对的一侧延伸的环形挡片，用于连接到 基座组件。 翼片的至少一个表面具有表面纹理以防止粘附。

公开(公告)号：US20060209758A1

公开(公告)日：2006-09-21

申请号：US11081989

申请日：2005-03-16

申请人： Gang Qiang ,  Lee Wang ,  Hung Chen

发明人： Gang Qiang ,  Lee Wang ,  Hung Chen

IPC分类号： H04Q7/00 ,  H04L12/56

CPC分类号： H04W36/0083 ,  H04W36/0055 ,  H04W88/06

摘要： The present invention discloses a system and method for fast and smooth roaming in a wireless network with plural access points. In order to keep better communication quality, the client device may have dual-transceiver. One transceiver is applied for transmitting and receiving data packets to and from a current associated access point. Concurrently, the other transceiver would scan for another suitable access point and prepare to re-associate with it. As the communication quality degrades to a predetermined level, which indicates that the linkage between the client device and the currently associated access point might be broken, the transceiver in scanning mode would begin to re-associate with a new access point to reduce the latency time. After that, the transceiver originally in the linking mode would switch to scan for another suitable access point while the other transceiver is associated with the newly associated access point.

摘要翻译： 本发明公开了一种在具有多个接入点的无线网络中快速平滑漫游的系统和方法。 为了保持更好的通信质量，客户端设备可能具有双收发器。 应用一个收发器用于向和从当前相关联的接入点发送和接收数据分组。 同时，另一个收发器将扫描另一个合适的接入点，并准备与其重新关联。 当通信质量下降到预定级别，其指示客户端设备和当前相关联的接入点之间的联系可能被破坏时，扫描模式中的收发器将开始与新接入点重新关联以减少等待时间 。 之后，最初处于链接模式的收发器将切换到扫描另一个合适的接入点，而另一个收发器与新关联的接入点相关联。

公开(公告)号：US20060171375A1

公开(公告)日：2006-08-03

申请号：US11049416

申请日：2005-02-02

申请人： Hung Chen ,  Gang Qiang ,  Yu Fu ,  Lee Wang

发明人： Hung Chen ,  Gang Qiang ,  Yu Fu ,  Lee Wang

IPC分类号： H04L12/66

CPC分类号： H04L12/18 ,  H04H20/78 ,  H04H60/23 ,  H04L12/2801 ,  H04N7/1675 ,  H04N7/17309 ,  H04N7/20 ,  H04N21/43637 ,  H04N21/4367 ,  H04N21/6118 ,  H04W84/12

摘要： The Hi-SD CBS includes a termination unit and pluralities of distributed customer premise units connected through the cable TV (CATV) network. The radio signals in Hi-SD CBS are propagating inside the co-axial cable. To insure the linking quality between the termination unit and customer premise devices, preamble procedures are required to adjust the transmitting radio power, the receiver sensitivity, the channel equalization, and to synchronize the transceivers for data transmission between the termination unit and the customer premise devices. To guarantee a secure link between the termination unit and an individual customer premise device or a group of premise devices, the termination unit provides different encryption keys to different customer premise device groups.

公开(公告)号：US20050211377A1

公开(公告)日：2005-09-29

申请号：US10810784

申请日：2004-03-26

申请人： Hung Chen ,  Jeonghoon Oh ,  Tsz-Sin Siu ,  Thomas Brezoczky ,  Steven Zuniga

发明人： Hung Chen ,  Jeonghoon Oh ,  Tsz-Sin Siu ,  Thomas Brezoczky ,  Steven Zuniga

IPC分类号： B24B37/04 ,  B44C1/22 ,  C23F1/00 ,  H01L21/68

CPC分类号： B24B37/30

摘要： A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.

摘要翻译： 用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。 柔性膜包括具有提供基板接收表面的外表面的中心部分，将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。 翼片将柔性膜和基部之间的体积分成多个室，并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

公开(公告)号：US06514124B1

公开(公告)日：2003-02-04

申请号：US09693618

申请日：2000-10-20

申请人： Steven Zuniga ,  Hung Chen ,  Manoocher Birang

发明人： Steven Zuniga ,  Hung Chen ,  Manoocher Birang

IPC分类号： B24B100

CPC分类号： B24B37/30

摘要： A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane with a lip portion to engage a substrate to form a seal for improved vacuum-chucking.

摘要翻译： 用于化学机械抛光装置的载体头包括具有唇部的柔性膜，以接合基底以形成用于改善真空吸附的密封。